TEST BOARD AND TEST METHOD FOR SEMICONDUCTOR DEVICE USING THE SAME

    公开(公告)号:US20240077535A1

    公开(公告)日:2024-03-07

    申请号:US18300870

    申请日:2023-04-14

    CPC classification number: G01R31/31924 G01R31/2834 G01R31/31905

    Abstract: Disclosed is a test board which includes a substrate that includes a device under test (DUT) placement area where a first DUT and a second DUT are disposed, a first load switch connected in series with the first DUT and configured to be set to a switch on state or a switch off state based on a first enable signal, a second load switch connected in series with the second DUT and configured to be set to the switch on state or the switch off state depending on a second enable signal, and a test controller. The test controller may be configured to perform a test operation in a (1-1)-th mode by activating the first enable signal and deactivating the second enable signal and then perform the test operation in a (1-2)-th mode by deactivating the first enable signal and activating the second enable signal.

    TEST DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING TEST DEVICE

    公开(公告)号:US20250012854A1

    公开(公告)日:2025-01-09

    申请号:US18620170

    申请日:2024-03-28

    Abstract: A test device includes a test board, a connector attached to a lower surface of the test board, a heating device disposed on an upper surface of the test board, the heating device configured to emit heat in response to a signal input through the connector, a temperature sensor disposed on the upper surface of the test board, the temperature sensor configured to measure a temperature of the heating device, and a test socket disposed on the upper surface of the test board, the test socket configured to transmit and receive a signal to and from the heating device and the temperature sensor. Before a test process is performed or after the test process is completed, an internal temperature of a chamber may be verified, thereby improving reliability of the test process.

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