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    METHOD FOR SLICING WORKPIECE AND PROCESSING LIQUID
    3.
    发明申请
    METHOD FOR SLICING WORKPIECE AND PROCESSING LIQUID 审中-公开
    制造工艺和加工液体的方法

    公开(公告)号：US20170015019A1

    公开(公告)日：2017-01-19

    申请号：US15124245

    申请日：2015-03-06

    申请人： SHIN-ETSU HANDOTAI CO., LTD.

    发明人： Keiichi KANBAYASHI

    IPC分类号： B28D5/00 ,  B24B27/06 ,  B28D5/04

    CPC分类号： B28D5/007 ,  B24B27/0633 ,  B28D5/045 ,  C09K3/1463 ,  Y02P70/179

    摘要： The present invention is a method for slicing a workpiece, including: forming a wire row by a wire spirally wound between a plurality of wire guides and traveling in an axial direction, and pressing a workpiece against the wire row while supplying a processing liquid containing abrasive grains to a contact portion between the workpiece and the wire, wherein a used portion of the abrasive grains are subjected to a treatment with a mixed liquid of sulfuric acid and hydrogen peroxide, and the abrasive grains subjected to the treatment are reused for the slicing of a workpiece. This makes it possible to slice a workpiece with suppressing contamination of a wafer with metal impurities when abrasive grains are reused in slicing a workpiece by use of a wire saw.

    摘要翻译： 本发明是一种用于切割工件的方法，包括：通过螺旋形缠绕在多个导线器之间并沿轴向行进的线形成线列，并且将工件压靠在线列上，同时提供含有磨料的处理液 将颗粒与工件和焊丝之间的接触部分接触，其中将磨粒的使用部分用硫酸和过氧化氢的混合液进行处理，并将经过处理的磨粒重新用于切片 工件。 这使得可以通过使用线锯在磨削工件时重复使用磨料颗粒时，以金属杂质抑制晶片的污染来切割工件。

    METHOD FOR SLICING WORKPIECE AND WORKPIECE HOLDER
    4.
    发明申请
    METHOD FOR SLICING WORKPIECE AND WORKPIECE HOLDER 审中-公开
    切割工件和工件夹具的方法

    公开(公告)号：US20160303765A1

    公开(公告)日：2016-10-20

    申请号：US15100378

    申请日：2014-11-27

    申请人： SHIN-ETSU HANDOTAI CO., LTD.

    发明人： Atsuo UCHIYAMA ,  Hisakazu TAKANO ,  Masahito SAITOH ,  Hirotoshi KOUZU

    IPC分类号： B28D5/00 ,  H01L21/66 ,  H01L21/304 ,  B28D5/04 ,  B24B27/06

    CPC分类号： B28D5/0082 ,  B24B27/0633 ,  B28D5/045 ,  H01L21/304 ,  H01L22/12

    摘要： Method for slicing a workpiece, including measuring a crystal axis orientation while holding a workpiece with a workpiece holder, setting the workpiece holder to a wire saw in such a manner that the measured crystal axis orientation is maintained, then adjusting a sliced plane orientation, pressing the workpiece against a wire row to slice the workpiece; the workpiece holder includes a portion slidable while holding the workpiece and a portion for fixing the slide portion, after measuring the crystal axis orientation, sliding the slide portion to move to the workpiece holder center in a manner that the measured crystal axis orientation is maintained, fixing the slide portion, setting the workpiece holder to the wire saw, then adjusting the sliced plane orientation, and slicing the workpiece. This enables an orientation measurement without limitation of distance between an orientation measuring instrument and plane to be measured can inhibit warpage deterioration and workpiece breakage.

    摘要翻译： 对工件进行切割的方法，包括在用工件夹持器保持工件的同时测量晶轴取向，将工件夹持器固定到线锯，使得保持测量的晶轴取向，然后调整切片平面取向，压制 工件对着线排切割工件; 工件保持器包括在保持工件时可滑动的部分和用于固定滑动部分的部分，在测量晶轴方向之后，以保持测量的晶轴取向的方式滑动滑动部分移动到工件保持架中心， 固定滑动部分，将工件夹具设置到线锯上，然后调整切片平面方向，并切割工件。 这样，在取向测定装置与被测定面之间的距离不受限制的情况下，能够抑制翘曲变形和工件破损。

    METHOD FOR SLICING WORKPIECE
    5.
    发明申请
    METHOD FOR SLICING WORKPIECE 审中-公开
    切割工作方法

    公开(公告)号：US20160250776A1

    公开(公告)日：2016-09-01

    申请号：US15027157

    申请日：2014-10-27

    申请人： SHIN-ETSU HANDOTAI CO., LTD.

