公开(公告)号：US20170259618A1

公开(公告)日：2017-09-14

申请号：US15354439

申请日：2016-11-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Nam Su YUK ,  Jung Jun PARK ,  Eun Kyung HONG ,  Beom Soo HWANG

IPC: B60B33/06 ,  B60B33/08 ,  B62D5/04 ,  B60B19/12 ,  B60K7/00 ,  B60B33/00 ,  B60B19/00

CPC classification number: B60B33/063 ,  B60B19/003 ,  B60B19/12 ,  B60B19/14 ,  B60B33/0036 ,  B60B33/0049 ,  B60B33/0057 ,  B60B33/0068 ,  B60B33/0073 ,  B60B33/04 ,  B60B33/08 ,  B60B2900/551 ,  B60B2900/721 ,  B60K7/0007 ,  B60K17/30 ,  B60K2007/0038 ,  B60K2007/0092 ,  B60Y2200/62 ,  B62D5/0418

Abstract: A caster apparatus is provided. In one embodiment, there is provided a caster apparatus including a caster wheel and a first driving wheel disposed on a first side of the caster wheel. The first driving wheel is configured to be driven by a first motor. A second driving wheel is disposed on a second side opposite to the first side of the caster wheel. The second driving wheel is configured to be driven by a second motor different from the first motor. A first actuator is configured to move the first driving wheel in a vertical direction to a ground according to a curvature of the ground. A second actuator is configured to move the second driving wheel in a vertical direction to the ground according to a curvature of the ground, wherein the first and second driving wheels are configured to steer the caster wheel.

公开(公告)号：US20240120224A1

公开(公告)日：2024-04-11

申请号：US18465533

申请日：2023-09-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin Hyuk CHOI ,  Beom Soo HWANG ,  Kong Woo LEE ,  Myung Ki SONG ,  Ja-Yul KIM ,  Kyu Sang LEE ,  Hyun Joo JEON ,  Nam Young CHO

IPC: H01L21/673 ,  H01L21/67 ,  H01L21/677 ,  H01L21/68

CPC classification number: H01L21/67386 ,  H01L21/67259 ,  H01L21/67294 ,  H01L21/67742 ,  H01L21/68 ,  H01L21/6833

Abstract: A semiconductor manufacturing equipment may include a process chamber for treating a substrate; a front-end module including a first transfer robot, wherein the first transfer robot may be configured to transport the substrate received in a container; a transfer chamber between the front-end module and the process chamber, wherein the transfer chamber may be configured to load or unload the substrate into or out of the process chamber; and a cassette capable of receiving a replaceable component capable of being used in the process chamber. The front-end module may include a seat plate configured to move in a sliding manner so as to retract or extend into or from the front-end module. The cassette may be configured to be loaded into the front-end module while the cassette is seated on the seat plate.

公开(公告)号：US20240116184A1

公开(公告)日：2024-04-11

申请号：US18390413

申请日：2023-12-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min Sung HA ,  Kwang-Jun KIM ,  Jong Kyu KIM ,  Hyun-Joong KIM ,  Jin Ho SO ,  Chi-Gun AN ,  Ki Moon LEE ,  Hui Gwan LEE ,  Beom Soo HWANG

IPC: B25J9/16 ,  B25J5/02 ,  B25J9/00 ,  B25J13/08

CPC classification number: B25J9/1687 ,  B25J5/02 ,  B25J9/0093 ,  B25J9/1682 ,  B25J13/088

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a residual gas detector configured to detect a residual amount of the gas stored in the gas cylinder fastened to the gas pipe, and when the residual amount of the gas detected by the residual gas detector is less than or equal to a set residual amount of gas, the mobile robot recovers the gas cylinder from inside the gas cabinet and transfers a gas cylinder stored in the storage queue to the gas cabinet.

公开(公告)号：US20250144803A1

公开(公告)日：2025-05-08

申请号：US19012297

申请日：2025-01-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min Sung HA ,  Kwang-Jun KIM ,  Jong Kyu KIM ,  Hyun-Joong KIM ,  Jin Ho SO ,  Chi-Gun AN ,  Ki Moon LEE ,  Hui Gwan LEE ,  Beom Soo HWANG

IPC: B25J9/16 ,  B25J5/02 ,  B25J9/00 ,  B25J13/08

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a residual gas detector configured to detect a residual amount of the gas stored in the gas cylinder fastened to the gas pipe, and when the residual amount of the gas detected by the residual gas detector is less than or equal to a set residual amount of gas, the mobile robot recovers the gas cylinder from inside the gas cabinet and transfers a gas cylinder stored in the storage queue to the gas cabinet.

公开(公告)号：US20240279003A1

公开(公告)日：2024-08-22

申请号：US18371707

申请日：2023-09-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun Joo JEON ,  Jin Hyuk CHOI ,  Kyu Sang LEE ,  Myung Ki SONG ,  Ji Ho UH ,  Kong Woo LEE ,  Hyun Soo CHUN ,  Beom Soo HWANG

IPC: B65G47/90

CPC classification number: B65G47/90

Abstract: A wafer transfer apparatus includes a plate, a first belt unit on a first surface of the plate and including a first linear motion (LM) guide movable up and down, a second belt unit on the first surface of the plate and including a second LM guide movable up and down, a robot between the first belt unit and the second belt unit connected to the first LM guide and the second LM guide, and configured to transfer a wafer in a vertical direction, and a buffer unit between the first belt unit and the second belt unit in a first direction and disposed between the plate and the robot in a second direction perpendicular to the first direction, wherein the buffer unit includes a plurality of centrifugal fans configured to discharge fluid from an inner space of the buffer unit to an outside of the buffer unit.

公开(公告)号：US20230249350A1

公开(公告)日：2023-08-10

申请号：US17665949

申请日：2022-02-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Min Sung HA ,  Kwang-Jun KIM ,  Jong Kyu KIM ,  Hyun-Joong KIM ,  Jin Ho SO ,  Chi-Gun AN ,  Ki Moon LEE ,  Hui Gwan LEE ,  Beom Soo HWANG

IPC: B25J9/16 ,  B25J5/02 ,  B25J9/00 ,  B25J13/08

CPC classification number: B25J9/1687 ,  B25J5/02 ,  B25J9/0093 ,  B25J9/1682 ,  B25J13/088

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a residual gas detector configured to detect a residual amount of the gas stored in the gas cylinder fastened to the gas pipe, and when the residual amount of the gas detected by the residual gas detector is less than or equal to a set residual amount of gas, the mobile robot recovers the gas cylinder from inside the gas cabinet and transfers a gas cylinder stored in the storage queue to the gas cabinet.