公开(公告)号：US20190079003A1

公开(公告)日：2019-03-14

申请号：US15981359

申请日：2018-05-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Heung Ahn ,  Young Duk Kim ,  Sang Gil Park ,  Jun Bum Park ,  Yoichiro Iwa ,  Byeong Hwan Jeon

IPC: G01N21/01 ,  G01N21/17 ,  H01L21/67 ,  G01N21/94 ,  G01N15/14

Abstract: An inspection apparatus includes a light source. A first measurement unit is configured to receive light from the light source and direct it to a first measurement object. A second measurement unit is configured to receive the light from the light source and direct it to a second measurement object. An inspection unit is configured to receive a first optical signal provided from the first measurement unit and inspect the first measurement object using the first optical signal, and to receive a second optical signal provided from the second measurement unit and inspect the second measurement object using the second optical signal. A measurement position selection unit is configured to alternately enable the inspection of the two measurement units by adjusting an angle of a reflection mirror.

公开(公告)号：US10473579B2

公开(公告)日：2019-11-12

申请号：US15981359

申请日：2018-05-16

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Heung Ahn ,  Young Duk Kim ,  Sang Gil Park ,  Jun Bum Park ,  Yoichiro Iwa ,  Byeong Hwan Jeon

IPC: G01N21/01 ,  G01N21/17 ,  H01L21/67 ,  G01N21/94 ,  G01N15/14 ,  G01N21/88 ,  G01N21/95 ,  G01N21/84

Abstract: An inspection apparatus includes a light source. A first measurement unit is configured to receive light from the light source and direct it to a first measurement object. A second measurement unit is configured to receive the light from the light source and direct it to a second measurement object. An inspection unit is configured to receive a first optical signal provided from the first measurement unit and inspect the first measurement object using the first optical signal, and to receive a second optical signal provided from the second measurement unit and inspect the second measurement object using the second optical signal. A measurement position selection unit is configured to alternately enable the inspection of the two measurement units by adjusting an angle of a reflection mirror.