公开(公告)号：US09465305B2

公开(公告)日：2016-10-11

申请号：US13101264

申请日：2011-05-05

申请人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

发明人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

IPC分类号： H02K41/00 ,  G03F7/20 ,  H02P6/00

CPC分类号： G03F7/70758 ,  G03F7/70516 ,  G03F7/70775 ,  H02P6/006

摘要： A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.

摘要翻译： 用于确定相对于台架（220B）移动和定位平台（220A）的移动器组件（220C）的移动器（250A）的换向偏移的方法包括以闭环方式控制所述动子组件（220C） 以使台架（220A）沿着第一轴线并且沿着第二轴线保持台架（220A）的位置，台架（220A）悬浮在平台底座（220B）上方。 该方法还包括以下步骤：（i）将电流引导到移动器组件（220C）的线圈阵列（240），使得移动器组件（220C）在平台（220A）上施加干扰; 以及（ii）评估由所述移动器组件（220C）产生的由所述移动器（250A）产生的所述平台（220A）上的干扰所产生的一个或多个力。 此外，用于产生补偿图（1402）的方法包括将多个激励信号顺序地引导到移动器组件（220C）的控制，并且确定由多个激励信号产生的控制命令。

公开(公告)号：US20100156198A1

公开(公告)日：2010-06-24

申请号：US12643888

申请日：2009-12-21

申请人： Alexander Cooper ,  Scott Coakley ,  Douglas C. Watson ,  Alton H. Phillips ,  Gaurav Keswani ,  Michael B. Binnard

发明人： Alexander Cooper ,  Scott Coakley ,  Douglas C. Watson ,  Alton H. Phillips ,  Gaurav Keswani ,  Michael B. Binnard

IPC分类号： H02K9/20 ,  H02K41/03

CPC分类号： G03F7/70858 ,  G03F7/70758 ,  H02K9/19 ,  H02K9/20 ,  H02K41/031 ,  H02K2201/18

摘要： According to one aspect of the present invention, a motor arrangement includes at least one coil, a cover plate, and a shield layer. The at least one coil has a first side and a second side. The cover plate is positioned substantially over the first side of the at least one coil at a distance from the at least one coil. The shield layer is positioned between the first side of the at least one coil and the cover plate, and has a top surface. The top surface contacts the cover plate, and includes a liquid and a gas that form a mixture and cause the top surface to have a substantially constant temperature.

摘要翻译： 根据本发明的一个方面，电动机装置包括至少一个线圈，盖板和屏蔽层。 该至少一个线圈具有第一侧和第二侧。 覆盖板基本上位于距离至少一个线圈一定距离的至少一个线圈的第一侧上方。 屏蔽层位于至少一个线圈的第一侧和盖板之间，并具有顶面。 顶表面接触盖板，并且包括形成混合物的液体和气体，并使顶表面具有基本恒定的温度。

公开(公告)号：US08705222B2

公开(公告)日：2014-04-22

申请号：US12463496

申请日：2009-05-11

申请人： Scott Coakley ,  Michael B. Binnard

发明人： Scott Coakley ,  Michael B. Binnard

IPC分类号： H01H47/00

CPC分类号： G03F7/70858 ,  G03F7/70525 ,  G03F7/70758 ,  G03F7/7085 ,  H01F7/1844 ,  H01F2007/1866

摘要： Methods and apparatus for adjusting the amount of current provided to a magnetic actuator to compensate for a temperature change associated with the magnetic actuator are disclosed. According to one aspect of the present invention, an apparatus includes an actuator, which has at least one magnet and an associated force constant. The apparatus also includes a temperature sensing arrangement and a control arrangement, the temperature sensing arrangement being arranged to determine or measure a temperature of the magnet. The control arrangement adjusts the current provided to the actuator based on the temperature of the magnet. The current is adjusted to maintain a correct or desired force in light of temperature-induced variations to a force constant.

