公开(公告)号：US20230109944A1

公开(公告)日：2023-04-13

申请号：US18081084

申请日：2022-12-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Masahiro OSHIO ,  Takashi YAMAZAKI

IPC: H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  G01C19/5607 ,  H03H3/04 ,  H03H9/10 ,  G01C19/5621

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US20130081462A1

公开(公告)日：2013-04-04

申请号：US13687575

申请日：2012-11-28

Applicant: Seiko Epson Corporation

Inventor： Masahiro OSHIO

IPC: G01P1/02

CPC classification number: G01P1/023 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00293 ,  G01C19/56 ,  G01P2015/0814

Abstract: A composite sensor includes: a package including a container and a lid; a plurality of spaces that is partitioned by at least the container and the lid, and has different pressures, the plurality of the spaces including a first space sealed at around an atmospheric pressure and a second space sealed at a depressurized state; an acceleration sensor element disposed in the first space; and a vibration type angular velocity sensor element disposed in the second space. In the sensor, the first space has a volume smaller than a volume of the second space.

Abstract translation: 复合传感器包括：包括容器和盖子的包装件; 多个空间，其至少由所述容器和所述盖分隔，并且具有不同的压力，所述多个空间包括在大气压附近密封的第一空间和在减压状态下密封的第二空间; 设置在所述第一空间中的加速度传感器元件; 以及设置在所述第二空间中的振动型角速度传感器元件。 在传感器中，第一空间的体积小于第二空间的体积。

公开(公告)号：US20180313864A1

公开(公告)日：2018-11-01

申请号：US15964506

申请日：2018-04-27

Applicant: Seiko Epson Corporation

Inventor： Masahiro OSHIO

IPC: G01P1/00

CPC classification number: G01P1/006 ,  G01C19/56 ,  G01P21/00

Abstract: A control device connected to an inertial sensor having temperature characteristics, the control device including a memory for storing temperature compensation information, and update history information, an update determination circuit for determining the necessity of a temperature compensation information update based on a signal that is based on an output signal of a temperature sensor and the update history information, a rest determination circuit for determining whether the inertial sensor is at rest, and an updating circuit for updating the temperature compensation information based on the determination of the update determination circuit, the determination of the rest determination circuit, a signal based on an output signal of the inertial sensor, and the signal based on the output signal of the temperature sensor.

公开(公告)号：US20210063156A1

公开(公告)日：2021-03-04

申请号：US17005400

申请日：2020-08-28

Applicant: Seiko Epson Corporation

Inventor： Masahiro OSHIO ,  Keiichi YAMAGUCHI ,  Seiichiro OGURA ,  Ryuta NISHIZAWA

IPC: G01C19/5663 ,  G01C19/5656

Abstract: A vibrator device includes: a vibrator element that includes a vibrator substrate including a vibrating arm, and an electrode arranged in the vibrator substrate; a base; a support substrate that includes a base mount fixed to the base, an element support that supports the vibrator element, and a beam that connects between the base mount and the element support, and supports the vibrator element relative to the base; a wiring pattern that is arranged in the support substrate, and is electrically connected to the vibrator element; and a buffer member that is arranged on the wiring pattern of the support substrate, and whose hardness is lower than that of the support substrate. Also the buffer member is arranged on a face of the support substrate, that opposes the vibrator element, and overlaps the vibrating arm in a plan view of the support substrate.

公开(公告)号：US20190229706A1

公开(公告)日：2019-07-25

申请号：US16253712

申请日：2019-01-22

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Masahiro OSHIO ,  Takashi YAMAZAKI

IPC: H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  H03H3/04 ,  G01C19/5607

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US20190006575A1

公开(公告)日：2019-01-03

申请号：US16023057

申请日：2018-06-29

Applicant: Seiko Epson Corporation

Inventor： Keiichi YAMAGUCHI ,  Seiichiro OGURA ,  Masahiro OSHIO ,  Ryuta NISHIZAWA

IPC: H01L41/09 ,  H01L41/053 ,  H01L41/047 ,  H01L41/22

Abstract: A frequency adjustment method of a vibrator element includes preparing a vibrator element that has a vibrating arm, a first weight placed on one principal surface of the vibrating arm, and a second weight placed on the other principal surface of the vibrating arm, in which the first weight has a non-overlapping region which does not overlap the second weight in a plan view in a normal direction of the principal surface, preparing a substrate including a wiring portion, and fixing the vibrator element to the substrate by causing the other principal surface side of the vibrator element to face the substrate side, and irradiating the non-overlapping region of the first weight with an energy ray from one principal surface side, removing a portion of the non-overlapping region of the first weight, and adjusting a resonance frequency of the vibrating arm.

公开(公告)号：US20230387885A1

公开(公告)日：2023-11-30

申请号：US18446074

申请日：2023-08-08

Applicant: SEIKO EPSON CORPORATION

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Masahiro OSHIO ,  Takashi YAMAZAKI

IPC: H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  G01C19/5607 ,  H03H3/04 ,  H03H9/10 ,  G01C19/5621

CPC classification number: H03H9/21 ,  H03H3/02 ,  H03H9/0595 ,  G01C19/5607 ,  H03H3/04 ,  H03H9/1014 ,  H03H9/0533 ,  H03H9/0547 ,  G01C19/5621 ,  H03H2003/0492 ,  H03H2003/026

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US20210313959A1

公开(公告)日：2021-10-07

申请号：US17243632

申请日：2021-04-29

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Masahiro OSHIO ,  Takashi YAMAZAKI

IPC: H03H9/21 ,  H03H3/02 ,  H03H9/05 ,  G01C19/5607 ,  H03H3/04 ,  H03H9/10 ,  G01C19/5621

Abstract: A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

公开(公告)号：US20190301869A1

公开(公告)日：2019-10-03

申请号：US16367785

申请日：2019-03-28

Applicant: Seiko Epson Corporation

Inventor： Shogo SASAKI ,  Masashi SHIMURA ,  Keiichi YAMAGUCHI ,  Masahiro OSHIO ,  Ryuta NISHIZAWA ,  Seiichiro OGURA

IPC: G01C19/5663 ,  G01C19/5656 ,  B23K26/38

Abstract: A frequency adjustment method of a vibration element includes adjusting a resonance frequency of the vibration element by irradiating the vibration element, which includes a vibrating arm having a first principal surface and a second principal surface that are in a front and back relationship with each other with an energy ray, to remove a part of the vibrating arm on the first principal surface, and in which an activation amount by the energy ray on the second principal surface of the vibrating arm is smaller than an activation amount by the energy ray on the first principal surface of the vibrating arm.

公开(公告)号：US20190301867A1

公开(公告)日：2019-10-03

申请号：US16369025

申请日：2019-03-29

Applicant: Seiko Epson Corporation

Inventor： Shogo SASAKI ,  Masashi SHIMURA ,  Keiichi YAMAGUCHI ,  Masahiro OSHIO

IPC: G01C19/5628 ,  G01C19/5769

Abstract: A vibrating element includes a base, a vibrating arm extending from the base, and having an arm section provided with an electrode film, and a weight section, a weight film provided to the weight section, and the vibrating arm has a first principal surface and a second principal surface in an obverse-reverse relationship, the electrode film and the weight film are disposed on the first principal surface and the second principal surface, and a thickness of the electrode film disposed on the first principal surface, a thickness of the weight film disposed on the first principal surface, a thickness of the electrode film disposed on the second principal surface, and a thickness of the weight film disposed on the second principal surface are each no less than 50 nm and no more than 500 nm.