公开(公告)号：US07951698B2

公开(公告)日：2011-05-31

申请号：US11947139

申请日：2007-11-29

申请人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  So Jeong Park ,  Gyu Tae Kim

发明人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  So Jeong Park ,  Gyu Tae Kim

IPC分类号： H01L45/00 ,  H01L21/00

CPC分类号： H01L21/76892 ,  H01L2221/1094

摘要： A method of fabricating an electronic device using nanowires, minimizing the number of E-beam processing steps and thus improving a yield, includes the steps of: forming electrodes on a substrate; depositing a plurality of nanowires on the substrate including the electrodes; capturing an image of the substrate including the nanowires and the electrodes; drawing virtual connection lines for connecting the nanowires with the electrodes on the image using an electrode pattern simulated through a computer program, after capturing the image; coating an E-beam photoresist on the substrate; removing the photoresist from regions corresponding to the virtual connection lines and the electrode pattern using E-beam lithography; depositing a metal layer on the substrate after removing the photoresist from the regions of the virtual connection lines; and removing remaining photoresist from the substrate using a lift-off process.

摘要翻译： 使用纳米线制造电子器件的方法，使电子束处理步骤的数量最小化并因此提高产量，包括以下步骤：在衬底上形成电极; 在包括电极的基板上沉积多个纳米线; 捕获包括纳米线和电极的衬底的图像; 绘制虚拟连接线，用于在捕获图像之后，使用通过计算机程序模拟的电极图案将纳米线与图像上的电极连接; 在基板上涂覆电子束光致抗蚀剂; 使用电子束光刻从与虚拟连接线对应的区域和电极图案中去除光致抗蚀剂; 在从虚拟连接线的区域去除光致抗蚀剂之后，在基板上沉积金属层; 以及使用剥离工艺从衬底去除剩余的光致抗蚀剂。

公开(公告)号：US07719760B2

公开(公告)日：2010-05-18

申请号：US11940379

申请日：2007-11-15

申请人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seook Park ,  Hyun Jin Ji

发明人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seook Park ,  Hyun Jin Ji

IPC分类号： G02B21/06

CPC分类号： G02B21/06 ,  G01N21/21 ,  G02B21/365 ,  G02B27/286 ,  Y10S977/881

摘要： Provided is an optical microscope system for detecting nanowires to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires and including: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires.

摘要翻译： 提供了一种用于检测纳米线的光学显微镜系统，以允许使用现有的光学显微镜来制造具有纳米线的电子器件，并且包括：用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜，用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机，用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换（FFT）的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。

公开(公告)号：US20090195869A1

公开(公告)日：2009-08-06

申请号：US11940379

申请日：2007-11-15

申请人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seok Park ,  Hyun Jin Ji

发明人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seok Park ,  Hyun Jin Ji

IPC分类号： G02B21/06 ,  G06K9/00

CPC分类号： G02B21/06 ,  G01N21/21 ,  G02B21/365 ,  G02B27/286 ,  Y10S977/881

摘要： Provided is an optical microscope system for detecting nanowires that is designed with a rotational polarizer and Fast Fourier Transform (FFT) to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires. The optical microscope system includes: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires. It is possible to obtain a distinct image of the nanowires having a nanometer line width by performing FFT on each pixel of reflected light images obtained at predetermined time intervals after light passing through the polarizer rotating in a predetermined period is incident on the nanowires.

摘要翻译： 提供了一种用于检测纳米线的光学显微镜系统，其被设计为具有旋转偏振器和快速傅里叶变换（FFT），以允许使用现有的光学显微镜来制造具有纳米线的电子器件。 光学显微镜系统包括：用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜，用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机，用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换（FFT）的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。 通过在经过预定时间内旋转的偏振片的光入射到纳米线上之后，以预定时间间隔获得的反射光图像的每个像素执行FFT，可以获得具有纳米线宽度的纳米线的不同图像。

公开(公告)号：US20080233675A1

公开(公告)日：2008-09-25

申请号：US11927881

申请日：2007-10-30

申请人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

发明人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

IPC分类号： H01L21/00

CPC分类号： H01L29/0673 ,  H01L21/76289 ,  H01L27/1225 ,  H01L29/0665 ,  H01L29/24 ,  H01L29/66969 ,  H01L29/7869 ,  Y10S977/762

摘要： Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer. Accordingly, even in an unparallel structure of nano-wires to electrode lines, a large scale nano-wire array is practicable and applicable to an integrated circuit or display unit with nano-wire alignment difficulty, as well as to device applications using flexible substrates.

