公开(公告)号：US07719760B2

公开(公告)日：2010-05-18

申请号：US11940379

申请日：2007-11-15

申请人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seook Park ,  Hyun Jin Ji

发明人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seook Park ,  Hyun Jin Ji

IPC分类号： G02B21/06

CPC分类号： G02B21/06 ,  G01N21/21 ,  G02B21/365 ,  G02B27/286 ,  Y10S977/881

摘要： Provided is an optical microscope system for detecting nanowires to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires and including: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires.

摘要翻译： 提供了一种用于检测纳米线的光学显微镜系统，以允许使用现有的光学显微镜来制造具有纳米线的电子器件，并且包括：用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜，用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机，用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换（FFT）的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。

公开(公告)号：US20090195869A1

公开(公告)日：2009-08-06

申请号：US11940379

申请日：2007-11-15

申请人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seok Park ,  Hyun Jin Ji

发明人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seok Park ,  Hyun Jin Ji

IPC分类号： G02B21/06 ,  G06K9/00

CPC分类号： G02B21/06 ,  G01N21/21 ,  G02B21/365 ,  G02B27/286 ,  Y10S977/881

摘要： Provided is an optical microscope system for detecting nanowires that is designed with a rotational polarizer and Fast Fourier Transform (FFT) to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires. The optical microscope system includes: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires. It is possible to obtain a distinct image of the nanowires having a nanometer line width by performing FFT on each pixel of reflected light images obtained at predetermined time intervals after light passing through the polarizer rotating in a predetermined period is incident on the nanowires.

摘要翻译： 提供了一种用于检测纳米线的光学显微镜系统，其被设计为具有旋转偏振器和快速傅里叶变换（FFT），以允许使用现有的光学显微镜来制造具有纳米线的电子器件。 光学显微镜系统包括：用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜，用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机，用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换（FFT）的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。 通过在经过预定时间内旋转的偏振片的光入射到纳米线上之后，以预定时间间隔获得的反射光图像的每个像素执行FFT，可以获得具有纳米线宽度的纳米线的不同图像。

公开(公告)号：US07951698B2

公开(公告)日：2011-05-31

申请号：US11947139

申请日：2007-11-29

申请人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  So Jeong Park ,  Gyu Tae Kim

发明人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  So Jeong Park ,  Gyu Tae Kim

IPC分类号： H01L45/00 ,  H01L21/00

CPC分类号： H01L21/76892 ,  H01L2221/1094

摘要： A method of fabricating an electronic device using nanowires, minimizing the number of E-beam processing steps and thus improving a yield, includes the steps of: forming electrodes on a substrate; depositing a plurality of nanowires on the substrate including the electrodes; capturing an image of the substrate including the nanowires and the electrodes; drawing virtual connection lines for connecting the nanowires with the electrodes on the image using an electrode pattern simulated through a computer program, after capturing the image; coating an E-beam photoresist on the substrate; removing the photoresist from regions corresponding to the virtual connection lines and the electrode pattern using E-beam lithography; depositing a metal layer on the substrate after removing the photoresist from the regions of the virtual connection lines; and removing remaining photoresist from the substrate using a lift-off process.

摘要翻译： 使用纳米线制造电子器件的方法，使电子束处理步骤的数量最小化并因此提高产量，包括以下步骤：在衬底上形成电极; 在包括电极的基板上沉积多个纳米线; 捕获包括纳米线和电极的衬底的图像; 绘制虚拟连接线，用于在捕获图像之后，使用通过计算机程序模拟的电极图案将纳米线与图像上的电极连接; 在基板上涂覆电子束光致抗蚀剂; 使用电子束光刻从与虚拟连接线对应的区域和电极图案中去除光致抗蚀剂; 在从虚拟连接线的区域去除光致抗蚀剂之后，在基板上沉积金属层; 以及使用剥离工艺从衬底去除剩余的光致抗蚀剂。

公开(公告)号：US07846786B2

公开(公告)日：2010-12-07

申请号：US11927881

申请日：2007-10-30

申请人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

发明人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

IPC分类号： H01L21/00 ,  H01L21/16 ,  H01L29/06 ,  H01L27/088

CPC分类号： H01L29/0673 ,  H01L21/76289 ,  H01L27/1225 ,  H01L29/0665 ,  H01L29/24 ,  H01L29/66969 ,  H01L29/7869 ,  Y10S977/762

摘要： Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer. Accordingly, even in an unparallel structure of nano-wires to electrode lines, a large scale nano-wire array is practicable and applicable to an integrated circuit or display unit with nano-wire alignment difficulty, as well as to device applications using flexible substrates.