摘要翻译： 公开了用于调节提供给磁致动器以补偿与磁致动器相关联的温度变化的电流量的方法和装置。 根据本发明的一个方面，一种装置包括具有至少一个磁体和相关力常数的致动器。 该装置还包括温度感测装置和控制装置，温度感测装置被布置成确定或测量磁体的温度。 控制装置基于磁体的温度来调节提供给致动器的电流。 电流被调节以保持正确或期望的力，根据温度引起的变化为力常数。

公开(公告)号：US20130255414A1

公开(公告)日：2013-10-03

申请号：US13820553

申请日：2011-09-08

申请人： Matthew Parker-McCormick Bjork ,  Michael B. Binnard ,  Scott Coakley

发明人： Matthew Parker-McCormick Bjork ,  Michael B. Binnard ,  Scott Coakley

IPC分类号： F16H21/44

CPC分类号： F16H21/44 ,  G03F7/70716 ,  G03F7/70991 ,  Y10T74/18944

摘要： A stage apparatus includes at least one tube having a first section and a second section, the first section being coupled to a point of reference. The apparatus also includes at least one magnet, a precision stage, and a tube carrier. The precision stage is positioned at least partially over the at least one magnet, and has a first set of coils. The first set of coils cooperates with the at least one magnet to drive the precision stage. The tube carrier is at least partially positioned over the at least one magnet, and includes an end effector portion arranged to carry the second section, wherein the tube carrier further includes a second set of coils, the second set of coils being supported by the end effector portion and arranged to cooperate with the at least one magnet to control motion of the end effector portion.

摘要翻译： 舞台装置包括具有第一部分和第二部分的至少一个管子，第一部分联接到参考点。 该装置还包括至少一个磁体，精密级和管载体。 精密级至少部分地位于至少一个磁体上，并且具有第一组线圈。 第一组线圈与至少一个磁体配合以驱动精密级。 管载体至少部分地定位在至少一个磁体上方，并且包括布置成承载第二部分的末端执行器部分，其中管载体还包括第二组线圈，第二组线圈由端部 效应器部分并且布置成与所述至少一个磁体配合以控制末端执行器部分的运动。

公开(公告)号：US20100284119A1

公开(公告)日：2010-11-11

申请号：US12463496

申请日：2009-05-11

申请人： Scott Coakley ,  Michael B. Binnard

发明人： Scott Coakley ,  Michael B. Binnard

IPC分类号： H01H47/00

CPC分类号： G03F7/70858 ,  G03F7/70525 ,  G03F7/70758 ,  G03F7/7085 ,  H01F7/1844 ,  H01F2007/1866

摘要： Methods and apparatus for adjusting the amount of current provided to a magnetic actuator to compensate for a temperature change associated with the magnetic actuator are disclosed. According to one aspect of the present invention, an apparatus includes an actuator, which has at least one magnet and an associated force constant. The apparatus also includes a temperature sensing arrangement and a control arrangement, the temperature sensing arrangement being arranged to determine or measure a temperature of the magnet. The control arrangement adjusts the current provided to the actuator based on the temperature of the magnet. The current is adjusted to maintain a correct or desired force in light of temperature-induced variations to a force constant.

摘要翻译： 公开了用于调节提供给磁致动器以补偿与磁致动器相关联的温度变化的电流量的方法和装置。 根据本发明的一个方面，一种装置包括具有至少一个磁体和相关力常数的致动器。 该装置还包括温度感测装置和控制装置，温度感测装置被布置成确定或测量磁体的温度。 控制装置基于磁体的温度来调节提供给致动器的电流。 电流被调节以保持正确或期望的力，根据温度引起的变化为力常数。

公开(公告)号：US20080275661A1

公开(公告)日：2008-11-06

申请号：US11986314

申请日：2007-11-19

申请人： Pai-Hsueh Yang ,  Bausan Yuan ,  Kazuo Masaki ,  Kazuhiro Hirano ,  Xiao-Feng Yang ,  Scott Coakley ,  Michael B. Binnard

发明人： Pai-Hsueh Yang ,  Bausan Yuan ,  Kazuo Masaki ,  Kazuhiro Hirano ,  Xiao-Feng Yang ,  Scott Coakley ,  Michael B. Binnard

IPC分类号： G01L25/00

CPC分类号： G03F7/70758 ,  G03F7/70725

摘要： Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio. Multiple section compensation-ratios are assembled, as functions of displacement in the range, to provide a map of compensation ratios for the actuator(s) throughout the range.