摘要翻译： 提供一种制造纳米线阵列的方法，包括以下步骤：在衬底上沉积包含纳米线的纳米线溶液; 在衬底上形成带状的第一蚀刻区域，然后对纳米线进行构图; 形成彼此平行的漏极和源极电极线，其间插入图案化的纳米线; 形成多个漏电极，所述多个漏电极的一端连接到所述漏电极线并接触所述纳米线中的至少一个，并且形成多个源电极，所述多个源电极的一端连接到所述源电极线并接触所述纳米线， 接触漏电极的电线; 在所述漏极和源极电极之间形成第二蚀刻区域，以防止所述漏极和源极电极之间的电接触; 在所述基板上形成绝缘层; 以及在与绝缘层上的纳米线接触的漏极和源电极之间形成栅电极。 因此，即使在纳米线与电极线的不平行结构中，大规模的纳米线阵列也是可行的并且适用于具有纳米线对准困难的集成电路或显示单元以及使用柔性基板的器件应用。

公开(公告)号：US07846786B2

公开(公告)日：2010-12-07

申请号：US11927881

申请日：2007-10-30

申请人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

发明人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

IPC分类号： H01L21/00 ,  H01L21/16 ,  H01L29/06 ,  H01L27/088

CPC分类号： H01L29/0673 ,  H01L21/76289 ,  H01L27/1225 ,  H01L29/0665 ,  H01L29/24 ,  H01L29/66969 ,  H01L29/7869 ,  Y10S977/762

摘要： Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer. Accordingly, even in an unparallel structure of nano-wires to electrode lines, a large scale nano-wire array is practicable and applicable to an integrated circuit or display unit with nano-wire alignment difficulty, as well as to device applications using flexible substrates.

摘要翻译： 提供一种制造纳米线阵列的方法，包括以下步骤：在衬底上沉积包含纳米线的纳米线溶液; 在衬底上形成带状的第一蚀刻区域，然后对纳米线进行构图; 形成彼此平行的漏极和源极电极线，其间插入图案化的纳米线; 形成多个漏电极，所述多个漏电极的一端连接到所述漏电极线并接触所述纳米线中的至少一个，并且形成多个源电极，所述多个源电极的一端连接到所述源电极线并接触所述纳米线， 接触漏电极的电线; 在所述漏极和源极电极之间形成第二蚀刻区域，以防止所述漏极和源极电极之间的电接触; 在所述基板上形成绝缘层; 以及在与绝缘层上的纳米线接触的漏极和源电极之间形成栅电极。 因此，即使在纳米线与电极线的不平行结构中，大规模的纳米线阵列也是可行的并且适用于具有纳米线对准困难的集成电路或显示单元以及使用柔性基板的器件应用。

公开(公告)号：US07704382B2

公开(公告)日：2010-04-27

申请号：US11596195

申请日：2005-05-13

申请人： Young Bae Kang ,  Gyu Tae Kim ,  Tae Gyu Park

发明人： Young Bae Kang ,  Gyu Tae Kim ,  Tae Gyu Park

IPC分类号： B01D35/00 ,  B01D24/46 ,  B01D25/00 ,  B01D29/00

CPC分类号： B01D35/10 ,  B01D29/15 ,  B01D29/52 ,  B01D29/605 ,  B01D29/661 ,  B01D29/72 ,  B01D35/153 ,  B01D2201/087 ,  B01D2201/186

摘要： The present invention provides a gravity fiber filter, comprising: a filter tank placed in a portion of a large amount of running water; at least one unit filter disposed in the filter tank; a filtered water collecting tank disposed in a lower portion of the filter tank; a discharging pipe extended from the filtered water collecting tank to the height lower than a influent inlet of the filter tank, so that the height of the extended discharging pipe is defined as a height of starting filtration; a sensor; a air inflow pipe through which a backwash air flows in from outside to a lower portion of the filter tank; a control means controlling the operation of filtering and backwashing; and backwash water discharging pipe.

摘要翻译： 本发明提供一种重力纤维过滤器，其特征在于，包括：放置在大量自来水的一部分中的过滤罐; 设置在所述过滤罐中的至少一个单元过滤器; 过滤水收集罐，设置在过滤罐的下部; 排出管从过滤水收集箱延伸到低于过滤罐的流入口的高度，使得延长排出管的高度被定义为起始过滤的高度; 传感器 反冲洗空气从外部流入过滤罐的下部的空气流入管; 控制装置控制过滤和反冲洗的操作; 并回水排水管。

公开(公告)号：US06784779B2

公开(公告)日：2004-08-31

申请号：US09888559

申请日：2001-06-26

申请人： Jin Koog Shin ,  Gyu Tae Kim ,  Hak Su Kim

发明人： Jin Koog Shin ,  Gyu Tae Kim ,  Hak Su Kim

IPC分类号： H01F500

CPC分类号： H01F17/0006 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  D01F9/127 ,  Y10S977/932

摘要： Disclosed is an inductor, which employs carbon nanotubes and/or carbon nanofibers synthesized in a shape of coils, so that the inductor has a high inductance even in a minute circuit of a nano-size or a micro-size. The inductor may have a carbon nanotube and/or carbon nanofiber synthesized in a shape of a coil, in which the carbon nanotube and/or carbon nanofiber is synthesized between catalysts fixed at desired locations on

