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公开(公告)号:US20240170523A1
公开(公告)日:2024-05-23
申请号:US18509493
申请日:2023-11-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Wonhyeok Kim , Seungjoo Nah , Ingyu Hyun , Heegeun Jeong
IPC: H01L27/146
CPC classification number: H01L27/1463 , H01L27/1462 , H01L27/14621 , H01L27/14627 , H01L27/14636 , H01L27/14645 , H01L27/14683
Abstract: An image sensor including a substrate including a first surface and a second surface, and including a plurality of photoelectric conversion elements therein. A plurality of pixels may be provided in the substrate, a plurality of pixel separation structures may be configured to separate the plurality of pixels, and a plurality of contacts may be respectively connected to the plurality of pixel separation structures. A first contact among the plurality of contacts may be configured to apply a current to a first portion of the plurality of pixel separation structures, and a second contact among the plurality of contacts may be configured to detect a current from a second portion of the plurality of pixel separation structures.
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公开(公告)号:US12087785B2
公开(公告)日:2024-09-10
申请号:US17453013
申请日:2021-11-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hoemin Jeong , Seungjoo Nah , Heegeun Jeong , Wonmo Chun
IPC: H01L27/146
CPC classification number: H01L27/14605 , H01L27/14621 , H01L27/14623 , H01L27/14627 , H01L27/1463 , H01L27/14634 , H01L27/14645 , H01L27/14685
Abstract: An image sensor includes: a substrate including a plurality of first and second pixels; a light blocking pattern providing a plurality of first spaces respectively disposed on the first pixels and at least one second space disposed on the plurality of second pixels; a plurality of color filters respectively disposed in the plurality of first spaces; and a microlens layer including a plurality of first microlenses respectively disposed on the plurality of color filters, at least one filling portion disposed in the at least one second space, and at least one second microlens disposed on the at least one filling portion, wherein the microlenses are disposed at the same height as each other, and wherein the at least one filling portion and the at least one second microlens comprise an integrated structure without an interface between the at least one filling portion and the at least one second microlens.
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公开(公告)号:US20220165766A1
公开(公告)日:2022-05-26
申请号:US17453013
申请日:2021-11-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hoemin Jeong , Seungjoo Nah , Heegeun Jeong , Wonmo Chun
IPC: H01L27/146
Abstract: An image sensor includes: a substrate including a plurality of first and second pixels; a light blocking pattern providing a plurality of first spaces respectively disposed on the first pixels and at least one second space disposed on the plurality of second pixels; a plurality of color filters respectively disposed in the plurality of first spaces; and a microlens layer including a plurality of first microlenses respectively disposed on the plurality of color filters, at least one filling portion disposed in the at least one second space, and at least one second microlens disposed on the at least one filling portion, wherein the microlenses are disposed at the same height as each other, and wherein the at least one filling portion and the at least one second microlens comprise an integrated structure without an interface between the at least one filling portion and the at least one second microlens.
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公开(公告)号:US10121808B1
公开(公告)日:2018-11-06
申请号:US15840635
申请日:2017-12-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Dongmin Han , Jung-Saeng Kim , Seungjoo Nah , Junetaeg Lee
IPC: H01L27/14 , H01L31/0232 , H01L27/146 , H04N5/374
Abstract: A device includes first patterns, second patterns, and a second sample pattern on a semiconductor substrate. The second patterns are horizontally spaced apart at an equal interval from the second sample pattern. The second sample pattern includes first and second sidewall facing each other, a first point on the first sidewall, and a second point on the second sidewall. The second sample pattern and the most adjacent first pattern in relation to the second sample pattern are spaced apart from each other at a first horizontal distance in a direction parallel to a line connecting the first point and the second point. The first horizontal distance is greater than a second horizontal distance in the direction between one second pattern of the second patterns and a most adjacent first pattern in relation to the one second pattern.
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5.
公开(公告)号:US20240290808A1
公开(公告)日:2024-08-29
申请号:US18517562
申请日:2023-11-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Wonhyeok Kim , Seungjoo Nah , Heegeun Jeong
IPC: H01L27/146
CPC classification number: H01L27/1463 , H01L27/1464 , H01L27/14685 , H01L27/14641
Abstract: An image sensor is provided, and the image sensor includes: a substrate having first and second surfaces spaced apart from each other in a vertical direction; a first color unit pixel including a first subpixel to a fourth subpixel arranged in a 2×2 matrix; a second color unit pixel including four subpixels arranged in a 2×2 matrix; a first pixel isolation trench separating the first color unit pixel and the second color unit pixel; a second pixel isolation trench separating the first subpixel and the second subpixel of the first color unit pixel; a third pixel isolation trench on a point of intersection of the first to fourth subpixels of the first color unit pixel. The first color unit pixel detects first color light. The second color unit pixel detects second color light. The image sensor is configured to receive the first color light on the second surface. The second pixel isolation trench extends from the first surface to the second surface. The third pixel isolation trench extends from the second surface to the first surface.
