公开(公告)号：US5569784A

公开(公告)日：1996-10-29

申请号：US379987

申请日：1995-01-27

申请人： Satoshi Watanabe ,  Junji Shimada ,  Youichi Ohsawa ,  Katsuya Takemura ,  Toshinobu Ishihara ,  Kazumasa Maruyama

发明人： Satoshi Watanabe ,  Junji Shimada ,  Youichi Ohsawa ,  Katsuya Takemura ,  Toshinobu Ishihara ,  Kazumasa Maruyama

IPC分类号： C07C381/12 ,  G03F7/004 ,  G03F7/039 ,  C07C217/48

CPC分类号： C07C381/12 ,  G03F7/0045 ,  G03F7/039

摘要： A novel sulfonium salt having at least one substituted aromatic group having acid labile groups and at least one nitrogenous aromatic group is provided. A chemically amplified, positive resist composition comprising the sulfonium salt as well as an alkali soluble resin and a dissolution inhibitor in an organic solvent has solved the PED problem.

摘要翻译： 提供具有至少一个具有酸不稳定基团和至少一个含氮芳族基团的取代芳族基团的新型锍盐。 在有机溶剂中包含锍盐以及碱溶性树脂和溶解抑制剂的化学增幅阳性抗蚀剂组合物解决了PED问题。

公开(公告)号：US5691112A

公开(公告)日：1997-11-25

申请号：US762861

申请日：1996-12-10

申请人： Satoshi Watanabe ,  Youichi Ohsawa ,  Toshinobu Ishihara ,  Kazumasa Maruyama ,  Yoshihumi Takeda ,  Junji Shimada ,  Fujio Yagihashi ,  Katsuya Takemura

发明人： Satoshi Watanabe ,  Youichi Ohsawa ,  Toshinobu Ishihara ,  Kazumasa Maruyama ,  Yoshihumi Takeda ,  Junji Shimada ,  Fujio Yagihashi ,  Katsuya Takemura

IPC分类号： C07C317/22 ,  C07C381/12 ,  G03F7/004

CPC分类号： G03F7/0045 ,  C07C317/22 ,  C07C381/12

摘要： Trifluoromethanesulfonic and p-toluenesulfonic acid bis- or tris(p-tert-butoxyphenyl)sulfonium salts are novel. They are prepared from bis(p-tert-butoxyphenyl)sulfoxide which is also novel. A chemically amplified positive resist composition which contains the sulfonium salt as a photo-acid generator is highly sensitive to deep-UV rays, electron beams and X-rays, can be developed with alkaline aqueous solution to form a pattern, and is thus suitable for use in a fine patterning technique.

摘要翻译： 三氟甲磺酸和对甲苯磺酸双或三（对叔丁氧基苯基）锍盐是新颖的。 它们由双（对叔丁氧基苯基）亚砜制备，也是新的。 含有锍盐作为光酸发生剂的化学增幅正性抗蚀剂组合物对深紫外线，电子束和X射线高度敏感，可以用碱性水溶液显影形成图案，因此适用于 使用精细图案化技术。

公开(公告)号：US5633409A

公开(公告)日：1997-05-27

申请号：US379986

申请日：1995-01-27

申请人： Satoshi Watanabe ,  Youichi Ohsawa ,  Toshinobu Ishihara ,  Kazumasa Maruyama ,  Yoshihumi Takeda ,  Junji Shimada ,  Fujio Yagihashi ,  Katsuya Takemura

发明人： Satoshi Watanabe ,  Youichi Ohsawa ,  Toshinobu Ishihara ,  Kazumasa Maruyama ,  Yoshihumi Takeda ,  Junji Shimada ,  Fujio Yagihashi ,  Katsuya Takemura

IPC分类号： C07C317/22 ,  C07C381/12 ,  G03F7/004 ,  C07C319/00

CPC分类号： G03F7/0045 ,  C07C317/22 ,  C07C381/12

摘要： Trifluoromethanesulfonic and p-toluenesulfonic acid bis- or tris(p-tert-butoxyphenyl)sulfonium salts are novel. They are prepared from bis(p-tert-butoxyphenyl)sulfoxide which is also novel. A chemically amplified positive resist composition which contains the sulfonium salt as a photo-acid generator is highly sensitive to deep-UV rays, electron beams and X-rays, can be developed with alkaline aqueous solution to form a pattern, and is thus suitable for use in a fine patterning technique.

