公开(公告)号：US20160077264A1

公开(公告)日：2016-03-17

申请号：US14628985

申请日：2015-02-23

Applicant: Samsung Display Co. Ltd.

Inventor： Min Hyuck KANG ,  Eun Ae KWAK ,  Lei XIE ,  Moon Gyu LEE ,  Hyeong Gyu JANG

IPC: G02B5/30 ,  G03F7/00 ,  G03F7/32 ,  G03F7/16 ,  G03F7/20

CPC classification number: G02B5/3058 ,  G03F7/0002

Abstract: A pattering method includes forming guide layer patterns, which are separated from each other, on a top surface of a base substrate, forming a neutral layer, which includes a random copolymer comprising first blocks or second blocks, on an entirety of the top surface of the base substrate exposed between the guide layer patterns, forming hydrophobic layer patterns which extend from top surfaces of the guide layer patterns to side surfaces of the guide layer patterns and are separated from each other, coating a block copolymer, which comprises the first blocks and the second blocks, on a top surface of the neutral layer exposed between the hydrophobic layer patterns, alternately arranging the first blocks and the second blocks by heat-treating or solvent-annealing the block copolymer, and forming block copolymer patterns by removing the first blocks or the second blocks.

Abstract translation: 图案化方法包括在基底的顶表面上形成彼此分离的引导层图案，形成中性层，其包括在第一块或第二块的整个顶表面上的包含第一块或第二块的无规共聚物 基底基板暴露在引导层图案之间，形成疏水层图案，其从引导层图案的顶表面延伸到引导层图案的侧表面并彼此分离，涂覆包含第一嵌段和 第二块，在暴露在疏水层图案之间的中性层的顶表面上，通过热处理或溶剂退火嵌段共聚物交替地布置第一块和第二块，并通过除去第一块形成嵌段共聚物图案 或第二块。

公开(公告)号：US20170348729A1

公开(公告)日：2017-12-07

申请号：US15348305

申请日：2016-11-10

Applicant: Samsung Display Co., Ltd.

Inventor： Eun Ae KWAK ,  Min Hyuck KANG ,  Gug Rae JO

IPC: B05D3/00 ,  G02B5/30 ,  B05D3/12 ,  B05D1/00 ,  G02F1/1368 ,  G02F1/1335 ,  H01L27/12 ,  H01L29/786

CPC classification number: B05D3/007 ,  B05D1/005 ,  B05D3/12 ,  G02B5/3058 ,  G02F1/133528 ,  G02F1/1368 ,  G02F2001/133548 ,  H01L27/1222 ,  H01L29/66765 ,  H01L29/66969 ,  H01L29/78603 ,  H01L29/78633 ,  H01L29/78678

Abstract: A method of forming fine patterns includes the steps of forming a conductive layer on a base part, forming a sacrificial layer including an adhesive material on the conductive layer, the adhesive material including a catechol group, forming resist patterns on the sacrificial layer, and forming fine patterns by patterning the conductive layer using the resist patterns as a mask.

公开(公告)号：US20180136382A1

公开(公告)日：2018-05-17

申请号：US15871186

申请日：2018-01-15

Applicant: Samsung Display Co., Ltd.

Inventor： Eun Ae KWAK ,  Min Hyuck KANG ,  Moon Gyu LEE

IPC: G02B5/30 ,  C09K13/00 ,  C23F4/00 ,  H01L21/308 ,  H01L21/3065 ,  H01L21/306 ,  B81C1/00 ,  G02F1/1335 ,  G03F7/004

CPC classification number: G02B5/3058 ,  G02F2001/133548

Abstract: A method of fabricating a wire grid polarizer includes sequentially depositing a conductive wire pattern layer, and a plurality of guide patterns which forms one or more trenches therebetween on the conductive wire pattern layer, hydrophobically treating surfaces of the conductive wire pattern layer exposed in the trenches, and the guide patterns, coating the hydrophobically treated conductive wire pattern layer in the trenches with a neutral layer to partially fill the trenches, filling a remainder of the trenches with a block copolymer of two monomers with different etching rates, aligning the block copolymer filled in the trenches, selectively removing blocks of one monomer among the two monomers from the aligned block copolymer, and patterning the conductive wire pattern layer by using blocks of the other monomer among the two monomers remaining in the trenches and the guide patterns as a mask.

公开(公告)号：US20160274285A1

公开(公告)日：2016-09-22

申请号：US14924423

申请日：2015-10-27

Applicant: Samsung Display Co. Ltd.

Inventor： Min Hyuck KANG ,  Hyeong Gyu JANG ,  Eun Ae KWAK ,  Moon Gyu LEE

IPC: G02B5/30 ,  H01L27/12

CPC classification number: G02B5/3058 ,  H01L27/124

Abstract: A wire grid polarizer includes a substrate, and a plurality of wire patterns which is arranged on the substrate at periodic intervals, where the wire patterns include first wire patterns, which are disposed on the substrate, and one or more second wire patterns, which are disposed on one or more of the first wire patterns each of the second wire patterns including at least one of a neutral pattern, a surface treatment pattern and first and second monomer block patterns.

