公开(公告)号：US20170330727A1

公开(公告)日：2017-11-16

申请号：US15453595

申请日：2017-03-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： YEONGKWANG LEE ,  YONGKYUN PARK ,  DONGSOO LEE ,  SANGHEON LEE

IPC: H01J37/32 ,  H01L21/67

CPC classification number: H01J37/3222 ,  H01J37/32238 ,  H01J37/3244 ,  H01J2237/002

Abstract: Embodiments of the inventive concepts provide an antenna, a microwave plasma source including the antenna, a plasma processing apparatus including the antenna, and a method of manufacturing method of a semiconductor device. The antenna includes a lower ring having a plurality of output slits, and an upper ring disposed on the lower ring. The upper ring has an input slit transmitting microwave power from an outside of the upper ring onto the lower ring. The upper ring is configured to rotate with respect to the lower ring.

公开(公告)号：US20170277636A1

公开(公告)日：2017-09-28

申请号：US15467104

申请日：2017-03-23

Applicant: Samsung Electronics Co., Ltd. ,  Seoul National University R&DB Foundation

Inventor： SANGHEON LEE ,  Dongwoo LEE ,  Kiyoung CHOI ,  Soojung RYU

IPC: G06F12/0831

CPC classification number: G06F12/126 ,  G06F12/0895

Abstract: A memory controller includes a dirty group detector configured to, in response to receiving a request for writing data to a memory, modify addresses of a cache group related to a physical address of the memory, increase counters corresponding to the modified addresses of the cache group, and detect whether the cache group is in a dirty state based on the counters; and a dirty list manager configured to manage the cache group in the dirty state and a dirty list including dirty bits according to a result of the detecting; wherein the dirty bits indicate whether a cache set included in the cache group is in the dirty state.

公开(公告)号：US20170272202A1

公开(公告)日：2017-09-21

申请号：US15442968

申请日：2017-02-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： EUNG SUP KIM ,  SEONGYOON KIM ,  SANGHEON LEE

IPC: H04L1/00

CPC classification number: G06F11/00 ,  G06F15/16

Abstract: In a data encoding method for a communication between semiconductor chips, a data sequence is received. The data sequence includes multiple characters and multiple identification codes coupled to the characters, respectively. The data sequence is stored in a buffer in a unit of a predetermined number of pairs of characters and identification codes. Whether at least one control character is stored in the buffer is determined based on the identification codes stored in the buffer. When at least one control character is stored in the buffer, the at least one control character is converted to at least one internal control character, respectively. When multiple control characters are stored in the buffer, at least one internal control character includes a reference number representing a location of a sequentially next control character in the buffer. A first type data block is generated. The first type data block includes data characters stored in the buffer and the at least one internal control character.