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    Component for impedance change in a coplanar waveguide and method for producing a component
    1.
    发明授权
    Component for impedance change in a coplanar waveguide and method for producing a component 失效
    共面波导中的阻抗变化的分量和用于制造组件的方法

    公开(公告)号：US07535325B2

    公开(公告)日：2009-05-19

    申请号：US10572220

    申请日：2004-07-24

    申请人： Roland Mueller-Fiedler ,  Markus Ulm ,  Mathias Reimann ,  Thomas Buck

    发明人： Roland Mueller-Fiedler ,  Markus Ulm ,  Mathias Reimann ,  Thomas Buck

    IPC分类号： H01P1/10 ,  H01H59/00

    CPC分类号： H01H59/0009 ,  Y10T29/49105

    摘要： A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.

    摘要翻译： 提供了一种用于在共面波导中的阻抗变化的部件，其包括两个接地导体和位于接地导体之间的信号线，以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件， 并且是电绝缘的，使得在每种情况下都形成电容器。 连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容，但是连接元件和信号线之间的电容器具有可变电容。 还提供了一种结构，其中以相反的方式，接地导体和连接元件之间的相应电容器具有可变电容，但是连接元件和信号线之间的电容器具有不变的电容。 此外，还提供了这种组分的制造方法。

    Component for Impedance Change in a Coplanar Waveguide and Method for Producing a Component
    2.
    发明申请
    Component for Impedance Change in a Coplanar Waveguide and Method for Producing a Component 失效
    共面波导中的阻抗变化的组件和用于制造组件的方法

    公开(公告)号：US20070229198A1

    公开(公告)日：2007-10-04

    申请号：US10572220

    申请日：2004-07-24

    申请人： Roland Mueller-Fiedler ,  Markus Ulm ,  Mathias Reimann ,  Thomas Buck

    发明人： Roland Mueller-Fiedler ,  Markus Ulm ,  Mathias Reimann ,  Thomas Buck

    IPC分类号： H01P1/10 ,  H01H65/00

    CPC分类号： H01H59/0009 ,  Y10T29/49105

    摘要： A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.

    摘要翻译： 提供了一种用于在共面波导中的阻抗变化的部件，其包括两个接地导体和位于接地导体之间的信号线，以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件， 并且是电绝缘的，使得在每种情况下都形成电容器。 连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容，但是连接元件和信号线之间的电容器具有可变电容。 还提供了一种结构，其中以相反的方式，接地导体和连接元件之间的相应电容器具有可变电容，但是连接元件和信号线之间的电容器具有不变的电容。 此外，还提供了这种组分的制造方法。

    Electrical system, especially a microelectronic or microelectromechanical high frequency system
    4.
    发明申请
    Electrical system, especially a microelectronic or microelectromechanical high frequency system 审中-公开
    电气系统，特别是微电子或微机电高频系统

    公开(公告)号：US20060097388A1

    公开(公告)日：2006-05-11

    申请号：US10520218

    申请日：2003-06-24

    申请人： Klaus Breitschwerdt ,  Markus Ulm ,  Andrea Urban ,  Mathias Reimann

    发明人： Klaus Breitschwerdt ,  Markus Ulm ,  Andrea Urban ,  Mathias Reimann

    IPC分类号： H01L23/34

    CPC分类号： H01L23/66 ,  H01L2223/6616 ,  H01L2223/6627 ,  H01L2924/15313 ,  H01L2924/16152 ,  H01L2924/1903 ,  H01L2924/3011 ,  H01P1/047 ,  H01P11/00

    摘要： An electrical component is proposed, in particular a high-frequency microelectronic or microelectromechanical component having a base element that is provided with a feedthrough, a first conductive structure extending on an upper side of the base element being connected by the feedthrough, continuously for high-frequency electromagnetic waves, to a second conductive structure extending on a lower side of the base element. The feedthrough has the form of a right prism or cylinder, and the first and/or the second conductive structure is embodied as a planar waveguide, in particular as a coplanar waveguide. Also proposed is a method for producing an electrical component having a feedthrough for high-frequency electromagnetic waves through a base element, an electrically conductive layer being applied on an upper side of the base element and an etching mask being applied on a lower side of the base element; a trench, having at least almost perpendicular sidewalls and penetrating through the base element, then being etched into the base element in a plasma etching step; an electrically conductive layer being applied on the lower side after the etching and after removal of the etching mask; and the trench lastly being filled or lined with an electrically conductive material.

