公开(公告)号：US10395900B2

公开(公告)日：2019-08-27

申请号：US15415403

申请日：2017-01-25

申请人： Samsung Electronics Co., Ltd.

发明人： Hak Young Kim ,  Jung Pyo Hong ,  Jong Woo Sun ,  Doug Yong Sung ,  Yong Ho Lim ,  Yun Kwang Jeon ,  Hwa Jun Jung

IPC分类号： H01J37/32 ,  H01L21/67

摘要： A plasma processing apparatus includes a chamber, a window plate disposed in an upper portion of the chamber and having a fastening hole defined therein, an injector having a body part including a plurality of nozzles and configured to be fastened to the fastening hole, and a flange part extending radially from the body part to partially cover a bottom surface of the window plate when the body part is fastened to the fastening hole, and a stopper configured to be fastened to the body part on an upper surface of the window plate to hold the injector in the fastening hole when the body part is fastened to the fastening hole.

公开(公告)号：US20170365444A1

公开(公告)日：2017-12-21

申请号：US15415403

申请日：2017-01-25

申请人： Samsung Electronics Co., Ltd.

发明人： Hak Young Kim ,  Jung Pyo Hong ,  Jong Woo Sun ,  Doug Yong Sung ,  Yong Ho Lim ,  Yun Kwang Jeon ,  Hwa Jun Jung

IPC分类号： H01J37/32 ,  H01L21/67

CPC分类号： H01J37/3244 ,  H01J37/321 ,  H01J37/32119 ,  H01J37/32449 ,  H01J37/32458 ,  H01J2237/334 ,  H01L21/67069

摘要： A plasma processing apparatus includes a chamber, a window plate disposed in an upper portion of the chamber and having a fastening hole defined therein, an injector having a body part including a plurality of nozzles and configured to be fastened to the fastening hole, and a flange part extending radially from the body part to partially cover a bottom surface of the window plate when the body part is fastened to the fastening hole, and a stopper configured to be fastened to the body part on an upper surface of the window plate to hold the injector in the fastening hole when the body part is fastened to the fastening hole.

公开(公告)号：US10903053B2

公开(公告)日：2021-01-26

申请号：US16549408

申请日：2019-08-23

申请人： Samsung Electronics Co., Ltd.

发明人： Hak Young Kim ,  Jung Pyo Hong ,  Jong Woo Sun ,  Doug Yong Sung ,  Yong Ho Lim ,  Yun Kwang Jeon ,  Hwa Jun Jung

IPC分类号： H01J37/32 ,  H01L21/67

摘要： A plasma processing apparatus includes a chamber, a window plate disposed in an upper portion of the chamber and having a fastening hole defined therein, an injector having a body part including a plurality of nozzles and configured to be fastened to the fastening hole, and a flange part extending radially from the body part to partially cover a bottom surface of the window plate when the body part is fastened to the fastening hole, and a stopper configured to be fastened to the body part on an upper surface of the window plate to hold the injector in the fastening hole when the body part is fastened to the fastening hole.