SEMICONDUCTOR PACKAGE BONDING TOOL AND SEMICONDUCTOR PACKAGE FABRICATION METHOD USING THE SAME

    公开(公告)号:US20250079232A1

    公开(公告)日:2025-03-06

    申请号:US18596869

    申请日:2024-03-06

    Abstract: A semiconductor package bonding tool includes a bonding plate and bonding blocks disposed on a bottom surface of the bonding plate. The bonding plate include first vacuum holes that vertically penetrate the bonding plate. The first vacuum holes connect a top surface of the bonding plate to the bottom surface of the bonding plate. Each of the bonding blocks includes a bonding stage disposed below a respective first vacuum hole of the first vacuum holes. The bonding stage includes a trench hole upwardly recessed from a bottom surface of the bonding stage, and a connection hole connecting a top surface of the bonding stage to the trench hole. A length in a horizontal direction of the trench hole is greater than that of the connection hole.

    SEMICONDUCTOR PACKAGE
    4.
    发明申请

    公开(公告)号:US20220415778A1

    公开(公告)日:2022-12-29

    申请号:US17655573

    申请日:2022-03-21

    Abstract: A semiconductor package includes a lower substrate that includes a lower wiring layer; a semiconductor chip disposed on the lower substrate, and an upper substrate disposed on the semiconductor chip. The upper substrate includes a lower surface that faces the semiconductor chip, an upper wiring layer, and a plurality of protruding structures disposed below the lower surface. The lower surface of the upper substrate includes a cavity region that overlaps the semiconductor chip in a first direction, and a plurality of channel regions that extend from the cavity region to an edge of the upper substrate. The cavity region and the plurality of channel regions are defined by the plurality of protruding structures.

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