Abstract translation: 线栅偏振器包括基板和以周期性间隔布置在基板上的多个线图案，其中布线图案包括设置在基板上的第一布线图案和一个或多个第二布线图案， 布置在一个或多个第一线图案中，每个第二线图包括中性图案，表面处理图案和第一和第二单体块图案中的至少一个。

公开(公告)号：US20160178822A1

公开(公告)日：2016-06-23

申请号：US14704667

申请日：2015-05-05

Applicant: SAMSUNG DISPLAY CO. LTD.

Inventor： Eun Ae KWAK ,  Min Hyuck KANG ,  Hyeong Gyu JANG

IPC: G02B5/30 ,  G02F1/1335 ,  G02B1/18 ,  H01L27/12

CPC classification number: G02B5/3058 ,  G02B1/18 ,  G02F2001/133548 ,  H01L27/124

Abstract: A method of fabricating a wire grid polarizer includes sequentially forming a conductive layer, a guide layer, and a surface treatment protection layer on a substrate, patterning the surface treatment protection layer and the guide layer, forming a surface treatment film on side surfaces and upper surfaces of the first and second patterns, removing the first and second surface treatment protection patterns from the respective first and second patterns on which the surface treatment film is formed, to expose upper surfaces of the first and second guide patterns and providing a block copolymer of two monomers having mutually different etch rates into a space defined by the conductive layer and the first and second guide patterns, wherein a transfer layer which is hydrophobic to the block copolymer of two monomers is formed on the upper surfaces of the first and second guide patterns.

Abstract translation: 线栅偏振器的制造方法包括在基板上顺序形成导电层，引导层和表面处理保护层，对表面处理保护层和引导层进行图案化，在侧面和上部形成表面处理膜 第一和第二图案的表面，从形成有表面处理膜的相应的第一和第二图案中去除第一和第二表面处理保护图案，以暴露第一和第二引导图案的上表面，并提供 两个单体具有相互不同的蚀刻速率进入由导电层和第一和第二引导图案限定的空间中，其中在第一和第二引导图案的上表面上形成对两个单体的嵌段共聚物疏水的转移层 。

公开(公告)号：US20160170115A1

公开(公告)日：2016-06-16

申请号：US14681952

申请日：2015-04-08

Applicant: Samsung Display Co. Ltd.

Inventor： Tae Woo KIM ,  Min Hyuck KANG ,  Eun Ae KWAK ,  Moon Gyu LEE ,  Hyeong Gyu JANG

IPC: G02B5/30 ,  H01J37/32

CPC classification number: G02B5/3058

Abstract: A method of manufacturing a wire grid polarizer is provided. The method includes: forming an electrical conductive layer on a substrate; forming a guide pattern layer on the electrical conductive layer, wherein the guide pattern layer includes two or more linear structures separated from one another; forming a fluorocarbon surface modification layer on each of the linear structures using a fluorine-based gas plasma treatment; and forming a neutral layer on the electrical conductive layer, wherein the neutral layer has a nonselective affinity with repeating units of a block copolymer.

Abstract translation: 提供一种线栅偏振器的制造方法。 该方法包括：在基板上形成导电层; 在所述导电层上形成引导图案层，其中所述引导图案层包括彼此分离的两个或更多个线性结构; 使用氟基气体等离子体处理在每个线性结构上形成氟碳表面改性层; 以及在所述导电层上形成中性层，其中所述中性层与嵌段共聚物的重复单元具有非选择性亲和力。

公开(公告)号：US20160077263A1

公开(公告)日：2016-03-17

申请号：US14623708

申请日：2015-02-17

Applicant: Samsung Display Co., Ltd.

Inventor： Eun Ae KWAK ,  Min Hyuck KANG ,  Moon Gyu LEE

IPC: G02B5/30 ,  G02F1/1335

CPC classification number: G02B5/3058 ,  B81C1/00388 ,  B81C1/00404 ,  B81C2201/0149 ,  C09K13/00 ,  C23F4/00 ,  G02F2001/133548 ,  G03F7/0041 ,  H01L21/30604 ,  H01L21/3065 ,  H01L21/3081 ,  H01L21/3083 ,  H01L21/3086 ,  H01L21/3088

Abstract: A method of fabricating a wire grid polarizer includes sequentially depositing a conductive wire pattern layer, and a plurality of guide patterns which forms one or more trenches therebetween on the conductive wire pattern layer, hydrophobically treating surfaces of the conductive wire pattern layer exposed in the trenches, and the guide patterns, coating the hydrophobically treated conductive wire pattern layer in the trenches with a neutral layer to partially fill the trenches, filling a remainder of the trenches with a block copolymer of two monomers with different etching rates, aligning the block copolymer filled in the trenches, selectively removing blocks of one monomer among the two monomers from the aligned block copolymer, and patterning the conductive wire pattern layer by using blocks of the other monomer among the two monomers remaining in the trenches and the guide patterns as a mask.

Abstract translation: 制造线栅偏振器的方法包括依次沉积导线图案层和在导线图案层上形成一个或多个沟槽的多个引导图案，疏水处理暴露在沟槽中的导线图案层的表面 和引导图案，用中性层在沟槽中涂覆疏水处理的导线图案层以部分地填充沟槽，用不同蚀刻速率的两种单体的嵌段共聚物填充剩余的沟槽，使嵌段共聚物填充 在沟槽中，选择性地从对准的嵌段共聚物中除去两种单体中的一种单体的嵌段，并且通过使用留在沟槽中的两种单体中的其它单体的嵌段和导向图案作为掩模来对导电丝图案图案化。