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公开(公告)号：US20170358449A1
公开(公告)日：2017-12-14
申请号：US15466330
申请日：2017-03-22
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Byung Soo So , Mee Jae Kang , Ho Seok Lee , Jae Gyun Lim , Sang Ho Jeon , Yeon Hee Jeon
CPC classification number: H01L21/02675 , H01L21/67115 , H01L27/1274 , H01S3/005 , H01S3/03 , H01S3/0346 , H01S3/038 , H01S3/0407 , H01S3/041 , H01S3/0971 , H01S3/225
Abstract: A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.
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公开(公告)号：US11087980B2
公开(公告)日：2021-08-10
申请号：US15466330
申请日：2017-03-22
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Byung Soo So , Mee Jae Kang , Ho Seok Lee , Jae Gyun Lim , Sang Ho Jeon , Yeon Hee Jeon
IPC: H01L21/02 , H01S3/034 , H01L21/67 , H01L27/12 , H01S3/00 , H01S3/03 , H01S3/038 , H01S3/0971 , H01S3/225 , H01S3/04 , H01S3/041
Abstract: A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.
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