公开(公告)号：US20210249279A1

公开(公告)日：2021-08-12

申请号：US17245079

申请日：2021-04-30

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Kenji KOBAYASHI ,  Jun SAWASHIMA ,  Yuta NISHIMURA ,  Akito HATANO ,  Motoyuki SHIMAI ,  Toyohide HAYASHI

IPC: H01L21/67

Abstract: A supply flow passage branches into a plurality of upstream flow passages. The plurality of upstream flow passages include a branching upstream flow passage that branches into a plurality of downstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis and discharge processing liquids, supplied via the plurality of upstream flow passages, toward an upper surface of a substrate held by a substrate holding unit.

公开(公告)号：US20190267257A1

公开(公告)日：2019-08-29

申请号：US16406419

申请日：2019-05-08

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Kenji KOBAYASHI ,  Jun SAWASHIMA ,  Yuta NISHIMURA ,  Akito HATANO ,  Motoyuki SHIMAI ,  Toyohide HAYASHI

IPC: H01L21/67

Abstract: A supply flow passage branches into a plurality of upstream flow passages. The plurality of upstream flow passages include a branching upstream flow passage that branches into a plurality of downstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis and discharge processing liquids, supplied via the plurality of upstream flow passages, toward an upper surface of a substrate held by a substrate holding unit.

公开(公告)号：US20160240413A1

公开(公告)日：2016-08-18

申请号：US15019246

申请日：2016-02-09

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Kenji KOBAYASHI ,  Jun SAWASHIMA ,  Yuta NISHIMURA ,  Akito HATANO ,  Motoyuki SHIMAI ,  Toyohide HAYASHI

IPC: H01L21/67

CPC classification number: H01L21/6708 ,  H01L21/67017 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/67109 ,  H01L21/67248

Abstract: A supply flow passage branches into a plurality of upstream flow passages. The plurality of upstream flow passages include a branching upstream flow passage that branches into a plurality of downstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis and discharge processing liquids, supplied via the plurality of upstream flow passages, toward an upper surface of a substrate held by a substrate holding unit.

Abstract translation: 供给流路分支成多个上游流路。 多个上游流路包括分支成多个下游流路的分支上游流路。 多个排出口分别设置在与旋转轴线不同的多个位置处，并且经由多个上游流动通道供给的排出处理液体朝向由基板保持单元保持的基板的上表面。

公开(公告)号：US20190198363A1

公开(公告)日：2019-06-27

申请号：US16328771

申请日：2017-05-25

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Motoyuki SHIMAI ,  Toyohide HAYASHI ,  Akito HATANO

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/67109 ,  H01L21/304 ,  H01L21/67051 ,  H01L21/6715 ,  H01L21/67248 ,  H01L21/677 ,  H01L21/67748 ,  H01L21/68707 ,  H01L21/68764

Abstract: A substrate processing device is provided with: a spin base disposed below a substrate grasped by a plurality of chuck members, the spin base transmitting the drive force of a spin motor to the chuck members; and a nozzle for supplying a processing fluid for processing the substrate to the top surface and/or bottom surface of the substrate. An IH heating mechanism of the substrate processing device has: a heat-generating member disposed between the substrate and the spin base; a heating coil disposed below the spin base; and an IH circuit for supplying electric power to the heating coil, whereby an alternating magnetic field applied to the heat-generating member is generated, and the heat-generating member is caused to generate heat.

公开(公告)号：US20160247697A1

公开(公告)日：2016-08-25

申请号：US15051034

申请日：2016-02-23

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Jun SAWASHIMA ,  Akito HATANO ,  Kenji KOBAYASHI ,  Yuta NISHIMURA ,  Motoyuki SHIMAI ,  Toyohide HAYASHI

IPC: H01L21/67 ,  H01L21/687

CPC classification number: H01L21/6708 ,  H01L21/67017 ,  H01L21/67051

Abstract: A supply flow passage branches into a plurality of upstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis of a substrate. A return flow passage is connected to the upstream flow passage. A downstream heater heats liquid flowing through the upstream flow passage. A downstream switching unit supplies the liquid, supplied to the plurality of upstream flow passages from the supply flow passage, to one of the plurality of discharge ports and the return flow passage, selectively.

Abstract translation: 供给流路分支成多个上游流路。 多个排出口分别设置在与基板的旋转轴线不同的多个位置。 回流通道连接到上游流动通道。 下游加热器加热流过上游流动通道的液体。 下游开关单元选择性地将从供给流路供给到多个上游流路的液体供给到多个排出口和返回流路中的一个。

公开(公告)号：US20160240399A1

公开(公告)日：2016-08-18

申请号：US15044452

申请日：2016-02-16

Applicant: SCREEN Holdings Co., Ltd.

Inventor： Kenji KOBAYASHI ,  Jun SAWASHIMA ,  Yuta NISHIMURA ,  Akihiro Nakashima ,  Motoyuki SHIMAI ,  Akito HATANO

IPC: H01L21/67 ,  H01L21/687

CPC classification number: H01L21/6708 ,  H01L21/67017 ,  H01L21/67028 ,  H01L21/67051 ,  H01L21/67109 ,  H01L21/67248

Abstract: A supply flow passage branches into a plurality of upstream flow passages. A plurality of discharge ports are respectively disposed at a plurality of positions differing in distance from a rotational axis of a substrate. Hydrogen peroxide water, that is one of components of a chemical liquid (SPM), is supplied to the upstream flow passage from a component liquid flow passage. A mixing ratio changing unit including a plurality of first flow control valves and a plurality of second flow control valves independently changes mixing ratios of sulfuric acid and hydrogen peroxide water included in the chemical liquid to be discharged from the plurality of discharge ports for each of the upstream flow passages.

Abstract translation: 供给流路分支成多个上游流路。 多个排出口分别设置在与基板的旋转轴线不同的多个位置。 作为化学液体（SPM）的成分之一的过氧化氢水从成分液体流路供给到上游流路。 包括多个第一流量控制阀和多个第二流量控制阀的混合比例改变单元独立地改变从多个排出口排出的药液中包含的硫酸和过氧化氢的混合比， 上游流通道。