METHOD OF ANNEALING REFLECTIVE PHOTOMASK BY USING LASER

    公开(公告)号:US20240184192A1

    公开(公告)日:2024-06-06

    申请号:US18441665

    申请日:2024-02-14

    CPC classification number: G03F1/24 B23K26/06 H01L21/268

    Abstract: A laser annealing method performed on a reflective photomask may include preparing a reflective photomask including a pattern area and a border area surrounding the pattern area and irradiating a laser beam onto the border area of the reflective photomask. The irradiating of the laser beam may include split-irradiating a plurality of laser beam spots onto the border area. Each of the plurality of laser beam spots may be shaped using a beam shaper. The beam shaper may include a blind area, a transparent area at a center of the blind area, and a semitransparent area between the blind area and the transparent area. Each of the plurality of laser beam spots may include a center portion passing through the transparent area and having a uniform energy profile and an edge portion passing through the semitransparent area and having an inclined energy profile.

    Method of annealing reflective photomask by using laser

    公开(公告)号:US11934092B2

    公开(公告)日:2024-03-19

    申请号:US18048949

    申请日:2022-10-24

    CPC classification number: G03F1/24 B23K26/06 H01L21/268

    Abstract: A laser annealing method performed on a reflective photomask may include preparing a reflective photomask including a pattern area and a border area surrounding the pattern area and irradiating a laser beam onto the border area of the reflective photomask. The irradiating of the laser beam may include split-irradiating a plurality of laser beam spots onto the border area. Each of the plurality of laser beam spots may be shaped using a beam shaper. The beam shaper may include a blind area, a transparent area at a center of the blind area, and a semitransparent area between the blind area and the transparent area. Each of the plurality of laser beam spots may include a center portion passing through the transparent area and having a uniform energy profile and an edge portion passing through the semitransparent area and having an inclined energy profile.

    Electronic device for processing image and image processing method thereof

    公开(公告)号:US11922607B2

    公开(公告)日:2024-03-05

    申请号:US17384789

    申请日:2021-07-25

    CPC classification number: G06T5/007 G06T2207/20208

    Abstract: Disclosed is an electronic device including a memory and a processor electrically connected with the memory. The memory stores instructions that, when executed, cause the processor to control the electronic device to: obtain information about a maximum value of brightness of image content based on metadata of the image content, to perform tone mapping on at least one or more frames corresponding to a preview image of the image content based on the information about the maximum value of the brightness, and to output the preview image based on the at least one or more frames on which the tone mapping is performed, on a display device.

    DATA TRANSMISSION AND RECEPTION METHOD AND APPARATUS FOR USE IN MIMO SYSTEM
    4.
    发明申请
    DATA TRANSMISSION AND RECEPTION METHOD AND APPARATUS FOR USE IN MIMO SYSTEM 审中-公开
    数据传输和接收方法和在MIMO系统中使用的装置

    公开(公告)号:US20140126667A1

    公开(公告)日:2014-05-08

    申请号:US14076083

    申请日:2013-11-08

    CPC classification number: H04B7/0413 H04B7/0665 H04B7/0691

    Abstract: A data transmission and reception method and apparatus in a Multiple-Input Multiple-Output (MIMO) system. The transmission method includes selecting at least one antenna for use in transmission among a plurality of antennas based on transmission data and transmitting the transmission data through the selected antenna. The data transmission and reception method and apparatus are advantageous in increasing the throughput of the MIMO communication system. Also, the data transmission and reception method and apparatus are capable of making it possible to design a superior transceiver in complexity and performance. Also, the data transmission and reception method and apparatus are capable of acquiring extra Degree of Freedom (DOF) and thus increasing the number of symbols that can be transmitted at a time. Furthermore, the data transmission and reception method and apparatus are applicable to conventional MIMO communication systems to obtain extra performance gain without being restricted to certain conditions.

