Thin film transistor substrate, method for fabricating the same, and display device including the same
    1.
    发明授权
    Thin film transistor substrate, method for fabricating the same, and display device including the same 有权
    薄膜晶体管基板及其制造方法以及包括该薄膜晶体管基板的显示装置

    公开(公告)号:US09372379B2

    公开(公告)日:2016-06-21

    申请号:US14136907

    申请日:2013-12-20

    摘要: A thin film transistor substrate, a method for fabricating the same, and a display device including the same are provided. In one aspect of the present invention, there is provided a thin film transistor substrate comprising a substrate, a semiconductor layer formed on the substrate, a gate insulating film formed on the semiconductor layer, a gate electrode formed on the gate insulating film, an interlayer insulating film formed on the gate electrode and including a source contact hole and a drain contact hole for exposing portions of the semiconductor layer, and a source electrode and a drain electrode respectively inserted into the source contact hole and the drain contact hole. The interlayer insulating film includes a first convex portion formed at an inlet of the source contact hole and at an inlet of the drain contact hole.

    摘要翻译: 提供薄膜晶体管基板,其制造方法和包括该薄膜晶体管基板的显示装置。 在本发明的一个方面,提供一种薄膜晶体管基板,其包括基板,形成在基板上的半导体层,形成在半导体层上的栅极绝缘膜,形成在栅极绝缘膜上的栅电极,中间层 绝缘膜,形成在栅电极上,并且包括用于暴露半导体层的部分的源极接触孔和漏极接触孔,以及分别插入到源极接触孔和漏极接触孔中的源极电极和漏电极。 层间绝缘膜包括在源极接触孔的入口处和漏极接触孔的入口处形成的第一凸部。