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公开(公告)号:US20220093521A1
公开(公告)日:2022-03-24
申请号:US17213025
申请日:2021-03-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Keumhee Ma , Chulyong Jang
IPC: H01L23/538 , H01L23/00 , H01L23/498
Abstract: An interconnection structure of a semiconductor chip may include an interconnection via, a lower pad, a conductive bump, and an upper pad. The interconnection via may be arranged in the semiconductor chip. The lower pad may be arranged on a lower end of the interconnection via exposed through a lower surface of the semiconductor chip. The conductive bump may be arranged on the lower pad. The upper pad may be arranged on an upper end of the interconnection via exposed through an upper surface of the semiconductor chip. The upper pad may have a width wider than a width of the interconnection via and narrower than a width of the lower pad. Thus, an electrical short between the conductive bumps may not be generated in the interconnection structure having a thin thickness.
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公开(公告)号:US11688667B2
公开(公告)日:2023-06-27
申请号:US17473290
申请日:2021-09-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Keumhee Ma
IPC: H01L23/48 , H01L23/00 , H01L25/065
CPC classification number: H01L23/481 , H01L24/06 , H01L24/17 , H01L25/0657 , H01L2224/0401 , H01L2224/06181 , H01L2224/17181 , H01L2225/06513
Abstract: A semiconductor package may include a first semiconductor chip and a second semiconductor chip. The first semiconductor chip may include a first semiconductor substrate, a through via structure and a pad pattern. The first semiconductor substrate may include a first surface and a second surface opposite to the first surface, and the second surface may include a recess. The through via structure may pass through the first semiconductor substrate from the first surface to a bottom of the recess of the second surface. An upper surface of the through via structure may protrude from the bottom of the recess. The pad pattern may be electrically connected to the upper surface of the through via structure, and the pad pattern may include a first recess having a concave shape thereon. The second semiconductor chip may include a bump pattern bonded on an inside of the first recess of the pad pattern.
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公开(公告)号:US20230253336A1
公开(公告)日:2023-08-10
申请号:US18126759
申请日:2023-03-27
Applicant: Samsung Electronics Co., Ltd.
Inventor: Keumhee Ma , Chulyong Jang
IPC: H01L23/538 , H01L23/00 , H01L23/498
CPC classification number: H01L23/5386 , H01L23/49816 , H01L23/49838 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/08 , H01L24/11 , H01L24/13 , H01L24/16 , H01L2224/0362 , H01L2224/0603 , H01L2224/03462 , H01L2224/05582 , H01L2224/08146 , H01L2224/11462 , H01L2224/11622 , H01L2224/13026 , H01L2224/16148 , H01L2224/16155 , H01L2924/1431 , H01L2924/1437
Abstract: An interconnection structure of a semiconductor chip may include an interconnection via, a lower pad, a conductive bump, and an upper pad. The interconnection via may be arranged in the semiconductor chip. The lower pad may be arranged on a lower end of the interconnection via exposed through a lower surface of the semiconductor chip. The conductive bump may be arranged on the lower pad. The upper pad may be arranged on an upper end of the interconnection via exposed through an upper surface of the semiconductor chip. The upper pad may have a width wider than a width of the interconnection via and narrower than a width of the lower pad. Thus, an electrical short between the conductive bumps may not be generated in the interconnection structure having a thin thickness.
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公开(公告)号:US11626370B2
公开(公告)日:2023-04-11
申请号:US17213025
申请日:2021-03-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Keumhee Ma , Chulyong Jang
IPC: H01L23/48 , H01L23/538 , H01L23/00 , H01L23/498
Abstract: An interconnection structure of a semiconductor chip may include an interconnection via, a lower pad, a conductive bump, and an upper pad. The interconnection via may be arranged in the semiconductor chip. The lower pad may be arranged on a lower end of the interconnection via exposed through a lower surface of the semiconductor chip. The conductive bump may be arranged on the lower pad. The upper pad may be arranged on an upper end of the interconnection via exposed through an upper surface of the semiconductor chip. The upper pad may have a width wider than a width of the interconnection via and narrower than a width of the lower pad. Thus, an electrical short between the conductive bumps may not be generated in the interconnection structure having a thin thickness.
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公开(公告)号:US11145573B2
公开(公告)日:2021-10-12
申请号:US16896529
申请日:2020-06-09
Applicant: Samsung Electronics Co., Ltd.
Inventor: Keumhee Ma
IPC: H01L23/48 , H01L23/00 , H01L25/065
Abstract: A semiconductor package may include a first semiconductor chip and a second semiconductor chip. The first semiconductor chip may include a first semiconductor substrate, a through via structure and a pad pattern. The first semiconductor substrate may include a first surface and a second surface opposite to the first surface, and the second surface may include a recess. The through via structure may pass through the first semiconductor substrate from the first surface to a bottom of the recess of the second surface. An upper surface of the through via structure may protrude from the bottom of the recess. The pad pattern may be electrically connected to the upper surface of the through via structure, and the pad pattern may include a first recess having a concave shape thereon. The second semiconductor chip may include a bump pattern bonded on an inside of the first recess of the pad pattern.
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公开(公告)号:US20250118714A1
公开(公告)日:2025-04-10
申请号:US18647087
申请日:2024-04-26
Applicant: Samsung Electronics Co., Ltd.
Inventor: Keumhee Ma , Wansoo Park
IPC: H01L25/10 , H01L23/00 , H01L23/31 , H01L25/065
Abstract: A semiconductor package includes a first semiconductor chip, a second semiconductor chip on the first semiconductor chip and directly bonded to the first semiconductor chip, a third semiconductor chip on the second semiconductor chip and directly bonded to the second semiconductor chip, and a molding layer on an upper surface of the first semiconductor chip and on a sidewall of the second semiconductor chip and a sidewall of the third semiconductor chip, wherein the third semiconductor chip includes a third semiconductor substrate including an upper surface at a level, which is lower than an upper surface of the molding layer, and a third upper insulation layer on the upper surface of the third semiconductor substrate, the upper surface of the molding layer, and an inner sidewall of the molding layer.
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公开(公告)号:US20240038725A1
公开(公告)日:2024-02-01
申请号:US18132749
申请日:2023-04-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Keumhee Ma
IPC: H01L25/065 , H01L23/00 , H10B80/00
CPC classification number: H01L25/0657 , H01L24/16 , H01L24/32 , H01L24/73 , H10B80/00 , H01L24/08 , H01L2225/06513 , H01L2225/06524 , H01L2225/06527 , H01L2225/06541 , H01L2225/06568 , H01L2924/1431 , H01L2924/1434 , H01L2224/16148 , H01L2224/73204 , H01L2224/26145 , H01L2224/32145 , H01L2224/32056 , H01L2224/32055 , H01L2224/32053 , H01L2224/32059 , H01L2224/0801 , H01L24/29 , H01L2224/2919 , H01L2224/29187
Abstract: A semiconductor package includes a first semiconductor chip including a first semiconductor substrate, and a first upper pad arranged on an upper surface of the first semiconductor substrate, a first polymer layer arranged on the upper surface of the first semiconductor substrate, a second semiconductor chip mounted on the first semiconductor chip, the second semiconductor chip including a second semiconductor substrate and a second lower pad arranged under a lower surface of the second semiconductor substrate, wherein the first polymer layer has a horizontal width in a direction crossing the first polymer layer in a center region of the second semiconductor chip, as a first length, and has a horizontal width in a direction crossing two corner regions of the first polymer layer in corner regions of the second semiconductor chip, as a second length, wherein the second length is greater than the first length.
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