公开(公告)号：US10364147B2

公开(公告)日：2019-07-30

申请号：US15687618

申请日：2017-08-28

Applicant: STMicroelectronics S.r.l.

Inventor： Marco Rossi ,  Sergio Mansueto Reina ,  Giacomo Calcaterra

IPC: G01R1/20 ,  B81C99/00 ,  G01R1/067 ,  G01R31/28 ,  G01M11/00 ,  G01R1/073

Abstract: A probe card fits in a system for testing a micro-electro-mechanical device having an element sensitive to a magnetic field. The probe card is formed by a PCB having a through-opening and probe tips for electrically contacting the micro-electro-mechanical device. A housing structure is received within the through-opening. The housing structure includes a planar peripheral region surrounding seats that protrude and extend at least partly into the through-opening. Magnetic elements are arranged in the seats, with the magnetic elements configured to generate a test magnetic field for testing operation of the micro-electro-mechanical device.

公开(公告)号：US20180237293A1

公开(公告)日：2018-08-23

申请号：US15687618

申请日：2017-08-28

Applicant: STMicroelectronics S.r.l.

Inventor： Marco Rossi ,  Sergio Mansueto Reina ,  Giacomo Calcaterra

IPC: B81C99/00 ,  G01M11/00 ,  G01R31/28 ,  G01R1/067

CPC classification number: B81C99/005 ,  G01M11/005 ,  G01R1/067 ,  G01R1/07307 ,  G01R31/2886 ,  G01R31/2889

Abstract: A probe card fits in a system for testing a micro-electro-mechanical device having an element sensitive to a magnetic field. The probe card is formed by a PCB having a through-opening and probe tips for electrically contacting the micro-electro-mechanical device. A housing structure is received within the through-opening. The housing structure includes a planar peripheral region surrounding seats that protrude and extend at least partly into the through-opening. Magnetic elements are arranged in the seats, with the magnetic elements configured to generate a test magnetic field for testing operation of the micro-electro-mechanical device.