摘要:
A method of fabricating a conductive pattern includes forming a conductive metal material layer and a conductive capping material layer on a substrate, forming a photoresist pattern as an etching mask on the conductive capping material layer, forming a first conductive capping pattern by etching the conductive capping material layer with a first etchant, forming a conductive metal layer and a second conductive capping pattern by etching the conductive metal material layer and the first conductive capping pattern with a second etchant, and forming a conductive capping layer by etching the second conductive capping pattern with a third etchant. The second conductive capping pattern includes a first region overlapping the conductive metal layer and a second region not overlapping the conductive metal layer, and the forming of the conductive capping layer includes etching the second region of the second conductive capping pattern to form the conductive capping layer.
摘要:
There is provided a display device. The display device includes a first substrate, a second substrate that faces the first substrate, and a liquid crystal layer disposed between the first substrate and the second substrate. One of the first substrate and the second substrate includes a base substrate and a light blocking pattern disposed on a surface that faces the other surface of both surfaces of the base substrate, the light blocking pattern exposing a part of the base substrate. The light blocking pattern includes a semi-transmission reflective layer a disposed on the base substrate, a phase matching layer disposed on the semi-transmission reflective layer, and a reflective metal layer disposed on the phase matching layer. The phase matching layer and the reflective metal layer include materials having substantially the same etching rate.
摘要:
A display device includes first and second emitting layers of first and second organic layers, on first and second pixel electrodes, in first and second emission areas, respectively, a first bank layer defining the first and second emission areas, a second bank layer on the first bank layer and defining protruding tips, a first pattern of the first organic layer which is on the second bank layer, an inorganic layer on the first emitting layer and the first pattern, a metal pattern on the inorganic layer to surround the second emission area, and a second pattern of the second organic layer which is on the metal pattern to surround the second emission area. The second pattern and the metal pattern form an undercut structure.
摘要:
A method of fabricating a conductive pattern includes forming a conductive metal material layer and a conductive capping material layer on a substrate, forming a photoresist pattern as an etching mask on the conductive capping material layer, forming a first conductive capping pattern by etching the conductive capping material layer with a first etchant, forming a conductive metal layer and a second conductive capping pattern by etching the conductive metal material layer and the first conductive capping pattern with a second etchant, and forming a conductive capping layer by etching the second conductive capping pattern with a third etchant. The second conductive capping pattern includes a first region overlapping the conductive metal layer and a second region not overlapping the conductive metal layer, and the forming of the conductive capping layer includes etching the second region of the second conductive capping pattern to form the conductive capping layer.
摘要:
A display device includes conductive layers including wires and conductive patterns in a display area and a pad area, a via layer on the conductive layers, a first electrode and a second electrode on the via layer in the display area and spaced apart from each other, a first insulating layer on the first electrode and the second electrode, light emitting elements on the first electrode and the second electrode spaced apart from each other on the first insulating layer, and a first connection electrode on the first electrode and electrically contacting the light emitting elements, and a second connection electrode on the second electrode and electrically contacting the light emitting elements, each of the conductive layers includes a first metal layer and a second metal layer on the first metal layer, and the second metal layer contains copper and has a grain size of about 155 nm or less.
摘要:
A display device includes a data conductive layer disposed on a substrate, a passivation layer disposed on the data conductive layer, a via layer disposed on the passivation layer, and a pixel electrode disposed on the via layer. The data conductive layer includes a data base layer, a data main metal layer disposed on the data base layer, a first data capping layer disposed on the data main metal layer, a second data capping layer disposed on the first data capping layer, and a third data capping layer disposed on the second data capping layer. The passivation layer and the via layer include a pad opening which exposes a portion of the data conductive layer in the pad area. The third data capping layer has a higher etch rate than the first and second data capping layers for a same etchant.
摘要:
A thin film transistor array substrate includes a first conductive pattern group including a gate line extending along a first direction, data lines extending along a second direction crossing the first direction and spaced apart from each other along the second direction with the gate line there between, and a gate electrode protruding from the gate line, an active pattern disposed on the gate electrode to overlap the gate electrode, a second conductive pattern group including a bridge pattern coupling the data lines, a source electrode extending to an upper portion of the active pattern from the bridge pattern and a drain electrode spaced apart from the source electrode, facing the source electrode and disposed on the active pattern and metal patterns each stacked between the active pattern and the source electrode and between the active pattern and the drain electrode.
摘要:
A display device includes a display area and a pad area on a side of the display area, a plurality of conductive layers on a first substrate in the display area and the pad area and comprising a wiring and a conductive pattern, a via layer on the plurality of conductive layers, a plurality of electrodes on the via layer in the display area and spaced apart from each other, and a light emitting element on at least one of the plurality of electrodes. At least one of the conductive layers includes a first metal layer, a second metal layer on the first metal layer, and a third metal layer on the second metal layer. The second metal layer includes copper (Cu), the third metal layer includes a copper alloy, and a grain size of the third metal layer is smaller than a grain size of the second metal layer.
摘要:
A display device comprises a via layer disposed on a substrate, a first electrode and a second electrode disposed on the via layer and spaced apart from each other, a first insulating layer disposed on the first electrode and the second electrode, light emitting elements disposed on the first insulating layer and disposed on the first electrode and the second electrode, a bank layer disposed on the first insulating layer and comprising a first opening in which the light emitting elements are disposed and a second opening spaced apart from the first opening, a second insulating layer disposed on the light emitting elements, and a first contact electrode and a second contact electrode disposed on the bank layer, the light emitting elements, and the second insulating layer while being spaced apart from each other.
摘要:
A display device includes a first substrate including a display area and a pad area, which is on one side of the display area, a plurality of conductive layers each including a plurality of wires and conductive patterns, which are in the display area and the pad area, on the first substrate, a via layer on the plurality of conductive layers, a first electrode and a second electrode on the via layer, in the display area, to be spaced apart from each other, a first insulating layer on the first electrode and the second electrode, a plurality of light-emitting elements on the first electrode, the second electrode, and on the first insulating layer, and a first connecting electrode on the first electrode and in contact with the plurality of light-emitting elements, and a second connecting electrode on the second electrode and in contact with the plurality of light-emitting elements, wherein at least one of the plurality of conductive layers includes a metal layer, which includes a copper-silver (CuAg) alloy and has a crystal grain size of 140 nm or less.