摘要翻译： 三氟甲磺酸和对甲苯磺酸双或三（对叔丁氧基苯基）锍盐是新颖的。 它们由双（对叔丁氧基苯基）亚砜制备，也是新的。 含有锍盐作为光酸发生剂的化学增幅正性抗蚀剂组合物对深紫外线，电子束和X射线高度敏感，可以用碱性水溶液显影形成图案，因此适用于 使用精细图案化技术。

公开(公告)号：US5847218A

公开(公告)日：1998-12-08

申请号：US811530

申请日：1997-03-04

申请人： Youichi Ohsawa ,  Satoshi Watanabe ,  Junji Shimada ,  Katsuya Takemura ,  Shigehiro Nagura ,  Toshinobu Ishihara

发明人： Youichi Ohsawa ,  Satoshi Watanabe ,  Junji Shimada ,  Katsuya Takemura ,  Shigehiro Nagura ,  Toshinobu Ishihara

IPC分类号： C07C381/12 ,  G03F7/004 ,  G03F7/029 ,  G03F7/039 ,  H01L21/027 ,  C07C211/44

CPC分类号： C07C381/12 ,  G03F7/0045

摘要： The invention provides a novel sulfonium salt having a substituted or unsubstituted arylsulfonate anion. The novel sulfonium salt minimizes the influence of deactivation by basic compounds not only at a resist surface, but also at a resist-substrate interface, assists a resist to be configured to a definite pattern profile. When the sulfonium salt has an acid labile group, it is effective for increasing the dissolution contrast between exposed and unexposed areas. The sulfonium salt is useful in a chemically amplified positive resist composition which lends itself to fine patterning and features high resolution.

摘要翻译： 本发明提供了具有取代或未取代的芳基磺酸根阴离子的新型锍盐。 新型锍盐不仅在抗蚀剂表面，而且在抗蚀剂 - 基材界面处，使碱性化合物失活的影响最小化，有助于将抗蚀剂配置成确定的图案轮廓。 当锍盐具有酸不稳定基团时，对于增加暴露区域和未暴露区域之间的溶解度对比度是有效的。 锍盐可用于化学放大的正性抗蚀剂组合物，其具有精细的图案化并具有高分辨率。

公开(公告)号：US6033828A

公开(公告)日：2000-03-07

申请号：US12583

申请日：1998-01-26

申请人： Junji Shimada ,  Osamu Watanabe ,  Satoshi Watanabe ,  Shigehiro Nagura ,  Toshinobu Ishihara

发明人： Junji Shimada ,  Osamu Watanabe ,  Satoshi Watanabe ,  Shigehiro Nagura ,  Toshinobu Ishihara

IPC分类号： C08F8/04 ,  G03F7/004 ,  G03F7/039 ,  G03C1/492 ,  C08F12/08 ,  C08F12/24

CPC分类号： G03F7/039 ,  C08F8/04 ,  G03F7/0045

摘要： A polymer comprising recurring units of formula (1) is provided wherein some of the hydrogen atoms of phenolic hydroxyl groups and/or alcoholic hydroxyl groups are replaced by acid labile groups. The polymer is crosslinked within a molecule and/or between molecules with a crosslinking group having a C--O--C linkage resulting from reaction of some of the remaining phenolic hydroxyl groups and/or alcoholic hydroxyl groups with an alkenyl ether compound or halogenated alkyl ether compound. The amount of the acid labile group and the crosslinking group combined is on the average from more than 0 mol % to 80 mol % of the entirety of the phenolic hydroxyl group and alcoholic hydroxyl group. The polymer has Mw of 1,000-500,000. ##STR1## R.sup.1 is H or methyl, R.sup.2 is C.sub.1 -C.sub.8 alkyl, letter x is 0 or a positive integer, y is a positive integer, x+y.ltoreq.5, letters p and q are positive numbers satisfying p+q=1 and 0

