METHOD OF FABRICATING CONDUCTIVE PATTERN, DISPLAY DEVICE, AND METHOD OF FABRICATING DISPLAY DEVICE

    公开(公告)号:US20210249451A1

    公开(公告)日:2021-08-12

    申请号:US17003524

    申请日:2020-08-26

    IPC分类号: H01L27/12 H01L27/32

    摘要: A method of fabricating a conductive pattern includes forming a conductive metal material layer and a conductive capping material layer on a substrate, forming a photoresist pattern as an etching mask on the conductive capping material layer, forming a first conductive capping pattern by etching the conductive capping material layer with a first etchant, forming a conductive metal layer and a second conductive capping pattern by etching the conductive metal material layer and the first conductive capping pattern with a second etchant, and forming a conductive capping layer by etching the second conductive capping pattern with a third etchant. The second conductive capping pattern includes a first region overlapping the conductive metal layer and a second region not overlapping the conductive metal layer, and the forming of the conductive capping layer includes etching the second region of the second conductive capping pattern to form the conductive capping layer.

    DISPLAY DEVICE AND METHOD OF PROVIDING THE SAME

    公开(公告)号:US20240224605A1

    公开(公告)日:2024-07-04

    申请号:US18469176

    申请日:2023-09-18

    摘要: A display device includes first and second emitting layers of first and second organic layers, on first and second pixel electrodes, in first and second emission areas, respectively, a first bank layer defining the first and second emission areas, a second bank layer on the first bank layer and defining protruding tips, a first pattern of the first organic layer which is on the second bank layer, an inorganic layer on the first emitting layer and the first pattern, a metal pattern on the inorganic layer to surround the second emission area, and a second pattern of the second organic layer which is on the metal pattern to surround the second emission area. The second pattern and the metal pattern form an undercut structure.

    METHOD OF FABRICATING CONDUCTIVE PATTERN, DISPLAY DEVICE, AND METHOD OF FABRICATING DISPLAY DEVICE

    公开(公告)号:US20230116992A1

    公开(公告)日:2023-04-20

    申请号:US18084274

    申请日:2022-12-19

    摘要: A method of fabricating a conductive pattern includes forming a conductive metal material layer and a conductive capping material layer on a substrate, forming a photoresist pattern as an etching mask on the conductive capping material layer, forming a first conductive capping pattern by etching the conductive capping material layer with a first etchant, forming a conductive metal layer and a second conductive capping pattern by etching the conductive metal material layer and the first conductive capping pattern with a second etchant, and forming a conductive capping layer by etching the second conductive capping pattern with a third etchant. The second conductive capping pattern includes a first region overlapping the conductive metal layer and a second region not overlapping the conductive metal layer, and the forming of the conductive capping layer includes etching the second region of the second conductive capping pattern to form the conductive capping layer.

    WIRING SUBSTRATE AND DISPLAY DEVICE INCLUDING THE SAME

    公开(公告)号:US20220406817A1

    公开(公告)日:2022-12-22

    申请号:US17672249

    申请日:2022-02-15

    IPC分类号: H01L27/12 H01L25/16

    摘要: A display device includes conductive layers including wires and conductive patterns in a display area and a pad area, a via layer on the conductive layers, a first electrode and a second electrode on the via layer in the display area and spaced apart from each other, a first insulating layer on the first electrode and the second electrode, light emitting elements on the first electrode and the second electrode spaced apart from each other on the first insulating layer, and a first connection electrode on the first electrode and electrically contacting the light emitting elements, and a second connection electrode on the second electrode and electrically contacting the light emitting elements, each of the conductive layers includes a first metal layer and a second metal layer on the first metal layer, and the second metal layer contains copper and has a grain size of about 155 nm or less.