摘要翻译： 提供一种制造纳米线阵列的方法，包括以下步骤：在衬底上沉积包含纳米线的纳米线溶液; 在衬底上形成带状的第一蚀刻区域，然后对纳米线进行构图; 形成彼此平行的漏极和源极电极线，其间插入图案化的纳米线; 形成多个漏电极，所述多个漏电极的一端连接到所述漏电极线并接触所述纳米线中的至少一个，并且形成多个源电极，所述多个源电极的一端连接到所述源电极线并接触所述纳米线， 接触漏电极的电线; 在所述漏极和源极电极之间形成第二蚀刻区域，以防止所述漏极和源极电极之间的电接触; 在所述基板上形成绝缘层; 以及在与绝缘层上的纳米线接触的漏极和源电极之间形成栅电极。 因此，即使在纳米线与电极线的不平行结构中，大规模的纳米线阵列也是可行的并且适用于具有纳米线对准困难的集成电路或显示单元以及使用柔性基板的器件应用。

公开(公告)号：US20080233675A1

公开(公告)日：2008-09-25

申请号：US11927881

申请日：2007-10-30

申请人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

发明人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

IPC分类号： H01L21/00

CPC分类号： H01L29/0673 ,  H01L21/76289 ,  H01L27/1225 ,  H01L29/0665 ,  H01L29/24 ,  H01L29/66969 ,  H01L29/7869 ,  Y10S977/762

摘要： Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer. Accordingly, even in an unparallel structure of nano-wires to electrode lines, a large scale nano-wire array is practicable and applicable to an integrated circuit or display unit with nano-wire alignment difficulty, as well as to device applications using flexible substrates.

摘要翻译： 提供一种制造纳米线阵列的方法，包括以下步骤：在衬底上沉积包含纳米线的纳米线溶液; 在衬底上形成带状的第一蚀刻区域，然后对纳米线进行构图; 形成彼此平行的漏极和源极电极线，其间插入图案化的纳米线; 形成多个漏电极，所述多个漏电极的一端连接到所述漏电极线并接触所述纳米线中的至少一个，并且形成多个源电极，所述多个源电极的一端连接到所述源电极线并接触所述纳米线， 接触漏电极的电线; 在所述漏极和源极电极之间形成第二蚀刻区域，以防止所述漏极和源极电极之间的电接触; 在所述基板上形成绝缘层; 以及在与绝缘层上的纳米线接触的漏极和源电极之间形成栅电极。 因此，即使在纳米线与电极线的不平行结构中，大规模的纳米线阵列也是可行的并且适用于具有纳米线对准困难的集成电路或显示单元以及使用柔性基板的器件应用。

公开(公告)号：US08150318B2

公开(公告)日：2012-04-03

申请号：US12195176

申请日：2008-08-20

申请人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim

发明人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim

IPC分类号： H04B7/00

CPC分类号： H04R1/10 ,  G01N27/4045 ,  H04R2225/41 ,  H04R2420/07 ,  Y10S379/908

摘要： Provided are an apparatus for collecting environmental data and a method of monitoring an environment in real time. The apparatus for collecting environmental data includes a receiver for receiving an environmental data collection command from outside, a headset controller for interpreting the environmental data collection command received from the receiver, and distinguishing an audio signal received from outside from the environmental data collection command, the environment sensor unit for collecting environmental data according to the environmental data collection command interpreted from the headset controller, and a transmitter for transmitting the environmental data collected by the environment sensor unit.

摘要翻译： 提供了一种用于收集环境数据的装置和实时监测环境的方法。 用于收集环境数据的装置包括用于从外部接收环境数据收集命令的接收器，用于解释从接收器接收的环境数据收集命令的耳机控制器，并且将从外部接收的音频信号与环境数据收集命令区分开， 环境传感器单元，用于根据从耳机控制器解释的环境数据收集命令收集环境数据;以及发射器，用于发送由环境传感器单元收集的环境数据。

公开(公告)号：US20090061772A1

公开(公告)日：2009-03-05

申请号：US12195176

申请日：2008-08-20

申请人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim

发明人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim

IPC分类号： H04M1/00 ,  H04B7/00 ,  G08B21/00

CPC分类号： H04R1/10 ,  G01N27/4045 ,  H04R2225/41 ,  H04R2420/07 ,  Y10S379/908

摘要： Provided are an apparatus for collecting environmental data and a method of monitoring an environment in real time. The apparatus for collecting environmental data includes a receiver for receiving an environmental data collection command from outside, a headset controller for interpreting the environmental data collection command received from the receiver, and distinguishing an audio signal received from outside from the environmental data collection command, the environment sensor unit for collecting environmental data according to the environmental data collection command interpreted from the headset controller, and a transmitter for transmitting the environmental data collected by the environment sensor unit.

