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公开(公告)号:US20150091133A1
公开(公告)日:2015-04-02
申请号:US14315770
申请日:2014-06-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyu-Ho Cho , Hyun-Jeong Yang , Se-Hoon Oh , Yong-Jae Lee , Ki-Vin IM , Jae-Soon Lim , Han-Jin Lim , Jae-Wan Chang , Chang-Hwa Jung
IPC: H01L49/02
CPC classification number: H01L28/75 , H01L27/10855 , H01L28/65 , H01L28/91
Abstract: In a semiconductor device and in methods of formation thereof, a semiconductor device comprises a substrate, a lower electrode on the substrate, and a dielectric layer on the lower electrode. An adhesion layer is positioned on the dielectric layer and an upper electrode is positioned on the adhesion layer. The adhesion layer contacts the dielectric layer and the upper electrode, and comprises a conductive material.
Abstract translation: 在半导体器件及其形成方法中,半导体器件包括衬底,衬底上的下电极和下电极上的电介质层。 粘合层位于介电层上,上电极位于粘合层上。 粘合层接触电介质层和上电极,并且包括导电材料。