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公开(公告)号：US08048476B2
公开(公告)日：2011-11-01
申请号：US11720270
申请日：2006-11-10
CPC分类号： H01J9/20 , C23C14/0021 , C23C14/081 , C23C14/568 , H01J11/10 , H01J11/40
摘要： Evaporation chamber for depositing a protective film on a surface, where a dielectric layer is formed, of front substrate, front substrate is formed a display electrode and the dielectric layer thereon; transporting unit for transporting front substrate into evaporation chamber; gas introducing units for introducing gas containing H2O into evaporation chamber; and partial pressure detecting unit for measuring a certain partial pressure of gas within evaporation chamber, extending from the center of deposition space of evaporation chamber to the downstream of transport direction of front substrate are provided. Gas containing H2O is introduced from gas introducing units such that the partial pressure of gas is controlled in the partial pressure detecting unit.
摘要翻译： 用于在形成介电层的表面上沉积保护膜的蒸发室，前基板，前基板在其上形成显示电极和电介质层; 将前基板输送到蒸发室中的输送单元; 用于将含有H 2 O的气体引入蒸发室的气体引入单元; 以及分压检测单元，用于测量从蒸发室的沉积空间的中心延伸到前基板输送方向的下游的蒸发室内的气体的一定分压。 从气体导入单元导入含有H 2 O的气体，使得在分压检测单元中控制气体的分压。
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公开(公告)号：US20090227170A1
公开(公告)日：2009-09-10
申请号：US11720270
申请日：2006-11-10
IPC分类号： H01J9/00
CPC分类号： H01J9/20 , C23C14/0021 , C23C14/081 , C23C14/568 , H01J11/10 , H01J11/40
摘要： Evaporation chamber for depositing a protective film on a surface, where a dielectric layer is formed, of front substrate, front substrate is formed a display electrode and the dielectric layer thereon; transporting unit for transporting front substrate into evaporation chamber; gas introducing units for introducing gas containing H2O into evaporation chamber; and partial pressure detecting unit for measuring a certain partial pressure of gas within evaporation chamber, extending from the center of deposition space of evaporation chamber to the downstream of transport direction of front substrate are provided. Gas containing H2O is introduced from gas introducing units such that the partial pressure of gas is controlled in the partial pressure detecting unit.
摘要翻译： 用于在形成介电层的表面上沉积保护膜的蒸发室，前基板，前基板在其上形成显示电极和电介质层; 将前基板输送到蒸发室中的输送单元; 用于将含有H 2 O的气体引入蒸发室的气体引入单元; 以及分压检测单元，用于测量从蒸发室的沉积空间的中心延伸到前基板输送方向的下游的蒸发室内的气体的一定分压。 从气体导入单元导入含有H 2 O的气体，使得在分压检测单元中控制气体的分压。
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公开(公告)号：US07520967B2
公开(公告)日：2009-04-21
申请号：US10847441
申请日：2004-05-18
申请人： Teruo Maruyama , Takashi Sonoda , Yoshimasa Takii
发明人： Teruo Maruyama , Takashi Sonoda , Yoshimasa Takii
IPC分类号： B05C5/00
CPC分类号： H01J11/10 , B05C5/02 , B05C11/10 , H01J9/02 , H01J2209/015
摘要： A meniscus of applying fluid is controlled by applying a voltage to a discharge-nozzle side electrode and a counter electrode placed downstream of the discharge nozzle and by increasing or decreasing fluid pressure inside a pump chamber with use of a mechanism for rotational motion or rectilinear motion.
