Exposure mask and method of manufacturing a substrate using the exposure mask

    公开(公告)号:US10529751B2

    公开(公告)日:2020-01-07

    申请号:US16135003

    申请日:2018-09-19

    IPC分类号: H01L27/12 G03F1/38 G03F1/22

    摘要: An exposure mask includes a first transmission portion, a second transmission portion, and a blocking portion. The first transmission portion is configured to, when illuminated with light, transmit the light at a first energy level. The first transmission portion is disposed in association with formation of a first contact hole in an underlying layer. The second transmission portion is configured to, when illuminated with the light, transmit the light at a second energy level. The second transmission portion is disposed in association with formation of a second contact hole in the underlying layer. The blocking portion is configured to block the light, and is disposed in association with a boundary region between a first region and a second region of the underlying layer. The second transmission portion is further configured to enable the second contact hole to be formed deeper into the underlying layer than the first contact hole.

    DISPLAY SUBSTRATE AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE
    6.
    发明申请
    DISPLAY SUBSTRATE AND METHOD OF MANUFACTURING THE DISPLAY SUBSTRATE 有权
    显示基板和制造显示基板的方法

    公开(公告)号:US20150171118A1

    公开(公告)日:2015-06-18

    申请号:US14322859

    申请日:2014-07-02

    IPC分类号: H01L27/12

    摘要: A display substrate includes a substrate having a first region and a second region, a conductive pattern is provided in the first region of the substrate and includes a first conductive pattern and a second conductive pattern, the first conductive pattern has a gate electrode and a source electrode, the second conductive pattern has a source electrode and a drain electrode, an insulation layer pattern is positioned on the conductive pattern and exposes an outer sidewall of the conductive pattern, an organic layer is provided in the first region and the second region of the substrate and covers the insulation layer pattern, and a pixel electrode is provided on the organic layer and is electrically connected to the drain electrode through a contact hole in the organic layer.

    摘要翻译: 显示基板包括具有第一区域和第二区域的基板,在基板的第一区域中设置导体图案,并且包括第一导电图案和第二导电图案,第一导电图案具有栅电极和源极 电极,第二导电图案具有源电极和漏电极,绝缘层图案位于导电图案上并且暴露导电图案的外侧壁,有机层设置在第一区域和第二区域中 基板并覆盖绝缘层图案,并且在有机层上设置像素电极,并且通过有机层中的接触孔与漏电极电连接。

    Exposure mask and method of manufacturing a substrate using the exposure mask

    公开(公告)号:US10727257B2

    公开(公告)日:2020-07-28

    申请号:US16720177

    申请日:2019-12-19

    IPC分类号: H01L27/12 G03F1/38 G03F1/22

    摘要: An exposure mask includes a first transmission portion, a second transmission portion, and a blocking portion. The first transmission portion is configured to, when illuminated with light, transmit the light at a first energy level. The first transmission portion is disposed in association with formation of a first contact hole in an underlying layer. The second transmission portion is configured to, when illuminated with the light, transmit the light at a second energy level. The second transmission portion is disposed in association with formation of a second contact hole in the underlying layer. The blocking portion is configured to block the light, and is disposed in association with a boundary region between a first region and a second region of the underlying layer. The second transmission portion is further configured to enable the second contact hole to be formed deeper into the underlying layer than the first contact hole.