    DISPLAY DEVICE
    6.
    发明申请

    公开(公告)号:US20220157856A1

    公开(公告)日:2022-05-19

    申请号:US17462803

    申请日:2021-08-31

    IPC分类号: H01L27/12

    摘要: A display device includes a data conductive layer disposed on a substrate, a passivation layer disposed on the data conductive layer, a via layer disposed on the passivation layer, and a pixel electrode disposed on the via layer. The data conductive layer includes a data base layer, a data main metal layer disposed on the data base layer, a first data capping layer disposed on the data main metal layer, a second data capping layer disposed on the first data capping layer, and a third data capping layer disposed on the second data capping layer. The passivation layer and the via layer include a pad opening which exposes a portion of the data conductive layer in the pad area. The third data capping layer has a higher etch rate than the first and second data capping layers for a same etchant.

    THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD OF THE SAME
    7.
    发明申请
    THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD OF THE SAME 审中-公开
    薄膜晶体管阵列基板及其制造方法

    公开(公告)号:US20160240691A1

    公开(公告)日:2016-08-18

    申请号:US14986716

    申请日:2016-01-03

    发明人: Jong Hyun CHOUNG

    IPC分类号: H01L29/786 H01L27/12

    摘要: A thin film transistor array substrate includes a first conductive pattern group including a gate line extending along a first direction, data lines extending along a second direction crossing the first direction and spaced apart from each other along the second direction with the gate line there between, and a gate electrode protruding from the gate line, an active pattern disposed on the gate electrode to overlap the gate electrode, a second conductive pattern group including a bridge pattern coupling the data lines, a source electrode extending to an upper portion of the active pattern from the bridge pattern and a drain electrode spaced apart from the source electrode, facing the source electrode and disposed on the active pattern and metal patterns each stacked between the active pattern and the source electrode and between the active pattern and the drain electrode.

    摘要翻译: 薄膜晶体管阵列基板包括:第一导电图案组,其包括沿着第一方向延伸的栅极线,沿着与第一方向交叉的第二方向延伸的数据线,沿着第二方向彼此间隔开, 从所述栅极线突出的栅极电极,设置在所述栅电极上以与所述栅电极重叠的有源图案,包括耦合所述数据线的桥接图案的第二导电图案组,延伸到所述有源图案的上部的源电极 从栅极图案和与源电极间隔开的漏电极,面对源电极并且设置在有源图案和金属图案之间,每个层叠在有源图案和源电极之间以及有源图案和漏电极之间。

    DISPLAY DEVICE AND METHOD FOR FABRICATING THE SAME

    公开(公告)号:US20230197901A1

    公开(公告)日:2023-06-22

    申请号:US17881978

    申请日:2022-08-05

    摘要: A display device comprises a via layer disposed on a substrate, a first electrode and a second electrode disposed on the via layer and spaced apart from each other, a first insulating layer disposed on the first electrode and the second electrode, light emitting elements disposed on the first insulating layer and disposed on the first electrode and the second electrode, a bank layer disposed on the first insulating layer and comprising a first opening in which the light emitting elements are disposed and a second opening spaced apart from the first opening, a second insulating layer disposed on the light emitting elements, and a first contact electrode and a second contact electrode disposed on the bank layer, the light emitting elements, and the second insulating layer while being spaced apart from each other.

    WIRING SUBSTRATE AND DISPLAY DEVICE INCLUDING THE SAME

    公开(公告)号:US20230163158A1

    公开(公告)日:2023-05-25

    申请号:US17963659

    申请日:2022-10-11

    IPC分类号: H01L27/15 H01L33/24 H01L33/44

    摘要: A display device includes a first substrate including a display area and a pad area, which is on one side of the display area, a plurality of conductive layers each including a plurality of wires and conductive patterns, which are in the display area and the pad area, on the first substrate, a via layer on the plurality of conductive layers, a first electrode and a second electrode on the via layer, in the display area, to be spaced apart from each other, a first insulating layer on the first electrode and the second electrode, a plurality of light-emitting elements on the first electrode, the second electrode, and on the first insulating layer, and a first connecting electrode on the first electrode and in contact with the plurality of light-emitting elements, and a second connecting electrode on the second electrode and in contact with the plurality of light-emitting elements, wherein at least one of the plurality of conductive layers includes a metal layer, which includes a copper-silver (CuAg) alloy and has a crystal grain size of 140 nm or less.