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    OPTICAL MEASUREMENT APPARATUS AND METHOD OF CONTROLLING THE SAME
    1.
    发明申请
    OPTICAL MEASUREMENT APPARATUS AND METHOD OF CONTROLLING THE SAME 审中-公开
    光学测量装置及其控制方法

    公开(公告)号：US20140002829A1

    公开(公告)日：2014-01-02

    申请号：US13927843

    申请日：2013-06-26

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Kwang Soo KIM ,  Hyun Jae Lee ,  Byeong Hwan Jeon ,  Chang Hoon Choi

    IPC: G01B11/28

    CPC classification number: G01B11/00 ,  G01B11/24 ,  G01B11/28 ,  G01B2210/56

    Abstract: According to example embodiments, an optical measurement apparatus may include: a station configured to support a measurement target; an image acquisition unit configured to acquire a one-dimensional (1D) line image of the measurement target; a driver configured to move the station and the image acquisition unit; and a controller. The controller may be configured to control the driver and the image acquisition unit to acquire a plurality of 1D line images of the measurement target while varying a distance between the image acquisition unit and the measurement target to generate a two-dimensional (2D) scan image from combining the plurality of 1D line images; and to detect a pattern of the measurement target based on comparing a plurality of 2D reference images and the 2D scan image. The optical measurement apparatus may measure critical dimensions of non-repeating ultrafine patterns at high speed.

    Abstract translation: 根据示例实施例，光学测量装置可以包括：被配置为支持测量目标的站; 图像获取单元，被配置为获取所述测量对象的一维（1D）线图像; 驱动器，被配置为移动所述站和所述图像获取单元; 和控制器。 控制器可以被配置为控制驱动器和图像获取单元，以在改变图像获取单元和测量对象之间的距离的同时获取测量对象的多个1D线图像，以生成二维（2D）扫描图像 从组合多个1D线图像; 并且基于比较多个2D参考图像和2D扫描图像来检测测量对象的图案。 光学测量装置可以高速度地测量非重复超细纹图案的临界尺寸。

    EUV generation device
    2.
    发明授权
    EUV generation device 有权

    公开(公告)号：US10779388B2

    公开(公告)日：2020-09-15

    申请号：US16227080

    申请日：2018-12-20

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Byeong Hwan Jeon

    IPC: H05G2/00

    Abstract: An extreme ultraviolet (EUV) generation device includes a housing module including a housing body whose inside is maintained in a vacuum state and an exit window formed on one side of the housing body, a laser source which emits lasers toward the inside of the housing body through the exit window, a plasma generation module which is located inside the housing body and generates plasma by allowing the lasers to be emitted toward a plasma gas, which flows into a laser focal area, and a radio frequency (RF) power supply module which preionizes the plasma gas before the plasma gas flows into the laser focal area.

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