摘要翻译： 通过向放电喷嘴侧的放电喷嘴侧电极和对置电极施加电压并且通过使用用于旋转运动或直线运动的机构来增加或减小泵室内的流体压力来控制施加流体的弯月面 。
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公开(公告)号：US20090096375A1
公开(公告)日：2009-04-16
申请号：US11918002
申请日：2006-04-07
申请人： Hideki Yamashita , Takafumi Okuma , Hiroshi Hayata , Yoshimasa Takii , Hirokazu Nakaue , Tadashi Kimura , Masaharu Terauchi
发明人： Hideki Yamashita , Takafumi Okuma , Hiroshi Hayata , Yoshimasa Takii , Hirokazu Nakaue , Tadashi Kimura , Masaharu Terauchi
摘要： A PDP, which has a plurality of display electrodes formed therein, and is provided with a front plate in which the display electrodes are covered with a first dielectric layer and a protective film and a back plate having a plurality of address electrodes that are formed in a direction orthogonal to the display electrode, and covered with a second dielectric layer (backing dielectric layer, is designed so that the protective film has a structure in which grain-state crystals are aggregated and a grain size of the crystals is large, with a void between adjacent crystals being formed with a small size.
摘要翻译： 一种PDP，其具有形成在其中的多个显示电极，并且设置有前板，其中显示电极被第一介电层和保护膜覆盖，背板具有形成在多个位置电极中的多个寻址电极 与显示电极正交的方向，被第二电介质层（背面电介质层）覆盖，被设计为使得保护膜具有粒状晶体聚集的结构和晶体的晶粒尺寸大， 相邻晶体之间的空隙形成为小尺寸。
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公开(公告)号：US20120119384A1
公开(公告)日：2012-05-17
申请号：US13387204
申请日：2011-03-28
申请人： Yoshimasa Takii , Takayuki Kai , Daishiro Saito , Takafumi Okuma
发明人： Yoshimasa Takii , Takayuki Kai , Daishiro Saito , Takafumi Okuma
IPC分类号： H01L23/48 , H01L21/768
CPC分类号： H01L21/76898 , H01L23/481 , H01L23/525 , H01L24/03 , H01L24/05 , H01L24/13 , H01L2224/02372 , H01L2224/02375 , H01L2224/02381 , H01L2224/0347 , H01L2224/0401 , H01L2224/05008 , H01L2224/05548 , H01L2224/13021 , H01L2224/13022 , H01L2224/13024 , H01L2224/131 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01019 , H01L2924/01029 , H01L2924/01033 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01082 , H01L2924/014
摘要： In a semiconductor device having a through-hole electrode and a manufacturing method thereof, a dummy groove hole portion for forming insulating portion insulating wirings from each other is provided, to surround a rewiring layer including a through-hole electrode on a back surface of a semiconductor substrate. This allows the wirings to be insulated from each other just by removing the metal layer existing at a bottom portion of the dummy groove hole portion. Thus, a reduction in the processing time can be realized.
摘要翻译： 在具有通孔电极的半导体器件及其制造方法中，设置用于形成绝缘部分绝缘布线的虚拟槽孔部分，以在包括通孔电极的背面上的包括通孔电极的重新布线层 半导体衬底。 这允许通过去除存在于虚拟槽孔部分的底部处的金属层而使布线彼此绝缘。 因此，可以实现处理时间的缩短。
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公开(公告)号：US20060163759A1
公开(公告)日：2006-07-27
申请号：US10847441
申请日：2004-05-18
申请人： Teruo Maruyama , Takashi Sonoda , Yoshimasa Takii
发明人： Teruo Maruyama , Takashi Sonoda , Yoshimasa Takii
IPC分类号： F02M1/04
CPC分类号： H01J11/10 , B05C5/02 , B05C11/10 , H01J9/02 , H01J2209/015
摘要： A meniscus of applying fluid is controlled by applying a voltage to a discharge-nozzle side electrode and a counter electrode placed downstream of the discharge nozzle and by increasing or decreasing fluid pressure inside a pump chamber with use of a mechanism for rotational motion or rectilinear motion.
摘要翻译： 通过向放电喷嘴侧的放电喷嘴侧电极和对置电极施加电压并且通过使用用于旋转运动或直线运动的机构来增加或减小泵室内的流体压力来控制施加流体的弯月面 。
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