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公开(公告)号:US09257550B2
公开(公告)日:2016-02-09
申请号:US14788708
申请日:2015-06-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Donato Corona , Nicolo′ Frazzetto , Antonio Giuseppe Grimaldi , Corrado Iacono , Monica Micciche′
IPC: H01L29/78 , H01L29/423 , H01L29/66 , H01L21/02 , H01L21/04 , H01L29/10 , H01L29/16 , H01L29/732 , H01L29/808 , H01L29/165 , H01L29/06 , H01L29/08 , H01L29/40
CPC classification number: H01L29/7802 , H01L21/02381 , H01L21/02447 , H01L21/02502 , H01L21/02529 , H01L21/02532 , H01L21/02576 , H01L21/046 , H01L29/0615 , H01L29/0634 , H01L29/0638 , H01L29/0821 , H01L29/0878 , H01L29/0886 , H01L29/1004 , H01L29/1095 , H01L29/1608 , H01L29/165 , H01L29/402 , H01L29/4236 , H01L29/66068 , H01L29/66348 , H01L29/66712 , H01L29/66734 , H01L29/66916 , H01L29/7322 , H01L29/7813 , H01L29/8083
Abstract: An embodiment of an integrated electronic device formed in a body of semiconductor material, which includes: a substrate of a first semiconductor material, the first semiconductor material having a first bandgap; a first epitaxial region of a second semiconductor material and having a first type of conductivity, which overlies the substrate and defines a first surface, the second semiconductor material having a second bandgap wider than the first bandgap; and a second epitaxial region of the first semiconductor material, which overlies, and is in direct contact with, the first epitaxial region. The first epitaxial region includes a first buffer layer, which overlies the substrate, and a drift layer, which overlies the first buffer layer and defines the first surface, the first buffer layer and the drift layer having different doping levels.