Abstract:
A semiconductor integrated circuit device includes a semiconductor substrate, a lower electrode disposed on the semiconductor substrate wherein an upper surface of the lower electrode has a recess, an interlayer insulating layer disposed on the semiconductor substrate and the lower electrode, the interlayer insulating layer including a variable resistive region exposing the upper surface of the lower electrode, and a variable resistive layer filled in the variable resistive region that contacts the recess of the lower electrode. The variable resistive layer is formed to have an increased width toward a top and a bottom thereof.
Abstract:
A resistive memory device capable of preventing disturbance is provided. The resistive memory device includes a lower electrode formed on a semiconductor substrate, a variable resistor disposed on the lower electrode, an upper electrode disposed on the variable resistor, and an interlayer insulating layer configured to insulate the variable resistor. The interlayer insulating layer may include an air-gap area in at least a portion thereof.
Abstract:
A resistive memory device may include a bottom structure, a memory cell structure disposed on the bottom structure, and a data storage material disposed to surround an outer sidewall of the memory cell structure.