    摘要翻译： 提出了一种电气元件，特别是具有设置有馈通的基座元件的高频微电子或微机电元件，在基座元件的上侧延伸的第一导电结构，通过馈通连接， 到基底元件的下侧延伸的第二导电结构。 馈通具有右棱镜或圆筒的形式，并且第一和/或第二导电结构被实施为平面波导，特别是作为共面波导。 还提出了一种用于制造具有通过基底元件的高频电磁波的馈通的电气元件的方法，将导电层施加在基底元件的上侧，并且将蚀刻掩模施加在基底元件的下侧 基本元素 沟槽，具有至少几乎垂直的侧壁并穿过基底元件，然后在等离子体蚀刻步骤中蚀刻到基底元件中; 在蚀刻之后和去除蚀刻掩模之后，在下侧施加导电层; 并且沟槽最后被填充或衬有导电材料。

    METHOD FOR CONTROLLING A DEVICE AND A DEVICE FOR CONTROLLING THE DEVICE
    5.
    发明申请
    METHOD FOR CONTROLLING A DEVICE AND A DEVICE FOR CONTROLLING THE DEVICE 有权
    用于控制设备的方法和用于控制设备的设备

    公开(公告)号：US20100225500A1

    公开(公告)日：2010-09-09

    申请号：US12611662

    申请日：2009-11-03

    申请人： Markus ULM ,  Mathias Reimann ,  Harald Emmerich ,  Udo-Martin Gomez ,  Emma Abel

    发明人： Markus ULM ,  Mathias Reimann ,  Harald Emmerich ,  Udo-Martin Gomez ,  Emma Abel

    IPC分类号： G05B11/01

    CPC分类号： B60R21/0132 ,  B60R2021/01327 ,  G01C19/5726 ,  G01C19/574 ,  G01P15/14 ,  G01P21/00

    摘要： A device for controlling a device by using a rotation-rate sensor. In order to provide a device for determining a triggering signal for a safety device which allows a particularly compact implementation of the device, the device is set up to ascertain an acceleration variable on the basis of a first sensor signal for a first seismic mass of the rotation-rate sensor and the second sensor signal for a second seismic mass of the rotation-rate sensor and to control the device as a function of the acceleration variable.

    摘要翻译： 一种用于通过使用旋转速率传感器来控制设备的装置。 为了提供一种用于确定安全装置的触发信号的装置，其允许特别紧凑的装置的实现，该装置被设置为基于第一传感器信号来确定加速度变量，该第一传感器信号用于 旋转速率传感器和用于旋转速率传感器的第二地震质量的第二传感器信号，并且根据加速度变量来控制该装置。

    Arrangement and method for detecting connection loss at a circuit part having a capacitive behaviour
    7.
    发明授权
    Arrangement and method for detecting connection loss at a circuit part having a capacitive behaviour 有权

    公开(公告)号：US10107851B2

    公开(公告)日：2018-10-23

    申请号：US14000121

    申请日：2011-12-22

    申请人： Mathias Reimann

    发明人： Mathias Reimann

    IPC分类号： G01R31/04 ,  G01R31/02

    摘要： The disclosure relates to an arrangement for detecting connection loss at a circuit part which has a capacitive behavior and is electrically connected to a useful signal source. The disclosure provides an evaluation circuit which is electrically connected to an input node of the circuit part having a capacitive behavior and detects the pulsed useful signal (UNUTZ), output by the useful signal source, at the input node of the circuit part having a capacitive behavior and evaluates the signal characteristics in order to detect connection loss.

