公开(公告)号：US20130239686A1

公开(公告)日：2013-09-19

申请号：US13888170

申请日：2013-05-06

Applicant: STMICROELECTRONICS S.R.I.

Inventor： Gabriele Cazzaniga ,  Luca Coronato ,  Barbara Simoni

IPC: G01P15/125 ,  G01P15/02

CPC classification number: G01P15/125 ,  G01C19/5712 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/02 ,  G01P2015/0831

Abstract: A MEMS detection structure is provided with: a substrate having a top surface, on which a first fixed-electrode arrangement is set; a sensing mass, extending in a plane and suspended above the substrate and above the first fixed-electrode arrangement at a separation distance; and connection elastic elements that support the sensing mass so that it is free to rotate out of the plane about an axis of rotation, modifying the separation distance, as a function of a quantity to be detected along an axis orthogonal to the plane. The MEMS detection structure also includes: a coupling mass, suspended above the substrate and connected to the sensing mass via the connection elastic elements; and an anchoring arrangement, which anchors the coupling mass to the substrate with a first point of constraint, set at a distance from the axis of rotation and in a position corresponding to the first fixed-electrode arrangement.

Abstract translation: MEMS检测结构设置有：具有顶表面的基板，其上设置有第一固定电极布置; 感测质量块，在平面内延伸并悬挂在衬底上方，并以分隔距离悬挂在第一固定电极装置上方; 以及连接弹性元件，其支撑感测质量，使得其可以围绕旋转轴线自由地旋转离开平面，根据沿着与该平面垂直的轴线被检测的量来修改分离距离。 MEMS检测结构还包括：耦合质量块，悬挂在衬底上并通过连接弹性元件连接到感测质量块; 以及锚定装置，其将耦合质量块固定到具有第一限制点的衬底上，该第一约束点设置在距旋转轴线一定距离处，并且位于对应于第一固定电极装置的位置。

公开(公告)号：US20130106241A1

公开(公告)日：2013-05-02

申请号：US13718964

申请日：2012-12-18

Applicant: STMicroelectronics S.r.I.

Inventor： Gabriele Cazzaniga ,  Luca Coronato

IPC: B81B3/00

CPC classification number: B81B3/0018 ,  B81B3/0013 ,  B81B2201/0235 ,  B81B2201/0242

Abstract: An embodiment of a microelectromechanical device having a first structural element, a second structural element, which is mobile with respect to the first structural element, and an elastic supporting structure, which extends between the first and second structural elements to enable a relative movement between the first and second structural elements. The microelectromechanical device moreover possesses an anti-stiction structure, which includes at least one flexible element, which is fixed only with respect to the first structural element and, in a condition of rest, is set at a first distance from the second structural element. The anti-stiction structure is designed to generate a repulsive force between the first and second structural elements in the case of relative movement by an amount greater than the first distance.

Abstract translation: 具有第一结构元件，相对于第一结构元件可移动的第二结构元件的微机电装置的实施例和在第一和第二结构元件之间延伸的弹性支撑结构，以使得能够在 第一和第二结构元件。 此外，微电子机械装置具有抗静电结构，其包括至少一个柔性元件，其仅相对于第一结构元件固定，并且在休止状态下被设置在离第二结构元件第一距离处。 抗静力结构被设计成在相对运动大于第一距离的量的情况下在第一和第二结构元件之间产生排斥力。