摘要翻译： 公开了用于识别用于移动多轴平台的致动器中的力波动和/或侧向力的方法，装置和系统。 可以对所识别的力 - 纹波和/或侧向力进行映射，并且获得用于校正相应的位置相关的补偿比的映射。 这些方法对于使用多个（冗余）致动器在至少一个自由度中提供运动的阶段特别有用。 在示例性方法中，使用至少一个所选择的致动器，在主体致动器的运动范围内的设定距离上移动台架构件多次。 每个位移具有预定的轨迹和该范围内的相应起始点。 对于每个位移，提取相应的截面力命令并将其归一化为参考部分力命令以定义截面补偿比。 组合多段补偿比作为该范围内的位移的函数，以提供在整个范围内的致动器的补偿比的图。

公开(公告)号：US09529353B2

公开(公告)日：2016-12-27

申请号：US13228341

申请日：2011-09-08

申请人： Pai-Hsueh Yang ,  Michael B. Binnard ,  Scott Coakley

发明人： Pai-Hsueh Yang ,  Michael B. Binnard ,  Scott Coakley

IPC分类号： G03B27/58 ,  G03B27/62 ,  G05B19/404 ,  G03F7/20

CPC分类号： G05B19/404 ,  G03F7/70725 ,  G03F7/70766

摘要： An exemplary stage assembly has movable stage mass and counter-mass. A stage motor is coupled to the stage mass and counter-mass such that stage-mass motion imparted by the stage motor causes a reactive motion of the counter-mass counter to the motion of the stage mass. At least one trim-motor is coupled to the counter-mass. A control system commands the trim-motor to regulate movement of the counter-mass in reaction to stage-mass motion. A PI feedback controller receives the following-error of the counter-mass and generates corresponding center-of-gravity (CG) force commands and trim-motor force commands to the trim-motor(s) to produce corrective counter-mass motion. A trim-motor force limiter receives trim-motor force commands and produces corresponding limited trim-motor force commands that are fed back as actual CG force commands to the feedback controller to modify integral terms of the feedback controller according to the limited trim-motor force commands.

摘要翻译： 示例性的舞台组件具有可移动的舞台质量和反质量。 舞台电机被耦合到舞台质量和反质量，使得由舞台电动机施加的舞台质量运动导致反质量计数器对舞台质量的运动的反作用运动。 至少一个调整电机与反质量联接。 控制系统命令微调电机调节反质量运动反应阶段质量运动。 PI反馈控制器接收反质量的跟随误差，并产生相应的重心（CG）力指令和微调电机力指令给微调电机，以产生校正反质量运动。 修剪马达力限制器接收修剪马达力指令并产生相应的有限的修剪马达力命令，作为实际的CG力命令反馈到反馈控制器，以根据限制的修正马达力修改反馈控制器的积分项 命令。

公开(公告)号：US08853988B2

公开(公告)日：2014-10-07

申请号：US12406322

申请日：2009-03-18

申请人： Michael B. Binnard ,  Scott Coakley ,  Douglas C. Watson ,  Pai-Hsueh Yang

发明人： Michael B. Binnard ,  Scott Coakley ,  Douglas C. Watson ,  Pai-Hsueh Yang

IPC分类号： G05B1/06 ,  G05B19/404 ,  G03F7/20

CPC分类号： G05B19/404 ,  G03F7/70725 ,  G03F7/70758 ,  G05B2219/41128 ,  G05B2219/41443

摘要： Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.

