BONDING APPARATUS AND BONDING METHOD FOR POWER TERMINAL OF HEATING PLATE

    公开(公告)号:US20230201942A1

    公开(公告)日:2023-06-29

    申请号:US18145125

    申请日:2022-12-22

    申请人: SEMES CO., LTD.

    IPC分类号: B23K1/00 B25B11/00 B23K37/04

    摘要: The present invention relates to a bonding apparatus for a power terminal of a heating plate, for bonding the power terminal supplying power to a heating wire of a substrate. The bonding apparatus for a power terminal of a heating plate comprises: a chamber; a stage which is disposed in an inner space of the chamber and on which the substrate is placed; an upper press portion disposed in the inner space of the chamber to face the stage, provided to be vertically movable, and having a terminal fixing portion configured to fix the power terminal; and an elevating driver configured to move the upper press portion up and down, wherein the terminal fixing portion further includes a magnetic holder configured to hold the power terminal by a magnetic force.

    HEATING DEVICE AND SUBSTRATE PROCESSING APPARATUS COMPRISING THE SAME

    公开(公告)号:US20230171853A1

    公开(公告)日:2023-06-01

    申请号:US17865976

    申请日:2022-07-15

    申请人: SEMES CO., LTD.

    摘要: A heating device capable of heating a processing liquid stably and efficiently is provided. The heating device comprises a first unit heater including a first flow path, a second unit heater including a second flow path, and a first tube connecting the first unit heater and the second unit heater, wherein a processing liquid flows through the first flow path, the first tube, and the second flow path, and is heated by the first unit heater and the second unit heater, wherein the first unit heater comprises a first pipe extending along a first direction and including the first flow path formed therein along the first direction, a first input terminal formed on a surface of the first pipe and extending in the first direction, a first output terminal formed on a surface of the first pipe, extending in the first direction, and spaced apart from the first input terminal, a plurality of first heating wires spaced apart from each other, formed on a surface of the first pipe, and connecting the first input terminal and the first output terminal.