    发明人： Keiichi KANBAYASHI

    IPC分类号： B28D5/04 ,  B28D7/02 ,  B24B27/06

    CPC分类号： B28D5/045 ,  B24B27/0633 ,  B28D7/02

    摘要： A method for slicing workpiece reusing a wire used for previous slicing of a workpiece to slice a subsequent workpiece by which the workpiece is pressed against a wire row and sliced, the wire row being formed of the wire spirally wound between a plurality of wire guides and travels in an axial-direction, where wire tension at the time of slicing the workpiece is set to a value in the range of 87 to 95% of wire tension in the previous slicing of the workpiece, a new wire supply amount at the time of slicing the workpiece is set to a value in the range of 125% or more of a new wire supply amount in the previous slicing of the workpiece, and the wire is reused to slice the subsequent workpiece.

    摘要翻译： 一种用于切割工件的方法，该工件重新使用用于先前切割工件的线材以切割随后的工件，通过该工件将工件压靠在线排并切割，线排由螺旋地缠绕在多个线导向器和 沿着轴向移动，其中在将工件切割时的线张力设定为在先前的工件切割中的线张力的87至95％的范围内的值， 将工件切片设定为在先前的工件切割中的新的丝线供给量的125％以上的范围内的值，并且将线重新用于切割随后的工件。

    WIRE SAW AND WORKPIECE MACHINING METHOD EMPLOYING SAME
    8.
    发明申请
    WIRE SAW AND WORKPIECE MACHINING METHOD EMPLOYING SAME 有权
    使用其工作的线和工件加工方法

    公开(公告)号：US20150202797A1

    公开(公告)日：2015-07-23

    申请号：US14413187

    申请日：2013-07-02

    申请人： Komatsu NTC Ltd.

    发明人： Hiroshi Nakamoto ,  Tomoyuki Kawatsu ,  Satoshi Ishizuka ,  Akinori Himata ,  Takafumi Satake

    IPC分类号： B28D1/08

    CPC分类号： B28D1/08 ,  B24B27/0633 ,  B24B41/06 ,  B28D5/0082 ,  B28D5/045

    摘要： Provided is a wire saw where a wire (47) extends and is wound around a plurality of machining rollers (45), the wire (47) is moved in a circulating manner around the machining rollers (45) due to rotation of the machining rollers (45), and a workpiece (49) is cut by the wire (47) at a workpiece cutting position. The wire saw includes a supply pallet (67) which guides the workpiece (49) to move toward the wire (47) at the workpiece cutting position in an upright state. The wire saw also includes a receiving pallet (100) which is arranged at a workpiece receiving position located downstream of the workpiece cutting position in the workpiece conveying direction, and receives the cut workpiece (49) with the workpiece (49) being kept in an upright state.

    摘要翻译： 本发明提供一种电线锯，其中电线（47）延伸并卷绕在多个加工辊（45）周围，线（47）由于加工辊的旋转而围绕加工辊（45）以循环方式移动 （45），并且工件（49）在工件切割位置被线（47）切割。 线锯包括在直立状态下在工件切割位置引导工件（49）朝向线（47）移动的供应托盘（67）。 线锯还包括接收托盘（100），其被布置在工件移动方向上位于工件切割位置下游的工件接收位置处，并且接收切割工件（49），工件（49）保持在 直立状态

    Method of cutting workpiece with wire saw, and wire saw
    9.
    发明授权
    Method of cutting workpiece with wire saw, and wire saw 有权
    用线锯和线锯切割工件的方法

    公开(公告)号：US08991381B2

    公开(公告)日：2015-03-31

    申请号：US13576738

    申请日：2010-02-08

    申请人： Jun Ohya ,  Tatsumi Hamasaki ,  Hiroyuki Yoshimura ,  Masaru Fukuman

    发明人： Jun Ohya ,  Tatsumi Hamasaki ,  Hiroyuki Yoshimura ,  Masaru Fukuman

    IPC分类号： B28D5/04 ,  B23D57/00 ,  B24B27/06

    CPC分类号： B28D5/045 ,  B23D57/0069 ,  B24B27/0633

    摘要： The present invention provides a method of cutting a workpiece efficiently with high accuracy by utilizing tension adjusters to approximate tension in a wire in a wire saw to a predetermined target tension while effectively reducing only tension in a winder-side wire. The method comprises a forward-driven cutting step of cutting a workpiece while moving a wire forward, a first switching step of reversing a driving direction of the wire, a backward-driven cutting step of cutting the workpiece while moving the wire backward, and a second switching step of reversing a driving direction of the wire and returning to the forward-driven cutting step, the steps being repeated in this order. In both switching steps, only tension in a winder-side wire is reduced by tension manipulators. A reduction in target wire tension therefor is performed after completion of deceleration of the wire in each switching step.

    摘要翻译： 本发明提供了一种通过利用张力调节器来有效地切割工件的方法，以使线锯中的线材的张力近似到预定的目标张力，同时有效地仅减小缠绕器线材中的张力。 该方法包括：向前驱动切割步骤，在向前移动线的同时切割工件;反转线的驱动方向的第一切换步骤;向后移动切割工件的向后驱动切割步骤;以及 第二切换步骤，其使线的驱动方向反转并返回到前进驱动的切割步骤，按顺序重复该步骤。 在两个切换步骤中，仅通过张力操纵器减小卷绕机侧线中的张力。 在每个切换步骤中线材的减速完成之后，执行目标线张力的降低。