摘要翻译： 提供了包含式（1）的重复单元的聚合物，其中酚羟基和/或醇羟基的一些氢原子被酸不稳定基团取代。 聚合物在分子内和/或分子之间交联，具有由一些残留的酚羟基和/或醇羟基与链烯基醚化合物或卤代烷基醚化合物的反应产生的具有C-O-C键的交联基团。 酸不稳定基团和交联基团的用量平均为全部酚羟基和醇羟基的0摩尔％至80摩尔％以上。 聚合物的Mw为1,000-500,000。 R1是H或甲基，R2是C1-C8烷基，字母x是0或正整数，y是正整数，x + y <5，字母p和q是满足p + q = 1的正数， 0

公开(公告)号：US5705702A

公开(公告)日：1998-01-06

申请号：US713257

申请日：1996-09-12

申请人： Yoichi Osawa ,  Satoshi Watanabe ,  Junji Shimada ,  Toshinobu Ishihara

发明人： Yoichi Osawa ,  Satoshi Watanabe ,  Junji Shimada ,  Toshinobu Ishihara

IPC分类号： C07C381/12 ,  C07C331/00

CPC分类号： C07C381/12

摘要： By reacting an aryl Grignard reagent of the following general formula (1) with thionyl chloride and then reacting the reaction product with a triorganosilyl sulfonate or triorganohalide of the general formula (2): (R.sup.6).sub.3 SiY wherein R.sup.6, which may be the same or different, is a monovalent hydrocarbon group and Y is a substituted or unsubstituted alkylsulfonate or arylsulfonate or halogen atom, there is prepared a triarylsulfonium salt of the following general formula (3). ##STR1## In the formulae, each of R.sup.1 to R.sup.5, which may be the same or different, is a hydrogen atom or a monovalent organic group, especially alkyl, aryl, alkoxy, aryloxy, dialkylamino, dialkylaminoalkyl, alkylthio or arylthio group and X is a bromine or chlorine atom.

摘要翻译： 通过使下列通式（1）的芳基格氏试剂与亚硫酰氯反应，然后使反应产物与通式（2）：（R6）3 SiY的三有机甲硅烷基磺酸酯或三有机卤化物反应，其中R6可以相同或 不同的是一价烃基，Y是取代或未取代的烷基磺酸酯或芳基磺酸酯或卤素原子，制备下列通式（3）的三芳基锍盐。 （1）式（3）式中，R 1〜R 5可以相同或不同，为氢原子或一价有机基团，特别是烷基，芳基，烷氧基，芳氧基，二烷基氨基 ，二烷基氨基烷基，烷硫基或芳硫基，X是溴或氯原子。

公开(公告)号：US20110298888A1

公开(公告)日：2011-12-08

申请号：US13202000

申请日：2010-02-16

申请人： Junji Shimada

发明人： Junji Shimada

IPC分类号： H04N7/00

CPC分类号： H04N5/23248 ,  G03B37/00 ,  H04N5/232 ,  H04N5/23238 ,  H04N5/23287 ,  H04N5/23293 ,  H04N2101/00

摘要： A panoramic image is to be easily generated.A driver 12 displaces at least one of a lens unit 11a and an image capturing element 21 with respect to an optical axis. A control unit 50 displaces, using the driver 12, at least one of the lens unit 11a and the image capturing element 21 in accordance with a motion of an image capturing apparatus 10. When generating a plurality of captured images while shifting an image capturing direction in order to generate a panoramic image from the plurality of captured images, the control unit 50 changes a position of the lens unit 11a and/or the image capturing element 21, the position being a position at the start of exposure of each of the captured images, in a direction set according to a direction in which the image capturing direction shifts, thereby performing correction of deviation caused by a motion of the image capturing apparatus.

