Abstract:
A laser annealing method performed on a reflective photomask may include preparing a reflective photomask including a pattern area and a border area surrounding the pattern area and irradiating a laser beam onto the border area of the reflective photomask. The irradiating of the laser beam may include split-irradiating a plurality of laser beam spots onto the border area. Each of the plurality of laser beam spots may be shaped using a beam shaper. The beam shaper may include a blind area, a transparent area at a center of the blind area, and a semitransparent area between the blind area and the transparent area. Each of the plurality of laser beam spots may include a center portion passing through the transparent area and having a uniform energy profile and an edge portion passing through the semitransparent area and having an inclined energy profile.
Abstract:
A laser annealing method performed on a reflective photomask may include preparing a reflective photomask including a pattern area and a border area surrounding the pattern area and irradiating a laser beam onto the border area of the reflective photomask. The irradiating of the laser beam may include split-irradiating a plurality of laser beam spots onto the border area. Each of the plurality of laser beam spots may be shaped using a beam shaper. The beam shaper may include a blind area, a transparent area at a center of the blind area, and a semitransparent area between the blind area and the transparent area. Each of the plurality of laser beam spots may include a center portion passing through the transparent area and having a uniform energy profile and an edge portion passing through the semitransparent area and having an inclined energy profile.
Abstract:
Disclosed is an electronic device including a memory and a processor electrically connected with the memory. The memory stores instructions that, when executed, cause the processor to control the electronic device to: obtain information about a maximum value of brightness of image content based on metadata of the image content, to perform tone mapping on at least one or more frames corresponding to a preview image of the image content based on the information about the maximum value of the brightness, and to output the preview image based on the at least one or more frames on which the tone mapping is performed, on a display device.
Abstract:
A data transmission and reception method and apparatus in a Multiple-Input Multiple-Output (MIMO) system. The transmission method includes selecting at least one antenna for use in transmission among a plurality of antennas based on transmission data and transmitting the transmission data through the selected antenna. The data transmission and reception method and apparatus are advantageous in increasing the throughput of the MIMO communication system. Also, the data transmission and reception method and apparatus are capable of making it possible to design a superior transceiver in complexity and performance. Also, the data transmission and reception method and apparatus are capable of acquiring extra Degree of Freedom (DOF) and thus increasing the number of symbols that can be transmitted at a time. Furthermore, the data transmission and reception method and apparatus are applicable to conventional MIMO communication systems to obtain extra performance gain without being restricted to certain conditions.
Abstract:
A method is provided. The method includes preparing a mask blank, the mask blank including a substrate, a reflective layer disposed on the substrate for reflecting extreme ultraviolet light, and a light absorbing layer disposed on the reflective layer; providing a photomask by forming a plurality of pattern elements having a target critical dimension from the light absorbing layer, wherein the plurality of pattern elements include a correction target pattern element to be corrected, and the correction target pattern element has a critical dimension different from the target critical dimension; identifying a correction target area of the photomask in which the correction target pattern element is disposed; applying an etchant to the photomask; and irradiating a laser beam to the correction target area while the etchant is provided on the photomask.
Abstract:
An electronic device is provided. The electronic device includes a first housing, a second housing foldably connected to the first housing through a hinge device, a flexible display disposed to be supported by the second housing through the hinge device from the first housing, and a protective frame disposed on the second housing with edges of the flexible display interposed, wherein a conductive member is disposed based on at least one pattern between the protective frame and the edges of the flexible display.
Abstract:
A data transmission and/or reception method of a base station in a wireless communication system is provided. The data transmission/reception method includes receiving information on interference measured by a terminal, allocating a downlink resource to a terminal based on the received interference information, determining per-subband transmit power distributions of the downlink resource allocation, and transmitting the per-subband transmit power distributions of the downlink resource allocation to neighbor base stations.
Abstract:
A pellicle cleaning apparatus includes a stage to support a pellicle, a particle remover above the stage, the particle remover being configured to remove a particle from a first surface of a pellicle, and the particle remover including a cantilever, and an adhesive material on a bottom surface of the cantilever, and a pressure controller adjacent to the stage, the pressure controller being configured to control a pressure of a fluid on a second surface of the pellicle.
Abstract:
A laser annealing method performed on a reflective photomask may include preparing a reflective photomask including a pattern area and a border area surrounding the pattern area and irradiating a laser beam onto the border area of the reflective photomask. The irradiating of the laser beam may include split-irradiating a plurality of laser beam spots onto the border area. Each of the plurality of laser beam spots may be shaped using a beam shaper. The beam shaper may include a blind area, a transparent area at a center of the blind area, and a semitransparent area between the blind area and the transparent area. Each of the plurality of laser beam spots may include a center portion passing through the transparent area and having a uniform energy profile and an edge portion passing through the semitransparent area and having an inclined energy profile.
Abstract:
Disclosed is a geofencing server including a memory configured to store a database including wireless fingerprint information for a point-of-interest (PoI), a communication module configured to perform communication with an electronic device, and a processor connected to the memory and the communication circuit, wherein the memory stores instructions that, when executed, cause the processor to obtain wireless network information collected at a plurality of points through the communication circuit, determine a serviceable radius based on the wireless fingerprint information and the wireless network information, and transmit a threshold value determined based on the serviceable radius to the electronic device through the communication circuit.