公开(公告)号：US20090086211A1

公开(公告)日：2009-04-02

申请号：US12229128

申请日：2008-08-19

申请人： Shinichi Dosaka ,  Yoshimasa Suzuki

发明人： Shinichi Dosaka ,  Yoshimasa Suzuki

IPC分类号： G01N21/55 ,  G01N21/17

CPC分类号： G01N21/43 ,  G01N21/553

摘要： In optical measurement utilizing total reflection, various types of measurement are selectively performed. The invention provides an optical measurement apparatus using total reflection, including a light source, a measurement optical system, and a light detector. The measurement optical system is an infinity-corrected positive lens formed of an optical member having a planar surface orthogonal to an optical axis of the measurement optical system at a front focal position. One side of the optical axis of the measurement optical system is used as a projection optical system for radiating measurement light onto a specimen, and another side is used as a photometric optical system for acquiring reflected light from the specimen. The light source is disposed at an entrance pupil position on the projection optical system side or at a position conjugate to the entrance pupil position and moves in an entrance pupil plane or in a plane conjugate to the entrance pupil position, along a straight line orthogonal to the optical axis, while a distance from the optical axis is detected. The light detector is disposed at an exit pupil position on the photometric optical system side or at a position conjugate to the exit pupil position. The optical-measurement apparatus comprises a light-source changing unit configured to change the position or shape of the light source.

摘要翻译： 在使用全反射的光学测量中，选择性地执行各种类型的测量。 本发明提供一种使用全反射的光学测量装置，包括光源，测量光学系统和光检测器。 测量光学系统是由在前焦点位置处具有与测量光学系统的光轴正交的平面的光学构件形成的无穷大校正正透镜。 将测量光学系统的光轴的一侧用作用于将测量光照射到样本上的投影光学系统，另一侧用作用于获取来自样本的反射光的光度测量系统。 光源设置在投影光学系统侧的入射光瞳位置或与入射光瞳位置共轭的位置处，并且沿与入射光瞳位置共轭的平面沿着垂直于入射光瞳位置的直线移动 同时检测与光轴的距离。 光检测器设置在测光光学系统侧的出射光瞳位置或与出射光瞳位置共轭的位置。 光学测量装置包括被配置为改变光源的位置或形状的光源改变单元。

公开(公告)号：US07570362B2

公开(公告)日：2009-08-04

申请号：US12229128

申请日：2008-08-19

申请人： Shinichi Dosaka ,  Yoshimasa Suzuki

发明人： Shinichi Dosaka ,  Yoshimasa Suzuki

IPC分类号： G01N21/55 ,  G01N21/41

CPC分类号： G01N21/43 ,  G01N21/553

摘要： In optical measurement utilizing total reflection, various types of measurement are selectively performed. The invention provides an optical measurement apparatus using total reflection, including a light source, a measurement optical system, and a light detector. The measurement optical system is an infinity-corrected positive lens formed of an optical member having a planar surface orthogonal to an optical axis of the measurement optical system at a front focal position. One side of the optical axis of the measurement optical system is used as a projection optical system for radiating measurement light onto a specimen, and another side is used as a photometric optical system for acquiring reflected light from the specimen. The light source is disposed at an entrance pupil position on the projection optical system side or at a position conjugate to the entrance pupil position and moves in an entrance pupil plane or in a plane conjugate to the entrance pupil position, along a straight line orthogonal to the optical axis, while a distance from the optical axis is detected. The light detector is disposed at an exit pupil position on the photometric optical system side or at a position conjugate to the exit pupil position. The optical-measurement apparatus comprises a light-source changing unit configured to change the position or shape of the light source.