    Abstract translation: 一种多输入多输出(MIMO)系统中的数据发送和接收方法和装置。 传输方法包括基于传输数据选择在多个天线之间的传输中使用的至少一个天线,并通过所选择的天线发送传输数据。 数据发送和接收方法和装置有利于增加MIMO通信系统的吞吐量。 此外,数据发送和接收方法和装置能够在复杂性和性能方面设计出优异的收发器。 此外,数据发送和接收方法和装置能够获得额外的自由度(DOF),从而增加一次可以发送的符号的数量。 此外,数据发送和接收方法和装置可应用于常规MIMO通信系统以获得额外的性能增益而不限于某些条件。

    Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask

    公开(公告)号:US12259647B2

    公开(公告)日:2025-03-25

    申请号:US17371375

    申请日:2021-07-09

    Abstract: A method is provided. The method includes preparing a mask blank, the mask blank including a substrate, a reflective layer disposed on the substrate for reflecting extreme ultraviolet light, and a light absorbing layer disposed on the reflective layer; providing a photomask by forming a plurality of pattern elements having a target critical dimension from the light absorbing layer, wherein the plurality of pattern elements include a correction target pattern element to be corrected, and the correction target pattern element has a critical dimension different from the target critical dimension; identifying a correction target area of the photomask in which the correction target pattern element is disposed; applying an etchant to the photomask; and irradiating a laser beam to the correction target area while the etchant is provided on the photomask.

    Inter-cell interference coordination method and apparatus for use in mobile communication system
    7.
    发明授权
    Inter-cell interference coordination method and apparatus for use in mobile communication system 有权
    用于移动通信系统的小区间干扰协调方法和装置

    公开(公告)号:US09414328B2

    公开(公告)日:2016-08-09

    申请号:US14074090

    申请日:2013-11-07

    CPC classification number: H04W52/243 H04W52/346

    Abstract: A data transmission and/or reception method of a base station in a wireless communication system is provided. The data transmission/reception method includes receiving information on interference measured by a terminal, allocating a downlink resource to a terminal based on the received interference information, determining per-subband transmit power distributions of the downlink resource allocation, and transmitting the per-subband transmit power distributions of the downlink resource allocation to neighbor base stations.

    Abstract translation: 提供了一种在无线通信系统中的基站的数据发送和/或接收方法。 数据发送/接收方法包括接收由终端测量的干扰的信息,基于接收到的干扰信息向终端分配下行链路资源,确定下行链路资源分配的每个子带的发射功率分布,以及发送每个子带的发射 下行资源分配给邻近基站的功率分布。

    Method of annealing reflective photomask by using laser

    公开(公告)号:US11506968B2

    公开(公告)日:2022-11-22

    申请号:US16911601

    申请日:2020-06-25

    Abstract: A laser annealing method performed on a reflective photomask may include preparing a reflective photomask including a pattern area and a border area surrounding the pattern area and irradiating a laser beam onto the border area of the reflective photomask. The irradiating of the laser beam may include split-irradiating a plurality of laser beam spots onto the border area. Each of the plurality of laser beam spots may be shaped using a beam shaper. The beam shaper may include a blind area, a transparent area at a center of the blind area, and a semitransparent area between the blind area and the transparent area. Each of the plurality of laser beam spots may include a center portion passing through the transparent area and having a uniform energy profile and an edge portion passing through the semitransparent area and having an inclined energy profile.

    Method for variable geofencing and electronic device thereof

    公开(公告)号:US11284216B2

    公开(公告)日:2022-03-22

    申请号:US16904057

    申请日:2020-06-17

    Abstract: Disclosed is a geofencing server including a memory configured to store a database including wireless fingerprint information for a point-of-interest (PoI), a communication module configured to perform communication with an electronic device, and a processor connected to the memory and the communication circuit, wherein the memory stores instructions that, when executed, cause the processor to obtain wireless network information collected at a plurality of points through the communication circuit, determine a serviceable radius based on the wireless fingerprint information and the wireless network information, and transmit a threshold value determined based on the serviceable radius to the electronic device through the communication circuit.

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