公开(公告)号：US10727257B2

公开(公告)日：2020-07-28

申请号：US16720177

申请日：2019-12-19

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Bo Shim ,  Jun-Gi Kim ,  Yong-Jun Park ,  Yang-Ho Jung ,  Jin-Ho Ju

IPC: H01L27/12 ,  G03F1/38 ,  G03F1/22

Abstract: An exposure mask includes a first transmission portion, a second transmission portion, and a blocking portion. The first transmission portion is configured to, when illuminated with light, transmit the light at a first energy level. The first transmission portion is disposed in association with formation of a first contact hole in an underlying layer. The second transmission portion is configured to, when illuminated with the light, transmit the light at a second energy level. The second transmission portion is disposed in association with formation of a second contact hole in the underlying layer. The blocking portion is configured to block the light, and is disposed in association with a boundary region between a first region and a second region of the underlying layer. The second transmission portion is further configured to enable the second contact hole to be formed deeper into the underlying layer than the first contact hole.

公开(公告)号：US09576987B2

公开(公告)日：2017-02-21

申请号：US14322859

申请日：2014-07-02

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seung-Bo Shim ,  Jin-Ho Ju ,  Jun-Gi Kim ,  Yang-Ho Jung

IPC: H01L27/12 ,  H01L29/786 ,  H01L29/66 ,  H01L27/32

CPC classification number: H01L27/1248 ,  H01L27/124 ,  H01L27/1288

Abstract: A display substrate includes a substrate having a first region and a second region, a conductive pattern is provided in the first region of the substrate and includes a first conductive pattern and a second conductive pattern, the first conductive pattern has a gate electrode and a source electrode, the second conductive pattern has a source electrode and a drain electrode, an insulation layer pattern is positioned on the conductive pattern and exposes an outer sidewall of the conductive pattern, an organic layer is provided in the first region and the second region of the substrate and covers the insulation layer pattern, and a pixel electrode is provided on the organic layer and is electrically connected to the drain electrode through a contact hole in the organic layer.

Abstract translation: 显示基板包括具有第一区域和第二区域的基板，在基板的第一区域中设置导体图案，并且包括第一导电图案和第二导电图案，第一导电图案具有栅电极和源极 电极，第二导电图案具有源电极和漏电极，绝缘层图案位于导电图案上并且暴露导电图案的外侧壁，有机层设置在第一区域和第二区域中 基板并覆盖绝缘层图案，并且在有机层上设置像素电极，并且通过有机层中的接触孔与漏电极电连接。

公开(公告)号：US09093535B2

公开(公告)日：2015-07-28

申请号：US13677172

申请日：2012-11-14

Applicant: Samsung Display Co., LTD.

Inventor： Hyang-Shik Kong ,  Seung-Bo Shim ,  Jin-Ho Ju ,  Jun-Gi Kim

IPC: H01L21/311 ,  H01L29/786 ,  H01L21/02 ,  H01L29/66 ,  H01L21/027 ,  H01L21/321

CPC classification number: H01L29/786 ,  H01L21/02697 ,  H01L21/0274 ,  H01L21/32115 ,  H01L29/66765 ,  H01L29/78603 ,  H01L29/7869

Abstract: A method of planarizing a substrate includes forming a conductive pattern on a first surface of a base substrate, forming a positive photoresist layer on the base substrate and the conductive pattern, exposing the positive photoresist layer to light by irradiating a second surface of the base substrate opposite to the first surface with light, developing the positive photoresist layer to form a protruded portion on the conductive pattern, forming a planarizing layer on the base substrate and the protruded portion and eliminating the protruded portion.

Abstract translation: 平面化基板的方法包括在基底基板的第一表面上形成导电图案，在基底基板和导电图案上形成正性光致抗蚀剂层，通过照射基底基板的第二表面将正性光致抗蚀剂层曝光 在第一表面与光相对的位置，显影正性光致抗蚀剂层以在导电图案上形成突出部分，在基底基板和突出部分上形成平坦化层，并且消除突出部分。

公开(公告)号：US10083998B2

公开(公告)日：2018-09-25

申请号：US15491279

申请日：2017-04-19

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Bo Shim ,  Jun-Gi Kim ,  Yong-Jun Park ,  Yang-Ho Jung ,  Jin-Ho Ju

IPC: H01L27/14 ,  H01L27/12 ,  G03F1/38 ,  G03F1/22

CPC classification number: H01L27/1288 ,  G03F1/22 ,  G03F1/38 ,  H01L27/124

Abstract: An exposure mask includes a first transmission portion, a second transmission portion, and a blocking portion. The first transmission portion is configured to, when illuminated with light, transmit the light at a first energy level. The first transmission portion is disposed in association with formation of a first contact hole in an underlying layer. The second transmission portion is configured to, when illuminated with the light, transmit the light at a second energy level. The second transmission portion is disposed in association with formation of a second contact hole in the underlying layer. The blocking portion is configured to block the light, and is disposed in association with a boundary region between a first region and a second region of the underlying layer. The second transmission portion is further configured to enable the second contact hole to be formed deeper into the underlying layer than the first contact hole.

