公开(公告)号：US20230131576A1

公开(公告)日：2023-04-27

申请号：US17969155

申请日：2022-10-19

Applicant: SEMES CO., LTD.

Inventor： Do Gyeong HA ,  Tae Suk YUN ,  Moon Soon CHOI ,  Gu Yeol AN ,  Chae Young LIM ,  Bu Young JUNG

IPC: H01L21/67

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit configured to support a substrate; and a liquid supply unit configured to supply a treating liquid onto the substrate supported on the support unit, and wherein the liquid supply unit comprises: a tank configured to have an accommodation space for storing the treating liquid therein; a circulation line configured to circulate the treating liquid stored in the accommodation space; a supplementary line configured to supply the treating liquid to the accommodation space, and at which a valve is installed; a heater installed at the circulation line, and for heating the treating liquid; and a controller is configured to control the valve and the heater.

公开(公告)号：US20250016888A1

公开(公告)日：2025-01-09

申请号：US18660317

申请日：2024-05-10

Applicant: SEMES CO., LTD.

Inventor： Chae Young LIM ,  Moon Soon CHOI

IPC: H05B1/02

Abstract: An apparatus for processing a substrate includes a liquid supply line; a pressure tank configured to store liquid; a circulation line including a first heating unit configured to heat liquid, wherein liquid heated by the first heating unit circulates in the pressure tank in a liquid supply standby state, which is before liquid is supplied to the substrate in a process chamber; a pressured gas supply line configured to supply pressured gas to the pressure tank in the liquid supply standby state and to pressurize gas; an exhaust line configured to exhaust gas in the pressure tank; and a control unit configured to control pressure in the pressure tank to increase to a predetermined pressure by opening the pressured gas supply line in a state in which the pressure tank is closed before liquid circulates in the pressure tank in the liquid supply standby state.

公开(公告)号：US20230173438A1

公开(公告)日：2023-06-08

申请号：US17952446

申请日：2022-09-26

Applicant: SEMES CO., LTD.

Inventor： Gu Yeol AN ,  Do Gyeong HA ,  Moon Soon CHOI ,  Bu Young JUNG ,  Kyung Hun LEE ,  Chae Young LIM

IPC: B01F25/10 ,  B01F23/40 ,  B01F25/46 ,  B01F23/45

CPC classification number: B01F25/104 ,  B01F23/49 ,  B01F25/46 ,  B01F23/452 ,  B01F2101/24

Abstract: An apparatus for processing a substrate includes a mixing nozzle having a mixing space that is shaped as an inverted cone, the mixing nozzle including a first inlet, a second inlet and an outlet installed at the mixing space; a first chemical supply unit connected to the first inlet; a second chemical supply unit connected to the second inlet; and a supply tank connected to the outlet, wherein the first chemical supply unit is configured to supply a first chemical solution to the mixing space through the first inlet, the second chemical supply unit is configured to supply a second chemical solution to the mixing space through the second inlet, and the supply tank is supplied with, through the outlet, a solution mixture that is formed of the first chemical solution and the second chemical solution after being mixed in the mixing space.

公开(公告)号：US20230194422A1

公开(公告)日：2023-06-22

申请号：US18080552

申请日：2022-12-13

Applicant: SEMES CO., LTD.

Inventor： Seung Tae YANG ,  Sang Woo PARK ,  Young Joon HAN ,  Gi Hun CHOI ,  Moon Soon CHOI ,  Seong Hyeon KIM ,  Bu Young JUNG

IPC: G01N21/3577 ,  B01L3/00

CPC classification number: G01N21/3577 ,  B01L3/502 ,  G01N2021/3595

Abstract: A chemical liquid supply unit includes a chemical liquid storage storing a chemical liquid, a chemical liquid supply line that is connected to the chemical liquid storage, the chemical liquid flowing through the chemical liquid supply line from the chemical liquid storage, and a chemical liquid inspection means detecting impurities from the chemical liquid flowing through the chemical liquid supply line using a spectroscopy method.

公开(公告)号：US20230089188A1

公开(公告)日：2023-03-23

申请号：US17941526

申请日：2022-09-09

Applicant: SEMES CO., LTD.

Inventor： Moon Soon CHOI ,  Chae Young LIM ,  Do Gyeong HA ,  Gu Yeol AN

IPC: B05B9/04

Abstract: The inventive concept provides a liquid storage unit. The liquid storage unit includes a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet.