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公开(公告)号:US12062660B2
公开(公告)日:2024-08-13
申请号:US17863042
申请日:2022-07-12
发明人: In-Keun Lee , Jong-Chul Park , Sang-Hyun Lee
IPC分类号: H01L27/088 , H01L21/768 , H01L21/8234 , H01L29/66 , H01L29/78
CPC分类号: H01L27/0886 , H01L21/76832 , H01L21/76897 , H01L21/823431 , H01L21/823437 , H01L21/823468 , H01L21/823475 , H01L29/66545 , H01L29/66795 , H01L29/7851
摘要: A semiconductor device includes a substrate, a gate structure on the substrate, a first etch stop layer, a second etch stop layer, and an interlayer insulation layer that are stacked on the gate structure, and a contact plug penetrating the interlayer insulation layer, the second etch stop layer, and the first etch stop layer and contacting a sidewall of the gate structure. The contact plug includes a lower portion having a first width and an upper portion having a second width. A lower surface of the contact plug has a stepped shape.
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公开(公告)号:US11004788B2
公开(公告)日:2021-05-11
申请号:US16229781
申请日:2018-12-21
发明人: Hwi-Chan Jun , Seul-Ki Hong , Hyun-Soo Kim , Sang-Hyun Lee
IPC分类号: H01L27/088 , H01L23/528 , H01L29/423 , H01L29/417
摘要: A semiconductor device may include a plurality of active patterns and a plurality of gate structure on a substrate, a first insulating interlayer covering the active patterns and the gate structures, a plurality of first contact plugs extending through the first insulating interlayer, a plurality of second contact plugs extending through the first insulating interlayer, and a first connecting pattern directly contacting a sidewall of at least one contact plug selected from the first and second contact plugs. Each of gate structures may include a gate insulation layer, a gate electrode and a capping pattern. Each of first contact plugs may contact the active patterns adjacent to the gate structure. Each of the second contact plugs may contact the gate electrode in the gate structures. An upper surface of the first connecting pattern may be substantially coplanar with upper surfaces of the first and second contact plugs.
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公开(公告)号:USD850498S1
公开(公告)日:2019-06-04
申请号:US29633239
申请日:2018-01-12
设计人: Ki-Soo Kim , Seok-Woo Kim , Young-Min Park , Cheol-Woong Seo , Ki-Sang Yoon , Se-Lim Yoon , Sang-Hyun Lee , Sun-Min Lee , Seon-Ju Lee , Jun-Kyo Lee
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公开(公告)号:USD832312S1
公开(公告)日:2018-10-30
申请号:US29593210
申请日:2017-02-07
设计人: Ki-Soo Kim , Seok-Woo Kim , Young-Min Park , Cheol-Woong Seo , Ki-Sang Yoon , Se-Lim Yoon , Sang-Hyun Lee , Sun-Min Lee , Seon-Ju Lee , Jun-Kyo Lee
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公开(公告)号:US20150128073A1
公开(公告)日:2015-05-07
申请号:US14530537
申请日:2014-10-31
发明人: Hyung-Ki Ahn , Na-Young Kim , Nam-Hoi Kim , Hyun-Young Yang , Sang-Hyun Lee , Yong-Whi Lee , Ji-Won Lee , Hak-Hyeon Jeong , Soo-Hwan Chae
IPC分类号: G06F3/0481 , G06F3/0488
CPC分类号: G06F3/0488 , G06F3/1454 , G06Q10/10 , G09G2354/00
摘要: A method of sharing contents and an electronic device thereof are provided. The method includes displaying a shared screen including one or more pages, each of the one or more pages including contents, transmitting the shared screen to a server, and receiving an update shared screen including update contents for the contents of the shared screen from the server, wherein the update contents are updated by one or more other electronic devices.
摘要翻译: 提供一种共享内容的方法及其电子设备。 该方法包括显示包括一个或多个页面的共享屏幕,一个或多个页面中的每一个包括内容,将共享屏幕发送到服务器,以及从服务器接收包括用于共享屏幕的内容的更新内容的更新共享屏幕 ,其中所述更新内容由一个或多个其他电子设备更新。
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公开(公告)号:US11120998B2
公开(公告)日:2021-09-14
申请号:US16127443
申请日:2018-09-11
发明人: Sang-Hyun Lee , Jeon-Il Lee , Sung-Woo Kang , Hong-Sik Shin , Young-Mook Oh , Seung-Min Lee
IPC分类号: H01L21/00 , H01L21/311 , H01L21/768 , H01L21/033 , H01L21/02 , H01L21/8234 , H01L29/49 , H01L29/66 , H01L21/3213 , H01L21/3105 , H01L29/51
摘要: An etching method includes providing a plasma of a first treatment gas to an etching-object to form a deposition layer on the etching-object, the first treatment gas including a fluorocarbon gas and an inert gas, and the etching-object including a first region including silicon oxide and a second region including silicon nitride, providing a plasma of an inert gas to the etching-object having the deposition layer thereon to activate an etching reaction of the silicon oxide, wherein a negative direct current voltage is applied to an opposing part that is spaced apart from the etching-object so as to face an etching surface of the etching-object, the opposing part including silicon, and subsequently, providing a plasma of a second treatment gas to remove an etching reaction product, the second treatment gas including an inert gas and an oxygen-containing gas.
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公开(公告)号:US10551873B2
公开(公告)日:2020-02-04
申请号:US15892592
申请日:2018-02-09
发明人: Yong-Hwa Han , Sang-Jun Ahn , Chung-Keun Yoo , Ui-Jin Lee , Sang-Hyun Lee
IPC分类号: G06F1/16
摘要: According to various embodiments of the present disclosure, a docking station includes a base housing comprising a first surface having a recessed portion, a second surface directed in an opposite direction to the first surface, and a side surface at least partially surrounding a space between the first surface and the second surface, a slide housing slidably mounted on the recessed portion to open and close at least a part of the recessed portion, and a connection member disposed on the recessed portion, in which as the slide housing slides, the connection member is hidden or exposed, and in a state where the at least the part of the recessed portion is opened, the slide housing is positioned inclined with respect to the first surface or the second surface. The docking station described above may be implemented variously depending on embodiments.
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公开(公告)号:USD822074S1
公开(公告)日:2018-07-03
申请号:US29594204
申请日:2017-02-16
设计人: Ki-Soo Kim , Seok-Woo Kim , Young-Min Park , Cheol-Woong Seo , Ki-Sang Yoon , Se-Lim Yoon , Sang-Hyun Lee , Sun-Min Lee , Seon-Ju Lee , Jun-Kyo Lee
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公开(公告)号:USD816736S1
公开(公告)日:2018-05-01
申请号:US29594063
申请日:2017-02-15
设计人: Ki-Soo Kim , Seok-Woo Kim , Young-Min Park , Cheol-Woong Seo , Ki-Sang Yoon , Se-Lim Yoon , Sang-Hyun Lee , Sun-Min Lee , Seon-Ju Lee , Jun-Kyo Lee
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公开(公告)号:US09287161B2
公开(公告)日:2016-03-15
申请号:US14497501
申请日:2014-09-26
发明人: Sang-Hyun Lee , Myeong-Cheol Kim , Yoo-Jung Lee , Il-Sup Kim , Seung-Ju Park
IPC分类号: H01L21/768 , H01L21/311
CPC分类号: H01L21/76802 , H01L21/31144 , H01L21/76816 , H01L21/76877 , H01L21/76895
摘要: A method of manufacturing a wiring includes sequentially forming a first insulation layer, a first layer, and a second layer on a substrate, etching an upper portion of the second layer a plurality of times to form a second layer pattern including a first recess having a shape of a staircase, etching a portion of the second layer pattern and a portion of the first layer under the first recess to form a first layer pattern including a second recess having a shape of a staircase similar to the first recess, etching a portion of the first layer pattern under the second recess to form a first opening exposing a portion of a top surface of the first insulation layer, etching the exposed portion of the first insulation layer to form a second opening through the first insulation layer, and forming a wiring filling the second opening.
摘要翻译: 一种制造布线的方法包括:在基板上依次形成第一绝缘层,第一层和第二层,多次蚀刻第二层的上部以形成第二层图案,该第二层图案包括具有第 形成阶梯,蚀刻第二层图案的一部分和在第一凹部下方的第一层的一部分,以形成第一层图案,该第一层图案包括具有类似于第一凹部的阶梯形状的第二凹部,蚀刻部分 在第二凹部下方的第一层图案,以形成暴露第一绝缘层的顶表面的一部分的第一开口,蚀刻第一绝缘层的暴露部分以形成穿过第一绝缘层的第二开口,以及形成布线 填补第二个开口。
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