公开(公告)号：US11101298B2

公开(公告)日：2021-08-24

申请号：US16884182

申请日：2020-05-27

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jinwoo Lee ,  Waljun Kim ,  Kiwan Ahn ,  Yongjae Jang ,  Jaehyuk Jang ,  Yugwang Jeong

IPC: H01L27/12 ,  H01L29/423 ,  G09G3/3266 ,  G09G3/3275 ,  H01L29/417 ,  G09G3/3233 ,  H01L29/786 ,  H01L27/32

Abstract: A thin film transistor array substrate includes: a first conductive layer including first lines for transmitting data signals to the thin film transistors; a second conductive layer disposed on the first conductive layer and including second lines for supplying a driving voltage to the thin film transistors; a first insulating layer disposed between a semiconductor layer and the first conductive layer and including a first material layer; a second insulating layer disposed between the first conductive layer and the second conductive layer and including a second material layer having a dielectric constant greater than that of the first material layer; and a contact plug penetrating the second insulating layer and the first insulating layer, and connecting the second conductive layer to the semiconductor layer. A taper angle of the contact plug in the second material layer is greater than that of the contact plug in the first material layer.

公开(公告)号：US10700104B2

公开(公告)日：2020-06-30

申请号：US16047248

申请日：2018-07-27

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jinwoo Lee ,  Waljun Kim ,  Kiwan Ahn ,  Yongjae Jang ,  Jaehyuk Jang ,  Yugwang Jeong

IPC: H01L27/12 ,  H01L29/423 ,  G09G3/3266 ,  G09G3/3275 ,  H01L29/417 ,  G09G3/3233 ,  H01L29/786 ,  H01L27/32

Abstract: A thin film transistor array substrate includes: a first conductive layer including first lines for transmitting data signals to the thin film transistors; a second conductive layer disposed on the first conductive layer and including second lines for supplying a driving voltage to the thin film transistors; a first insulating layer disposed between a semiconductor layer and the first conductive layer and including a first material layer; a second insulating layer disposed between the first conductive layer and the second conductive layer and including a second material layer having a dielectric constant greater than that of the first material layer; and a contact plug penetrating the second insulating layer and the first insulating layer, and connecting the second conductive layer to the semiconductor layer. A taper angle of the contact plug in the second material layer is greater than that of the contact plug in the first material layer.

公开(公告)号：US10283529B2

公开(公告)日：2019-05-07

申请号：US15337401

申请日：2016-10-28

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Shinil Choi ,  Hyunmin Cho ,  Sanggab Kim ,  Sunghoon Yang ,  Yugwang Jeong ,  Byungdu Ahn

IPC: G02F1/1368 ,  H01L27/12 ,  G02F1/1333 ,  G02F1/1343 ,  G02F1/1362 ,  H01L27/32 ,  H01L29/423 ,  H01L29/66 ,  H01L29/786

Abstract: A method of manufacturing a thin-film transistor includes forming an oxide semiconductor on a substrate, stacking an insulating layer and a metal layer on the substrate to cover the oxide semiconductor, forming a photosensitive pattern on the metal layer, forming a gate electrode by etching the metal layer using the photosensitive pattern as a mask, where a part of the gate electrode overlaps a first oxide semiconductor region of the oxide semiconductor, forming a gate insulating film by partially etching the insulating layer using the photosensitive pattern as a mask, where the gate insulating film includes a first insulating region with a first thickness under the photosensitive pattern and a second insulating region with a second thickness less than the first thickness, and performing plasma processing on the gate insulating film so that a second oxide semiconductor region of the oxide semiconductor under the second insulating region becomes conductive.

公开(公告)号：US20200295048A1

公开(公告)日：2020-09-17

申请号：US16884182

申请日：2020-05-27

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jinwoo Lee ,  Waljun Kim ,  Kiwan Ahn ,  Yongjae Jang ,  Jaehyuk Jang ,  Yugwang Jeong

IPC: H01L27/12 ,  H01L29/423 ,  G09G3/3266 ,  G09G3/3275 ,  H01L29/417 ,  G09G3/3233

Abstract: A thin film transistor array substrate includes: a first conductive layer including first lines for transmitting data signals to the thin film transistors; a second conductive layer disposed on the first conductive layer and including second lines for supplying a driving voltage to the thin film transistors; a first insulating layer disposed between a semiconductor layer and the first conductive layer and including a first material layer; a second insulating layer disposed between the first conductive layer and the second conductive layer and including a second material layer having a dielectric constant greater than that of the first material layer; and a contact plug penetrating the second insulating layer and the first insulating layer, and connecting the second conductive layer to the semiconductor layer. A taper angle of the contact plug in the second material layer is greater than that of the contact plug in the first material layer.

公开(公告)号：US20190051669A1

公开(公告)日：2019-02-14

申请号：US16047248

申请日：2018-07-27

Applicant: SAMSUNG DISPLAY CO., LTD

Inventor： Jinwoo LEE ,  Waljun Kim ,  Kiwan Ahn ,  Yongjae Jang ,  Jaehyuk Jang ,  Yugwang Jeong

IPC: H01L27/12 ,  H01L29/423 ,  H01L29/417 ,  G09G3/3266 ,  G09G3/3275 ,  H01L27/32

Abstract: A thin film transistor array substrate includes: a first conductive layer including first lines for transmitting data signals to the thin film transistors; a second conductive layer disposed on the first conductive layer and including second lines for supplying a driving voltage to the thin film transistors; a first insulating layer disposed between a semiconductor layer and the first conductive layer and including a first material layer; a second insulating layer disposed between the first conductive layer and the second conductive layer and including a second material layer having a dielectric constant greater than that of the first material layer; and a contact plug penetrating the second insulating layer and the first insulating layer, and connecting the second conductive layer to the semiconductor layer. A taper angle of the contact plug in the second material layer is greater than that of the contact plug in the first material layer.

