公开(公告)号：US20160305780A1

公开(公告)日：2016-10-20

申请号：US15192404

申请日：2016-06-24

Applicant: STMicroelectronics S.r.l.

Inventor： Claudia Comi ,  Alberto Corigliano ,  Leonardo Baldasarre

IPC: G01C19/574 ,  G01P15/125 ,  G01P15/097

CPC classification number: G01C19/574 ,  G01C19/56 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0831

Abstract: An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.

Abstract translation: 集成的检测结构具有第一惯性质量和第二惯性质量，其中每一个惯性质量块和第二惯性质量块都被弹性锚固到基底上，并且沿第一水平轴线具有直线运动，围绕第一旋转轴线旋转的第一检测运动 第二水平轴和沿着第二水平轴的平移的第二检测运动; 驱动电极引起惯性块在第一水平轴线的相反方向上的线性移动; 一对弯曲谐振器元件和一对扭转谐振器元件弹性耦合到惯性块，扭转谐振元件具有围绕彼此平行的第二旋转轴线和第三旋转轴线的共振旋转运动，并且 第一个旋转轴。

公开(公告)号：US12038283B2

公开(公告)日：2024-07-16

申请号：US17821724

申请日：2022-08-23

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US11448507B2

公开(公告)日：2022-09-20

申请号：US16697092

申请日：2019-11-26

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US09989364B2

公开(公告)日：2018-06-05

申请号：US15192404

申请日：2016-06-24

Applicant: STMicroelectronics S.r.l.

Inventor： Claudia Comi ,  Alberto Corigliano ,  Leonardo Baldasarre

IPC: G01C19/56 ,  G01C19/574 ,  G01P15/097 ,  G01P15/125 ,  G01P15/08

CPC classification number: G01C19/574 ,  G01C19/56 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0831

Abstract: An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.

公开(公告)号：US20150362522A1

公开(公告)日：2015-12-17

申请号：US13952503

申请日：2013-07-26

Applicant: STMicroelectronics S.r.l. ,  Politecnico Di Milano

Inventor： Barbara Simoni ,  Claudia Comi ,  Alberto Corigliano

IPC: G01P15/097

CPC classification number: G01P15/097 ,  G01P15/10

Abstract: A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.

Abstract translation: 公开了一种MEMS谐振加速度计，其具有：经由第一弹性元件耦合到第一锚定区域的检测质量，以便响应于外部加速度沿感测轴线自由移动; 以及第一谐振元件，其通过所述第一弹性元件机械耦合到所述检验质量块，以便当所述检测质量沿着所述感测轴线移动并且因此达到谐振频率的第一变化时，经受第一轴向应力。 MEMS谐振加速度计进一步设置有第二谐振元件，其通过第二弹性元件机械耦合到校准物质，以便当检测质量沿着感测轴线移动时受到第二轴向应力，基本上与第一轴向应力相反 ，从而达到与第一变化相反的谐振频率的第二变化。

公开(公告)号：US10520315B2

公开(公告)日：2019-12-31

申请号：US15639608

申请日：2017-06-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio ,  Luca Giuseppe Falorni ,  Claudia Comi ,  Valentina Zega

IPC: G01C19/574 ,  G01C19/5747 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US09389077B2

公开(公告)日：2016-07-12

申请号：US14032052

申请日：2013-09-19

Applicant: STMicroelectronics S.r.l.

Inventor： Claudia Comi ,  Alberto Corigliano ,  Leonardo Baldasarre

IPC: G01C19/56 ,  G01P15/097 ,  G01P15/125 ,  G01C19/574 ,  G01P15/08

CPC classification number: G01C19/574 ,  G01C19/56 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0831

Abstract: An integrated detection structure has a first inertial mass and a second inertial mass, each of which is elastically anchored to a substrate and has a linear movement along a first horizontal axis, a first detection movement of rotation about a first axis of rotation parallel to a second horizontal axis and a second detection movement of translation along the second horizontal axis; driving electrodes cause linear movement of the inertial masses, in opposite directions of the first horizontal axis; a pair of flexural resonator elements and a pair of torsional resonator elements are elastically coupled to the inertial masses, the torsional resonator elements having a resonant movement of rotation about a second axis of rotation and a third axis of rotation, parallel to one another and to the first axis of rotation.

Abstract translation: 集成的检测结构具有第一惯性质量和第二惯性质量，其中每一个惯性质量块和第二惯性质量块都被弹性锚固到基底上，并且沿第一水平轴线具有直线运动，围绕第一旋转轴线旋转的第一检测运动 第二水平轴和沿着第二水平轴的平移的第二检测运动; 驱动电极引起惯性块在第一水平轴线的相反方向上的线性移动; 一对弯曲谐振器元件和一对扭转谐振器元件弹性耦合到惯性块，扭转谐振元件具有围绕彼此平行的第二旋转轴线和第三旋转轴线的共振旋转运动，并且 第一个旋转轴。

公开(公告)号：US09377482B2

公开(公告)日：2016-06-28

申请号：US14193981

申请日：2014-02-28

Applicant: STMicroelectronics S.r.l.

Inventor： Claudia Comi ,  Alberto Corigliano ,  Sarah Zerbini

IPC: G01P15/097

CPC classification number: G01P15/0975 ,  G01P15/097

Abstract: A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.

Abstract translation: 用于z轴共振加速度计的检测结构具有通过弹性锚定元件锚固到基底的惯性块，以便悬挂在基底上方，并且执行围绕属于属于第一轴的第一旋转轴的旋转的惯性运动 响应于沿相对于平面横向的垂直轴作用的外部加速度，所述惯性质量的主延伸面; 以及第一谐振器元件和第二谐振器元件，其通过相应的弹性支撑元件机械耦合到惯性块，其使得能够在谐振条件下围绕第二旋转轴线和第三旋转轴线旋转。 特别地，第二旋转轴线和第三旋转轴线彼此平行，并且还平行于惯性质量块的第一旋转轴线。

公开(公告)号：US20140174183A1

公开(公告)日：2014-06-26

申请号：US14193981

申请日：2014-02-28

Applicant: STMicroelectronics S.r.l.

Inventor： Claudia Comi ,  Alberto Corigliano ,  Sarah Zerbini

IPC: G01P15/097

CPC classification number: G01P15/0975 ,  G01P15/097

Abstract: A detection structure for a z-axis resonant accelerometer is provided with an inertial mass anchored to a substrate by means of elastic anchorage elements so as to be suspended above the substrate and perform an inertial movement of rotation about a first axis of rotation belonging to a plane of main extension of the inertial mass, in response to an external acceleration acting along a vertical axis transverse with respect to the plane; and a first resonator element and a second resonator element, which are mechanically coupled to the inertial mass by respective elastic supporting elements, which enable a movement of rotation about a second axis of rotation and a third axis of rotation, in a resonance condition. In particular, the second axis of rotation and the third axis of rotation are parallel to one another, and are moreover parallel to the first axis of rotation of the inertial mass.

Abstract translation: 用于z轴共振加速度计的检测结构具有通过弹性锚定元件锚固到基底的惯性块，以便悬挂在基底上方，并且执行围绕属于属于第一轴的第一旋转轴的旋转的惯性运动 响应于沿相对于平面横向的垂直轴作用的外部加速度，所述惯性质量的主延伸面; 以及第一谐振器元件和第二谐振器元件，其通过相应的弹性支撑元件机械耦合到惯性块，其使得能够在谐振条件下围绕第二旋转轴线和第三旋转轴线旋转。 特别地，第二旋转轴线和第三旋转轴线彼此平行，并且还平行于惯性质量块的第一旋转轴线。