摘要翻译： 公开了一种电感器，其采用以线圈形式合成的碳纳米管和/或碳纳米纤维，使得即使在纳米尺寸或微尺寸的微小电路中，电感器也具有高电感。 电感器可以具有以线圈形式合成的碳纳米管和/或碳纳米纤维，其中碳纳米管和/或碳纳米纤维在固定在期望位置上的催化剂之间合成

公开(公告)号：US20110101476A1

公开(公告)日：2011-05-05

申请号：US12700464

申请日：2010-02-04

申请人： Gyu Tae Kim ,  Kang Ho Lee ,  Hye Young Kim ,  Kyung Jin Lee ,  Woun Kang

发明人： Gyu Tae Kim ,  Kang Ho Lee ,  Hye Young Kim ,  Kyung Jin Lee ,  Woun Kang

IPC分类号： H01L29/82 ,  H01L21/02

CPC分类号： H01L27/222 ,  H01L43/12

摘要： Provided are an electronic device, a memory device, and a method of fabricating the devices for preventing physical distortion of functional elements from generating and improving electric contact properties between the functional elements and electric elements connecting to the functional elements. At least two grooves are formed in a substrate, and a conductive material is filled in the grooves to obtain electric elements having a surface at the same height as that of the substrate. In addition, a functional material layer (functional layer) is formed on an entire upper surface of the substrate and is patterned so as to obtain a functional element having both bottom surfaces contacting the electric elements.

摘要翻译： 提供一种电子设备，存储器件和制造用于防止功能元件的物理失真的器件的产生和改善功能元件与连接到功能元件的电气元件之间的电接触性能的方法。 在衬底中形成至少两个沟槽，并且在沟槽中填充导电材料以获得具有与衬底相同高度的表面的电气元件。 此外，在基板的整个上表面上形成功能材料层（功能层），并对其进行图案化以获得具有与电气元件接触的两个底面的功能元件。

公开(公告)号：US20100314309A1

公开(公告)日：2010-12-16

申请号：US12747823

申请日：2008-07-08

申请人： Young Bae Kang ,  Gyu Tae Kim

发明人： Young Bae Kang ,  Gyu Tae Kim

IPC分类号： B01D33/01 ,  C02F1/00

CPC分类号： B01D35/10 ,  B01D29/114 ,  B01D29/66 ,  B01D2201/186

摘要： A lift type pore-controllable fiber filter includes a filter tank, a strainer coaxially formed as a porous tub in the filter tank, extending to an outside of the filter tank at a bottom thereof to communicate with a treated water drain pipe, and having a piston guide recessed in an axial direction at an upper portion thereof, a lifting driver including a cylinder and a piston, an upper filter material fixing plate having fixing means, fixed to the piston above the strainer, and working in collaboration with reciprocation of the piston, a lower filter material fixing plate having fixing means and fixed below the strainer, and at least one fiber filter material fixed to the fixing means of the upper and lower filter material fixing plates at upper and lower ends thereof respectively, and forming filtering pore layers on an outer circumference of the strainer.

摘要翻译： 升降式孔径可控纤维过滤器包括过滤罐，在过滤罐中同轴地形成为多孔桶的过滤器，其底部延伸到过滤罐的外部，与经处理的排水管连通，并具有 活塞导向件在其上部在轴向方向上凹陷，提升驱动器包括气缸和活塞，具有固定装置的上部过滤材料固定板，固定到过滤器上方的活塞，并且与活塞的往复运动协同工作 具有固定装置并固定在过滤器下方的下过滤材料固定板，以及分别固定在上，下过滤材料固定板的固定装置上的至少一个纤维过滤材料，并形成过滤孔层 在过滤器的外圆周上。

公开(公告)号：US08426935B2

公开(公告)日：2013-04-23

申请号：US12700464

申请日：2010-02-04

申请人： Gyu Tae Kim ,  Kang Ho Lee ,  Hye Young Kim ,  Kyung Jin Lee ,  Woun Kang

发明人： Gyu Tae Kim ,  Kang Ho Lee ,  Hye Young Kim ,  Kyung Jin Lee ,  Woun Kang

IPC分类号： H01L29/82 ,  H01L21/02

CPC分类号： H01L27/222 ,  H01L43/12

摘要： Provided are an electronic device, a memory device, and a method of fabricating the devices for preventing physical distortion of functional elements from generating and improving electric contact properties between the functional elements and electric elements connecting to the functional elements. At least two grooves are formed in a substrate, and a conductive material is filled in the grooves to obtain electric elements having a surface at the same height as that of the substrate. In addition, a functional material layer (functional layer) is formed on an entire upper surface of the substrate and is patterned so as to obtain a functional element having both bottom surfaces contacting the electric elements.

摘要翻译： 提供一种电子设备，存储器件和制造用于防止功能元件的物理失真的器件的产生和改善功能元件与连接到功能元件的电气元件之间的电接触性能的方法。 在衬底中形成至少两个沟槽，并且在沟槽中填充导电材料以获得具有与衬底相同高度的表面的电气元件。 此外，在基板的整个上表面上形成功能材料层（功能层），并对其进行图案化以获得具有与电气元件接触的两个底面的功能元件。