公开(公告)号：US20140147976A1

公开(公告)日：2014-05-29

申请号：US13835314

申请日：2013-03-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seung-Bo SHIM ,  Jun-Gi Kim ,  Yong-Jun Park ,  Yang-Ho Jung ,  Jin-Ho Ju

IPC: G03F1/38 ,  H01L29/66

CPC classification number: H01L27/1288 ,  G03F1/22 ,  G03F1/38 ,  H01L27/124

Abstract: An exposure mask includes a first transmission portion, a second transmission portion, and a blocking portion. The first transmission portion is configured to, when illuminated with light, transmit the light at a first energy level. The first transmission portion is disposed in association with formation of a first contact hole in an underlying layer. The second transmission portion is configured to, when illuminated with the light, transmit the light at a second energy level. The second transmission portion is disposed in association with formation of a second contact hole in the underlying layer. The blocking portion is configured to block the light, and is disposed in association with a boundary region between a first region and a second region of the underlying layer. The second transmission portion is further configured to enable the second contact hole to be formed deeper into the underlying layer than the first contact hole.

Abstract translation: 曝光掩模包括第一传输部分，第二传输部分和阻挡部分。 第一传输部分被配置为当用光照射时以第一能级传输光。 第一传输部分与在下层中形成第一接触孔相关联地设置。 第二传输部分被配置为当用光照射时以第二能级传输光。 第二传输部分与在下层中形成第二接触孔相关联地设置。 阻挡部分被配置为阻挡光，并且与底层的第一区域和第二区域之间的边界区域相关联地设置。 第二传输部分还被配置为使得第二接触孔比第一接触孔更深地形成在下层中。

公开(公告)号：US10529751B2

公开(公告)日：2020-01-07

申请号：US16135003

申请日：2018-09-19

Applicant: Samsung Display Co., Ltd.

Inventor： Seung-Bo Shim ,  Jun-Gi Kim ,  Yong-Jun Park ,  Yang-Ho Jung ,  Jin-Ho Ju

IPC: H01L27/12 ,  G03F1/38 ,  G03F1/22

Abstract: An exposure mask includes a first transmission portion, a second transmission portion, and a blocking portion. The first transmission portion is configured to, when illuminated with light, transmit the light at a first energy level. The first transmission portion is disposed in association with formation of a first contact hole in an underlying layer. The second transmission portion is configured to, when illuminated with the light, transmit the light at a second energy level. The second transmission portion is disposed in association with formation of a second contact hole in the underlying layer. The blocking portion is configured to block the light, and is disposed in association with a boundary region between a first region and a second region of the underlying layer. The second transmission portion is further configured to enable the second contact hole to be formed deeper into the underlying layer than the first contact hole.

公开(公告)号：US20150171118A1

公开(公告)日：2015-06-18

申请号：US14322859

申请日：2014-07-02

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seung-Bo Shim ,  Jin-Ho Ju ,  Jun-Gi Kim ,  Yang-Ho Jung

IPC: H01L27/12

CPC classification number: H01L27/1248 ,  H01L27/124 ,  H01L27/1288

Abstract: A display substrate includes a substrate having a first region and a second region, a conductive pattern is provided in the first region of the substrate and includes a first conductive pattern and a second conductive pattern, the first conductive pattern has a gate electrode and a source electrode, the second conductive pattern has a source electrode and a drain electrode, an insulation layer pattern is positioned on the conductive pattern and exposes an outer sidewall of the conductive pattern, an organic layer is provided in the first region and the second region of the substrate and covers the insulation layer pattern, and a pixel electrode is provided on the organic layer and is electrically connected to the drain electrode through a contact hole in the organic layer.

Abstract translation: 显示基板包括具有第一区域和第二区域的基板，在基板的第一区域中设置导体图案，并且包括第一导电图案和第二导电图案，第一导电图案具有栅电极和源极 电极，第二导电图案具有源电极和漏电极，绝缘层图案位于导电图案上并且暴露导电图案的外侧壁，有机层设置在第一区域和第二区域中 基板并覆盖绝缘层图案，并且在有机层上设置像素电极，并且通过有机层中的接触孔与漏电极电连接。