摘要翻译： 本发明的实施例补偿了精密级装置中的级电动机的一个或多个效果。 前馈模块接收与电动机的效果相对应的输入信号，并产生可用于修改电动机控制信号以补偿电动机的影响的前馈控制信号。 在一些实施例中，提供控制系统以补偿由电动机产生的反电动势，而在其他实施例中，控制系统可以补偿电动机的感应效应。 本发明的实施例可用于精密平台装置，例如平版印刷装置，例如步进器和扫描器。

公开(公告)号：US08432072B2

公开(公告)日：2013-04-30

申请号：US12424878

申请日：2009-04-16

申请人： Scott Coakley ,  Michael B. Binnard

发明人： Scott Coakley ,  Michael B. Binnard

IPC分类号： H02K41/03 ,  G03B27/58 ,  G03F7/20

CPC分类号： H02K41/02 ,  G03B27/58 ,  G03F7/70758 ,  H02K41/03 ,  H02K2201/18

摘要： A mover (344) moving a stage (238) along a first axis, along a second axis and along a third axis includes a magnetic component (354), a conductor component (356), and a control system (324). The magnetic component (354) includes a plurality of magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354) in the magnetic field. Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356) to generate a controllable force along the first axis, a controllable force along the second axis, and a controllable force along the third axis. The conductor component (356) can include a split coil design, having a first conductor array (356A) and a second conductor array (356B) that is positioned substantially adjacent to the first conductor array (356A). The conductor component (356) and the magnetic component (354) can be displaced relative to each other along the third axis. The control system (324) independently directs current to each of the conductor arrays (356A, 356B) to generate a controllable force along the first axis, along the second axis, and along the third axis. With this design, the same mover can be used to move the stage along three degrees of freedom (“DOF”).

摘要翻译： 移动台（344）沿着第一轴线沿第二轴线和第三轴线移动台架（238）包括磁性部件（354），导体部件（356）和控制系统（324）。 磁性部件（354）包括由磁场包围的多个磁体（354D）。 导体部件（356）位于磁场附近的磁性部件（354）附近。 此外，当电流被引导到导体部件356时，导体部件356与磁性部件354相互作用，沿着第一轴线产生可控制的力，沿着第二轴线产生可控制的力， 第三轴。 导体部件（356）可以包括具有第一导体阵列（356A）和基本上邻近于第一导体阵列（356A）定位的第二导体阵列（356B）的分裂线圈设计。 导体部件（356）和磁性部件（354）可以相对于彼此沿第三轴线移位。 控制系统（324）独立地将电流引导到每个导体阵列（356A，356B），以沿着第一轴线，沿第二轴线以及第三轴线产生可控制的力。 通过这种设计，可以使用相同的推动器沿着三个自由度（“DOF”）移动舞台。

公开(公告)号：US09013134B2

公开(公告)日：2015-04-21

申请号：US13110760

申请日：2011-05-18

申请人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

发明人： Pai-Hsueh Yang ,  Scott Coakley ,  Michael B. Binnard ,  Kazuhiro Hirano ,  Bausan Yuan ,  Shiang-Lung Koo

IPC分类号： H02P1/26 ,  G03F7/20 ,  H02P6/00

CPC分类号： G03F7/70758 ,  G03F7/70516 ,  G03F7/70775 ,  H02P6/006

摘要： A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.

摘要翻译： 用于确定相对于台架（220B）移动和定位平台（220A）的移动器组件（220C）的移动器（250A）的换向偏移的方法包括以闭环方式控制所述动子组件（220C） 以使台架（220A）沿着第一轴线并且沿着第二轴线保持台架（220A）的位置，台架（220A）悬浮在平台底座（220B）上方。 该方法还包括以下步骤：（i）将电流引导到移动器组件（220C）的线圈阵列（240），使得移动器组件（220C）在平台（220A）上施加干扰; 以及（ii）评估由所述移动器组件（220C）产生的由所述移动器（250A）产生的所述平台（220A）上的干扰所产生的一个或多个力。 此外，用于产生补偿图（1402）的方法包括将多个激励信号顺序地引导到移动器组件（220C）的控制，并且确定由多个激励信号产生的控制命令。