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公开(公告)号:US11848342B2
公开(公告)日:2023-12-19
申请号:US17218662
申请日:2021-03-31
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sunyoung Bang , Seungjoo Nah , Hoemin Jeong , Heegeun Jeong
IPC: H01L27/146
CPC classification number: H01L27/14621 , H01L27/14627
Abstract: An image sensor includes: a substrate having a first surface and a second surface that are opposite to each other; a plurality of color filters on the substrate; a fence pattern between adjacent color filters of the plurality of color filters; and a protective layer between the substrate and the plurality of color filters, wherein the protective layer covers the fence pattern. The fence pattern includes: a first fence pattern having a first bottom surface and a first top surface that are opposite to each other; and a second fence pattern on the first top surface of the first fence pattern. A width at the first bottom surface of the first fence pattern is less than a width of the second fence pattern, and the protective layer covers a sidewall of the first fence pattern.
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7.
公开(公告)号:US09711557B2
公开(公告)日:2017-07-18
申请号:US14641621
申请日:2015-03-09
Applicant: Samsung Electronics Co., Ltd.
Inventor: Seungjoo Nah , Jung-Chak Ahn , Kyung-Ho Lee
IPC: H01L27/146
CPC classification number: H01L27/14643 , H01L27/14603 , H01L27/14616 , H01L27/1463 , H01L27/14689
Abstract: A semiconductor device includes a light-receiving element which outputs electric charges in response to incident light, and a drive transistor which is gated by an output of the light-receiving element to generate a source-drain current in proportion to the incident light, wherein the drive transistor include a first gate electrode, a first channel region which is disposed under the first gate electrode, first source-drain regions which are disposed at respective ends of the first channel region and that have a first conductivity type, and a first channel stop region which is disposed on a side of the first channel region, and that separates the light-receiving element and the first channel region, the first channel stop region having a second conductivity type that is different from the first conductivity type.
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公开(公告)号:US12272704B2
公开(公告)日:2025-04-08
申请号:US17744045
申请日:2022-05-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyeongjae Byeon , Jinyoung Kim , Seungjoo Nah , Heegeun Jeong
IPC: H01L27/146
Abstract: An image sensor includes a substrate including a first region and a second region surrounding the first region, a light sensing element in the substrate, a planarization layer on the light sensing element, a color filter array layer including color filters on the planarization layer on the first region of the substrate, a light blocking metal pattern on the planarization layer on the second region of the substrate, a dummy color filter layer on the light blocking metal pattern on a portion of the second region adjacent to the first region of the substrate, and microlens on the color filter array layer. Active pixels are in the first region, and optical black (OB) pixels are in the second region.
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公开(公告)号:US20240347559A1
公开(公告)日:2024-10-17
申请号:US18754448
申请日:2024-06-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hoemin Jeong , Seungjoo Nah , Heegeun Jeong , Wonmo Chun
IPC: H01L27/146
CPC classification number: H01L27/14605 , H01L27/14621 , H01L27/14623 , H01L27/14627 , H01L27/1463 , H01L27/14634 , H01L27/14645 , H01L27/14685
Abstract: An image sensor includes first through fourth pixels. The first pixel includes a first color filter, a first photoelectric conversion device (PD), and a first microlens. The second pixel includes a second PD and a first filling portion. The third pixel includes a third PD and a second filling portion. The fourth pixel includes a fourth PD, a second microlens, and a second color filter different from the first color filter. The second pixel is adjacent to the first pixel. The third pixel is adjacent to the second pixel. The second and third pixels do not comprise any one of a red, blue, and green color filter. Each of the first and second filling portions is configured to transmit light of wavelengths corresponding to blue, red, and green to the second and third PDs, respectively. The first color filter is configured to transmit light of the wavelength corresponding to blue.
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公开(公告)号:US11935908B2
公开(公告)日:2024-03-19
申请号:US17327885
申请日:2021-05-24
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Mihye Jang , Seungjoo Nah , Minho Jang , Heegeun Jeong
IPC: H01L27/146 , H01L21/768 , H01L23/00 , H10K39/32
CPC classification number: H01L27/14636 , H01L21/76898 , H01L24/83 , H01L27/14634 , H01L27/1469 , H10K39/32 , H01L24/06 , H01L24/32 , H01L2224/06155 , H01L2224/32145 , H01L2224/83931 , H01L2224/83951
Abstract: An image sensor includes a first structure including a first substrate, and a first internal wiring structure on the first substrate. The first substrate includes an active pixel region and a through electrode region around the active pixel region. The first internal wiring structure includes a plurality of first internal wiring patterns. The image sensor further includes a second structure including a second substrate and a second internal wiring structure on the second substrate. The second substrate is arranged on the first substrate. The image sensor additionally includes a through electrode layer arranged in the through electrode region to at least partially fill a through electrode trench, which penetrates the first substrate, and to connect the first internal wiring structure to the second internal wiring structure.
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