公开(公告)号：US10518380B2

公开(公告)日：2019-12-31

申请号：US15762371

申请日：2016-09-15

Applicant: SHIN-ETSU HANDOTAI CO., LTD.

Inventor： Koji Kitagawa ,  Shiro Toyoda

IPC: B24B27/06 ,  B28D5/00 ,  B28D5/04 ,  H01L21/304

Abstract: A method for slicing a workpiece using a wire saw which includes wire row formed by winding a fixed abrasive grain wire having abrasive grains secured to a surface around a plurality of grooved rollers, the method including feeding a columnar workpiece to wire row for slicing while allowing fixed abrasive grain wire to reciprocate and travel in an axial direction, thereby slicing the workpiece at a plurality of positions aligned in axial direction at same time. After end of slicing the workpiece, the fixed abrasive grain wire is rewound from position at the end of slicing the workpiece by length of ⅓ or more and ⅔ or less of the fixed abrasive grain wire fed's length from start of slicing when the workpiece and wire row begin to contact with each other to the end of slicing the workpiece, and then the workpiece is drawn out of wire row.

公开(公告)号：US11958160B2

公开(公告)日：2024-04-16

申请号：US16963972

申请日：2018-11-26

Applicant: SHIN-ETSU HANDOTAI CO., LTD.

Inventor： Koji Kitagawa ,  Shiro Toyoda

IPC: B24B55/02 ,  B23D57/00 ,  B23D59/04 ,  B23D61/18 ,  B24B27/06 ,  B24B41/00 ,  B28D5/00 ,  B28D5/04 ,  B28D7/02

CPC classification number: B24B27/0633 ,  B23D57/0007 ,  B23D61/18 ,  B24B41/005 ,  B24B55/02 ,  B28D5/0076 ,  B28D5/04 ,  B28D5/042 ,  B28D5/045 ,  B28D7/02

Abstract: A method for slicing a workpiece with a wire saw which includes a wire row formed by winding a fixed abrasive grain wire having abrasive grains secured to a surface thereof around multiple grooved rollers, the method including feeding a workpiece to the wire row for slicing while allowing the fixed abrasive grain wire to reciprocatively travel in an axial direction thereof, thereby slicing the workpiece at multiple positions aligned in an axial direction of the workpiece simultaneously. The method includes: supplying a coolant for workpiece slicing onto the wire row when the workpiece is sliced with the fixed abrasive grain wire; and supplying a coolant for workpiece drawing, which differs from and has a higher viscosity than the coolant for workpiece slicing, onto the wire row when the workpiece is drawn out from the wire row after the slicing of the workpiece.