Semiconductor Device And Manufacturing Method Thereof

    公开(公告)号:US20240016044A1

    公开(公告)日:2024-01-11

    申请号:US18370616

    申请日:2023-09-20

    CPC classification number: H10K59/131 H10K59/1201 H10K59/8722

    Abstract: As a result of miniaturization of a pixel region associated with an improvement in definition and an increase in a substrate size associated with an increase in area, defects due to precision, bending, and the like of a mask used at the time of evaporation have become issues. A partition including portions with different thicknesses over a pixel electrode (also referred to as a first electrode) in a display region and in the vicinity of a pixel electrode layer is formed, without increasing the number of steps, by using a photomask or a reticle provided with an auxiliary pattern having a light intensity reduction function made of a diffraction grating pattern or a semi-transmissive film.

    Semiconductor Device And Manufacturing Method Thereof

    公开(公告)号:US20220059809A1

    公开(公告)日:2022-02-24

    申请号:US17519051

    申请日:2021-11-04

    Abstract: As a result of miniaturization of a pixel region associated with an improvement in definition and an increase in a substrate size associated with an increase in area, defects due to precision, bending, and the like of a mask used at the lime of evaporation have become issues. A partition including portions with different thicknesses over a pixel electrode (also referred to as a first electrode) in a display region and in the vicinity of a pixel electrode layer is formed, without increasing the number of steps, by using a photomask or a reticle provided with an auxiliary pattern having a light intensity reduction function made of a diffraction grating pattern or a semi-transmissive film.

    Method for manufacturing SOI substrate and semiconductor device
    6.
    发明授权
    Method for manufacturing SOI substrate and semiconductor device 有权
    制造SOI衬底和半导体器件的方法

    公开(公告)号:US08951878B2

    公开(公告)日:2015-02-10

    申请号:US14097793

    申请日:2013-12-05

    CPC classification number: H01L21/84 H01L21/26506 H01L21/76254

    Abstract: It is an object of the present invention to provide a method for manufacturing an SOI substrate having an SOI layer that can be used in practical applications with high yield even when a flexible substrate such as a glass substrate or a plastic substrate is used. Further, it is another object of the present invention to provide a method for manufacturing a thin semiconductor device using such an SOI substrate with high yield. When a single-crystal semiconductor substrate is bonded to a flexible substrate having an insulating surface and the single-crystal semiconductor substrate is separated to manufacture an SOI substrate, one or both of bonding surfaces are activated, and then the flexible substrate having an insulating surface and the single-crystal semiconductor substrate are attached to each other.

    Abstract translation: 本发明的目的是提供一种制造具有SOI层的SOI衬底的方法,该SOI衬底即使在使用诸如玻璃衬底或塑料衬底的柔性衬底时,也可以在实际应用中以高产率使用。 此外,本发明的另一个目的是提供一种以高产率制造使用这种SOI衬底的薄半导体器件的方法。 当将单晶半导体衬底接合到具有绝缘表面的柔性衬底并且分离单晶半导体衬底以制造SOI衬底时,一个或两个键合表面被激活,然后柔性衬底具有绝缘表面 并且单晶半导体衬底彼此附接。

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