摘要翻译： 要轻松生成全景图像。 驱动器12相对于光轴移动透镜单元11a和图像拍摄元件21中的至少一个。 控制单元50根据摄像装置10的运动，使用驱动器12移动透镜单元11a和图像拍摄元件21中的至少一个。当在移动图像拍摄方向的同时产生多个拍摄图像 为了从多个拍摄图像生成全景图像，控制单元50改变透镜单元11a和/或图像拍摄元件21的位置，该位置是每个被拍摄的图像的曝光开始时的位置 图像沿着根据图像拍摄方向移动的方向设置的方向，从而执行由图像拍摄装置的运动引起的偏差的校正。

公开(公告)号：US20070064115A1

公开(公告)日：2007-03-22

申请号：US11519569

申请日：2006-09-12

申请人： Hirofumi Nomura ,  Jinyo Kumaki ,  Junji Shimada ,  Nobuo Nishi ,  Long Meng

发明人： Hirofumi Nomura ,  Jinyo Kumaki ,  Junji Shimada ,  Nobuo Nishi ,  Long Meng

IPC分类号： H04N5/228

CPC分类号： H04N5/23248 ,  H04N5/23254 ,  H04N5/23267

摘要： An imaging apparatus is disclosed. The imaging apparatus includes an image capturing section, a motion detecting section, a reliability determining section, a shaking compensating section, and a filtering section. The image capturing section captures a plurality of images which chronologically differ. The motion detecting section detects motion of the plurality of images and generates motion information. The reliability determining section determines reliability of the motion information. The shaking compensating section compensates shaking which takes place among the plurality of images corresponding to the motion information. The filtering section filters an image which has been compensated for shaking by using a recursive filter. A characteristic of the filtering section is varied corresponding to the reliability of the motion information.

摘要翻译： 公开了一种成像装置。 成像装置包括图像拍摄部分，运动检测部分，可靠性确定部分，抖动补偿部分和过滤部分。 图像捕获部分捕获按时间顺序不同的多个图像。 运动检测部分检测多个图像的运动并产生运动信息。 可靠性确定部确定运动信息的可靠性。 抖动补偿部补偿在与运动信息对应的多个图像中发生的抖动。 滤波部分通过使用递归滤波器来滤除已被补偿抖动的图像。 滤波部分的特性根据运动信息的可靠性而变化。

公开(公告)号：US20120019680A1

公开(公告)日：2012-01-26

申请号：US13159731

申请日：2011-06-14

申请人： Junji Shimada ,  Akihisa Tanaka

发明人： Junji Shimada ,  Akihisa Tanaka

IPC分类号： H04N5/228

CPC分类号： H04N5/3577 ,  H04N5/2254 ,  H04N5/23245 ,  H04N5/2328 ,  H04N5/3745 ,  H04N5/378

摘要： An imaging device includes an image capturing element which photoelectrically converts a subject image into electrical charge information, a driving device which drives a driving part related to image capturing, and a controlling unit which changes a driving frequency of the driving device at a timing to read the electrical charge information from the image capturing element.

摘要翻译： 一种成像装置包括将被摄体图像光电转换为电荷信息的图像捕获元件，驱动与图像捕获相关的驱动部分的驱动装置，以及控制单元，其以读取的时刻改变驱动装置的驱动频率 来自图像捕获元件的电荷信息。

公开(公告)号：US09942476B2

公开(公告)日：2018-04-10

申请号：US13202000

申请日：2010-02-16

申请人： Junji Shimada

发明人： Junji Shimada

IPC分类号： H04N7/00 ,  H04N5/232 ,  G03B37/00 ,  H04N101/00

CPC分类号： H04N5/23248 ,  G03B37/00 ,  H04N5/232 ,  H04N5/23238 ,  H04N5/23287 ,  H04N5/23293 ,  H04N2101/00

摘要： A panoramic image is to be easily generated.A driver 12 displaces at least one of a lens unit 11a and an image capturing element 21 with respect to an optical axis. A control unit 50 displaces, using the driver 12, at least one of the lens unit 11a and the image capturing element 21 in accordance with a motion of an image capturing apparatus 10. When generating a plurality of captured images while shifting an image capturing direction in order to generate a panoramic image from the plurality of captured images, the control unit 50 changes a position of the lens unit 11a and/or the image capturing element 21, the position being a position at the start of exposure of each of the captured images, in a direction set according to a direction in which the image capturing direction shifts, thereby performing correction of deviation caused by a motion of the image capturing apparatus.