摘要翻译： 提供了一种用于收集环境数据的装置和实时监测环境的方法。 用于收集环境数据的装置包括用于从外部接收环境数据收集命令的接收器，用于解释从接收器接收的环境数据收集命令的耳机控制器，并且将从外部接收的音频信号与环境数据收集命令区分开， 环境传感器单元，用于根据从耳机控制器解释的环境数据收集命令收集环境数据;以及发射器，用于发送由环境传感器单元收集的环境数据。

公开(公告)号：US20110138882A1

公开(公告)日：2011-06-16

申请号：US12965433

申请日：2010-12-10

申请人： Seung Eon Moon ,  Jong Hyurk Park ,  Jae Woo Lee ,  Hong Yeol Lee ,  Kang Ho Park ,  Jong Dae Kim

发明人： Seung Eon Moon ,  Jong Hyurk Park ,  Jae Woo Lee ,  Hong Yeol Lee ,  Kang Ho Park ,  Jong Dae Kim

IPC分类号： G01N33/00 ,  H01L21/368 ,  B82Y15/00

CPC分类号： G01N27/12

摘要： Provided are a structure and operating method of a semiconductor gas sensor having low power consumption. The semiconductor gas sensor is adapted to adsorb gas to a low-dimensional semiconductor nanomaterial at room temperature, output a change in resistance of the low-dimensional semiconductor nanomaterial, apply power to a heater, desorb the gas adsorbed to the low-dimensional semiconductor nanomaterial, and return the resistance of the low-dimensional semiconductor nanomaterial back to initial resistance. The semiconductor gas sensor senses the gas at room temperature using the low-dimensional semiconductor nanomaterial having a high-sensitivity characteristic at room temperature, and drives the heater only when the adsorbed gas is desorbed. Thereby, it is possible to improve a gas sensing characteristic, reduce power consumption, and provide a rapid response speed.

摘要翻译： 提供具有低功耗的半导体气体传感器的结构和操作方法。 半导体气体传感器适于在室温下将气体吸附到低维半导体纳米材料上，输出低维半导体纳米材料的电阻变化，向加热器施加电力，解吸吸附在低维半导体纳米材料上的气体 ，并将低维半导体纳米材料的电阻恢复到初始电阻。 半导体气体传感器使用在室温下具有高灵敏度特性的低维半导体纳米材料在室温下感测气体，仅在吸附气体解吸时驱动加热器。 由此，能够提高气体感测特性，降低功耗，提供快速的响应速度。

公开(公告)号：US20100170888A1

公开(公告)日：2010-07-08

申请号：US12547375

申请日：2009-08-25

申请人： Hong Yeol LEE ,  Seung Eon Moon ,  Jong Hyurk Park ,  Jun Hyuk Kwak ,  So Jeong Park ,  Kang Ho Park ,  Jong Dae Kim

发明人： Hong Yeol LEE ,  Seung Eon Moon ,  Jong Hyurk Park ,  Jun Hyuk Kwak ,  So Jeong Park ,  Kang Ho Park ,  Jong Dae Kim

IPC分类号： H05B3/02 ,  H01C17/02 ,  G01K13/00

CPC分类号： H05B3/02 ,  G01N27/128 ,  Y10T29/49083

摘要： Provided is a micro heater, which includes an elastic thin film formed by sequentially depositing a first silicon oxide layer, a silicon nitride layer and a second silicon oxide layer, a heating part, a heat spreading structure and a heating part electrode, which are patterned on the elastic thin film, and an insulating layer formed on the heating part, the heat spreading structure and the heating part electrode. Here, the heat spreading structure is perpendicularly connected to the heating part at a connection portion.

摘要翻译： 提供了一种微加热器，其包括通过顺序地沉积第一氧化硅层，氮化硅层和第二氧化硅层形成的弹性薄膜，加热部分，散热结构和加热部分电极，其被图案化 弹性薄膜上形成的绝缘层，加热部分上形成的绝缘层，散热结构和加热部分电极。 这里，散热结构在连接部垂直地与加热部连接。

公开(公告)号：US20110057458A1

公开(公告)日：2011-03-10

申请号：US12652177

申请日：2010-01-05

申请人： Sang Kyun LEE ,  Seung Eon Moon ,  Yil Suk Yang ,  Kang Ho Park ,  Jong Dae Kim

发明人： Sang Kyun LEE ,  Seung Eon Moon ,  Yil Suk Yang ,  Kang Ho Park ,  Jong Dae Kim

IPC分类号： F03G7/08 ,  H02N2/18 ,  H01L41/22 ,  H02K15/00

CPC分类号： H01L41/00 ,  H01L41/1136 ,  H01L41/125 ,  Y10T29/42 ,  Y10T29/49009

摘要： Provided are a piezoelectric energy harvester and a method of manufacturing the same. The piezoelectric energy harvester is configured to obtain primary voltage from a piezoelectric layer vibrated to generate voltage and secondary voltage from a magnetostrictive layer vibrated to induce a change in magnetic field and a coil surrounding the magnetostrictive layer. Thus, it is possible to obtain sufficient voltage to drive a power conditioning circuit (PCC).

摘要翻译： 提供一种压电式能量收集器及其制造方法。 压电能量收集器被配置为从振动的压电层获得初级电压，以产生振动的磁致伸缩层的电压和二次电压，以引起磁场的变化和围绕磁致伸缩层的线圈。 因此，可以获得足够的电压来驱动功率调节电路（PCC）。