公开(公告)号：US12051565B2

公开(公告)日：2024-07-30

申请号：US17527128

申请日：2021-11-15

Applicant: SEMES CO., LTD.

Inventor： Young Kuk Kim ,  Tae Hoon Jo ,  Goon Ho Park ,  Ja Myung Gu

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/3244

Abstract: Disclosed is an apparatus for treating a substrate. The apparatus includes: an RF power supply; a process chamber which performs plasma processing by using power applied from the RF power supply; and an impedance matching unit which is disposed between the RF power supply and the process chamber and performs matching, in which the RF power supply includes a first sensor measuring impedance in a direction of the process chamber and the impedance matching unit, and the impedance matching unit performs impedance matching by reflecting impedance measured in the RF power supply through the first sensor.

公开(公告)号：US11823874B2

公开(公告)日：2023-11-21

申请号：US17323250

申请日：2021-05-18

Applicant: SEMES CO., LTD.

Inventor： Ogsen Galstyan ,  Junpyo Lee ,  Goon Ho Park ,  Hyun-Jin Kim ,  Young-Bin Kim ,  Jong-Hwan An

IPC: H01J37/32

CPC classification number: H01J37/32724 ,  H01J37/3244 ,  H01J37/3266 ,  H01J37/32174

Abstract: Disclosed is a substrate treating apparatus, which includes a chamber having a space for treating a substrate in an interior thereof, a substrate support assembly including a support plate situated in the chamber and which supports the substrate, a gas supply unit which supplies a gas into the interior of the chamber, a plasma generating unit which excites the gas in in the interior of the chamber into a plasma state, and a substrate temperature control unit which controls a temperature of the substrate, and the substrate temperature control unit includes a plurality of heaters installed in different areas of the support plate, a power supply part which supplies electric power to the plurality of heaters, a ferrite core which interrupts a low-frequency signal introduced to the power supply part, and a plurality of air cores which interrupts a high-frequency signal introduced into the power supply part.

公开(公告)号：US12087547B2

公开(公告)日：2024-09-10

申请号：US17532082

申请日：2021-11-22

Applicant: SEMES Co., Ltd.

Inventor： Goon Ho Park ,  Jung Mo Gu ,  Ja Myung Gu ,  Hyun Jin Kim

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/32146 ,  H01J37/3244

Abstract: Provided are an apparatus for multi-level pulsing, which minimizes power reflection when generating plasma using an RF signal having a plurality of pulsing levels, and a substrate processing apparatus including the same. The apparatus includes an RF signal generator for generating an RF signal including a first pulsing level and a second pulsing level that are different from each other, and a matching network for receiving the RF signal and providing a corresponding output signal to a load, wherein the RF signal generator generates the RF signal so that a first target impedance of the first pulsing level and a second target impedance of the second pulsing level are different from each other.

公开(公告)号：US11587770B2

公开(公告)日：2023-02-21

申请号：US16913467

申请日：2020-06-26

Applicant: SEMES CO., LTD.

Inventor： Jamyung Gu ,  Jong-Hwan An ,  Goon Ho Park ,  Taehoon Jo ,  Shant Arakelyan

IPC: H01J37/32

Abstract: A substrate treating apparatus includes a chamber having a process space therein, a substrate support unit that supports a substrate in the process space, a gas supply unit that supplies gas into the process space, and a plasma generation unit that generates plasma from the gas, wherein the substrate support unit includes a substrate support part that supports the substrate, a focus ring that surrounds the substrate support part, an insulator located below the focus ring and having a groove formed therein, an electrode provided in the groove formed in the insulator, and an impedance controller that is connected with the electrode and that adjusts impedance of the electrode, and the impedance controller includes a resonance control circuit that adjusts a maximum value of current applied to the electrode and an impedance control circuit that controls an incidence angle of plasma ions in an edge region of the substrate.

公开(公告)号：US20220172927A1

公开(公告)日：2022-06-02

申请号：US17532082

申请日：2021-11-22

Applicant: SEMES Co., Ltd.

Inventor： Goon Ho Park ,  Jung Mo Gu ,  Ja Myung Gu ,  Hyun Jin Kim

IPC: H01J37/32

Abstract: Provided are an apparatus for multi-level pulsing, which minimizes power reflection when generating plasma using an RF signal having a plurality of pulsing levels, and a substrate processing apparatus including the same. The apparatus includes an RF signal generator for generating an RF signal including a first pulsing level and a second pulsing level that are different from each other, and a matching network for receiving the RF signal and providing a corresponding output signal to a load, wherein the RF signal generator generates the RF signal so that a first target impedance of the first pulsing level and a second target impedance of the second pulsing level are different from each other.