    Circuit Assembly and Method for Plausibility Checking of Sensor Signals
    9.
    发明申请
    Circuit Assembly and Method for Plausibility Checking of Sensor Signals 有权
    电路组件和传感器信号真实性检查方法

    公开(公告)号：US20140318209A1

    公开(公告)日：2014-10-30

    申请号：US14236931

    申请日：2012-06-11

    申请人： Mathias Reimann

    发明人： Mathias Reimann

    IPC分类号： G01D21/00

    CPC分类号： G01D21/00 ,  B60R21/01 ,  B60R2021/01047 ,  B60R2021/0119

    摘要： A circuit assembly for plausibility checking of sensor signals, which can be generated by at least two separate sensor elements, includes at least one evaluation and control unit which receives the sensor signals via at least one interface unit and evaluates the received sensor signals for generating sensor data. A first evaluation and control unit is configured to receive the sensor signals of a first sensor element and to generate first sensor data from the first sensor signals. The first evaluation and control unit is configured to provide the generated first sensor data via at least one interface unit to a second evaluation and control unit, which receives and evaluates the sensor signals of a second sensor element to generate second sensor data. The second evaluation and control unit compares the generated second sensor data and the generated first sensor data to each other and inspects them for plausibility.

    摘要翻译： 可由至少两个分开的传感器元件产生的传感器信号的真实性检查的电路组件包括至少一个评估和控制单元，其经由至少一个接口单元接收传感器信号，并评估所接收的传感器信号以产生传感器 数据。 第一评估和控制单元被配置为接收第一传感器元件的传感器信号并且从第一传感器信号产生第一传感器数据。 第一评估和控制单元被配置为经由至少一个接口单元将生成的第一传感器数据提供给第二评估和控制单元，其接收并评估第二传感器元件的传感器信号以产生第二传感器数据。 第二评估和控制单元将生成的第二传感器数据和所生成的第一传感器数据彼此进行比较，并检查它们的合理性。

    Self-test for yaw rate sensors
    10.
    发明授权
    Self-test for yaw rate sensors 有权
    偏航率传感器自检

    公开(公告)号：US08910518B2

    公开(公告)日：2014-12-16

    申请号：US13266408

    申请日：2010-04-06

    申请人： Wolfram Bauer ,  Johannes Classen ,  Rainer Willig ,  Matthias Meier ,  Burkhard Kuhlmann ,  Mathias Reimann ,  Ermin Esch ,  Hans-Dieter Schwarz ,  Michael Veith ,  Christoph Lang ,  Udo-Martin Gomez

    发明人： Wolfram Bauer ,  Johannes Classen ,  Rainer Willig ,  Matthias Meier ,  Burkhard Kuhlmann ,  Mathias Reimann ,  Ermin Esch ,  Hans-Dieter Schwarz ,  Michael Veith ,  Christoph Lang ,  Udo-Martin Gomez

    IPC分类号： G01C19/00 ,  G01C19/5726

    CPC分类号： G01C25/00 ,  G01C19/56 ,  G01C19/5726

    摘要： A yaw rate sensor (10) includes a movable mass structure (12) and a drive component (13) which is suitable for setting the movable mass structure (12) in motion (14), and an analysis component (15) which is suitable for detecting a response (40) of the movable mass structure (12) to a yaw rate (Ω). A method for functional testing of a yaw rate sensor (10) includes the following steps: driving a movable mass structure (12), feeding a test signal (42) into a quadrature control loop (44) at a feed point (48) of the quadrature control loop (44), feeding back a deflection (40) of the movable mass structure (12), detecting a measure of the feedback of the movable mass structure (12), and reading out the response signal (47) from the quadrature control loop (44). In the yaw rate sensor (10) and also in the method, the readout of the response signal (47) in relation to a processing direction (45) of the test signal (42) is provided between a feed point (48) for a test signal (42) and an actuator (38) for feeding back a deflection (40) of the movable mass structure (12).

    摘要翻译： 横摆率传感器（10）包括可移动质量结构（12）和适于设置可移动质量结构（12）运动（14）的驱动部件（13），以及适合的分析部件（15） 用于将所述可移动质量结构（12）的响应（40）检测到偏航率（＆lt; OHgr）。 一种用于横摆角速度传感器（10）的功能测试的方法包括以下步骤：驱动可移动质量结构（12），将测试信号（42）馈送到正交控制回路（44） 正交控制回路（44），反馈可移动质量结构（12）的偏转（40），检测可移动质量结构（12）的反馈的测量值，并从 正交控制回路（44）。 在偏航率传感器（10）中，并且在该方法中，响应信号（47）相对于测试信号（42）的处理方向（45）的读出被提供在用于 测试信号（42）和用于反馈可移动质量结构（12）的偏转（40）的致动器（38）。