公开(公告)号：US20240322077A1

公开(公告)日：2024-09-26

申请号：US18602289

申请日：2024-03-12

Applicant: Samsung Display Co., Ltd.

Inventor： Hyuneok Shin ,  Sungjoo Kwon ,  Juhyun Lee ,  Yangho Jung ,  Yungbin Chung ,  Yugwang Jeong

IPC: H01L33/24 ,  H01L25/075

CPC classification number: H01L33/24 ,  H01L25/0753

Abstract: A display apparatus includes a display panel including a display area, multiple first partitions disposed on the display panel in the display area, and a first auxiliary layer arranged on at least a portion of outer surfaces of the first partitions and including an opening arranged between adjacent first partitions.

公开(公告)号：US11152400B2

公开(公告)日：2021-10-19

申请号：US16884182

申请日：2020-05-27

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jinwoo Lee ,  Waljun Kim ,  Kiwan Ahn ,  Yongjae Jang ,  Jaehyuk Jang ,  Yugwang Jeong

IPC: H01L27/12 ,  H01L29/423 ,  G09G3/3266 ,  G09G3/3275 ,  H01L29/417 ,  G09G3/3233 ,  H01L29/786 ,  H01L27/32

Abstract: A thin film transistor array substrate includes: a first conductive layer including first lines for transmitting data signals to the thin film transistors; a second conductive layer disposed on the first conductive layer and including second lines for supplying a driving voltage to the thin film transistors; a first insulating layer disposed between a semiconductor layer and the first conductive layer and including a first material layer; a second insulating layer disposed between the first conductive layer and the second conductive layer and including a second material layer having a dielectric constant greater than that of the first material layer; and a contact plug penetrating the second insulating layer and the first insulating layer, and connecting the second conductive layer to the semiconductor layer. A taper angle of the contact plug in the second material layer is greater than that of the contact plug in the first material layer.

公开(公告)号：US20250048853A1

公开(公告)日：2025-02-06

申请号：US18922309

申请日：2024-10-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Yugwang Jeong ,  Daesoo Kim ,  Sungwon Cho ,  Subin Bae

IPC: H10K59/123 ,  H01L27/12 ,  H01L29/786 ,  H10K59/12 ,  H10K59/121 ,  H10K59/131 ,  H10K71/00

Abstract: A display apparatus includes: a substrate; a first semiconductor layer on the substrate, and including a silicon semiconductor; a second semiconductor layer on the first semiconductor layer, and including an oxide semiconductor; a first conductive layer on the second semiconductor layer; at least one metal layer between the first semiconductor layer and the first conductive layer; and a first contact hole to electrically connect the first semiconductor layer to the first conductive layer. An inner surface of the first contact hole includes a side surface of the at least one metal layer.

公开(公告)号：US12127445B2

公开(公告)日：2024-10-22

申请号：US17451880

申请日：2021-10-22

Applicant: Samsung Display Co., Ltd.

Inventor： Yugwang Jeong ,  Daesoo Kim ,  Sungwon Cho ,  Subin Bae

IPC: H01L27/14 ,  H01L27/12 ,  H01L29/786 ,  H10K59/12 ,  H10K59/121 ,  H10K59/123 ,  H10K59/131 ,  H10K71/00

CPC classification number: H10K59/123 ,  H01L27/1225 ,  H01L27/124 ,  H01L27/1251 ,  H01L27/1255 ,  H01L29/78648 ,  H01L29/78675 ,  H01L29/7869 ,  H10K59/1201 ,  H10K59/1213 ,  H10K59/1216 ,  H10K59/131 ,  H10K71/00

Abstract: A display apparatus includes: a substrate; a first semiconductor layer on the substrate, and including a silicon semiconductor; a second semiconductor layer on the first semiconductor layer, and including an oxide semiconductor; a first conductive layer on the second semiconductor layer; at least one metal layer between the first semiconductor layer and the first conductive layer; and a first contact hole to electrically connect the first semiconductor layer to the first conductive layer. An inner surface of the first contact hole includes a side surface of the at least one metal layer.

公开(公告)号：US20240155874A1

公开(公告)日：2024-05-09

申请号：US18239125

申请日：2023-08-29

Applicant: Samsung Display Co., Ltd.

Inventor： Subin Bae ,  Dawoon Jung ,  Taewook Kang ,  Yunjong Yeo ,  Yugwang Jeong

IPC: H10K59/122 ,  H10K59/12 ,  H10K59/35

CPC classification number: H10K59/122 ,  H10K59/1201 ,  H10K59/353

Abstract: A display panel includes a substrate including first, second, and third emission areas, an organic insulating layer on the substrate, first, second, and third pixel electrodes on the organic insulating layer, a pixel-defining layer in which first, second, and third openings, and an out-gassing hole are defined. The first, second, and third openings extend to at least a portion of each of the first, second, and third pixel electrodes. First, second, and third emission layers are respectively on the first, second, and third pixel electrodes. The out-gassing hole includes first, second, and third out-gassing holes defined around the first, second, and third openings. An area of the first out-gassing hole is greater than areas of the second and third out-gassing holes.