摘要翻译： 在使用全反射的光学测量中，选择性地执行各种类型的测量。 本发明提供一种使用全反射的光学测量装置，包括光源，测量光学系统和光检测器。 测量光学系统是由在前焦点位置处具有与测量光学系统的光轴正交的平面的光学构件形成的无穷大校正正透镜。 将测量光学系统的光轴的一侧用作用于将测量光照射到样本上的投影光学系统，另一侧用作用于获取来自样本的反射光的光度测量系统。 光源设置在投影光学系统侧的入射光瞳位置或与入射光瞳位置共轭的位置处，并且沿与入射光瞳位置共轭的平面沿着垂直于入射光瞳位置的直线移动 同时检测与光轴的距离。 光检测器设置在测光光学系统侧的出射光瞳位置或与出射光瞳位置共轭的位置。 光学测量装置包括被配置为改变光源的位置或形状的光源改变单元。

公开(公告)号：US07630065B2

公开(公告)日：2009-12-08

申请号：US11884822

申请日：2006-02-16

申请人： Hirobumi Suzuki ,  Shinichi Dosaka

发明人： Hirobumi Suzuki ,  Shinichi Dosaka

IPC分类号： G02B21/36 ,  G01N21/64 ,  G01N21/00

CPC分类号： G02B21/361 ,  G02B13/22 ,  G02B21/16 ,  H04N5/2254

摘要： In order to be able to take an image of a specimen emitting low light in a short exposure time by a cooled CCD at about 0° C., a low-light specimen image pickup unit has an imaging optical system forming a specimen image of a specimen having a point light source emitting a low light, and the low-light specimen image pickup unit further has an image pickup unit having a plurality of pixels receiving incident light, for taking an image corresponding to the specimen image. In the low-light specimen image pickup unit, the imaging optical system is telecentric to a side of the specimen image of the imaging optical system, and condenses the low light emitted from the point light source to form an Airy disk of a size which is substantially the same as a pixel of the pixels, or which is smaller than the pixel. Here, the pixel receives the low light emitted from the point light source.

摘要翻译： 为了能够在约0℃下通过冷却的CCD拍摄在短曝光时间内发射低光的样本的图像，低光标本图像拾取单元具有成像光学系统，其形成一个 具有发射低光的点光源的样本，并且所述低光标本摄像单元还具有具有接收入射光的多个像素的摄像单元，用于拍摄与所述标本图像相对应的图像。 在低光标本摄像单元中，成像光学系统对成像光学系统的样本图像的一侧是远心的，并且将从点光源发射的低光会聚，形成尺寸为 基本上与像素的像素相同，或者小于像素。 这里，像素接收从点光源发出的低光。

公开(公告)号：US5303082A

公开(公告)日：1994-04-12

申请号：US860424

申请日：1992-03-30

申请人： Hideki Obuchi ,  Akira Watanabe ,  Shinichi Dosaka

发明人： Hideki Obuchi ,  Akira Watanabe ,  Shinichi Dosaka

IPC分类号： G02B21/20 ,  G02B21/22 ,  G02B21/06 ,  G02B21/36

CPC分类号： G02B21/22

摘要： A stereomicroscope comprising a pair of observation systems each comprising an objective lens and an eyepiece lens, a pair of light sources disposed above the objective lens for emitting a pair of light beams through a pair of beam splitters into the observation systems coaxially therewith, pairs of polarizers disposed on the side of the eyepiece lenses and the side of the light sources respectively so as to have polarizing surfaces perpendicular to each other, a quarter wavelength plate interposed between the objective lens and a sample to be observed, and a pair of light beam deflecting members disposed between the beam splitters and the objective lens. The polarizers disposed on the side of the eyepiece lenses are removable from optical paths and eyepiece tubes are arranged with the polarizers disposed on the side of the eyepiece lenses interposed between the eyepiece tubes and an intermediate tube containing the pair of light beam deflecting members and the polarizers disposed on the side of the eyepiece lenses. This stereomicroscope permits locating eye points thereof at low positions close to microscopists and quickly switching microscopic modes from one to another.

摘要翻译： 一种立体显微镜，包括一对观察系统，每个观察系统均包括物镜和目镜，一对光源，设置在物镜上方，用于将一对光束通过一对分束器同时发射到观察系统中，成对的 偏振器分别设置在目镜透镜侧和光源侧，以便具有彼此垂直的偏振面，夹在物镜和被观察样品之间的四分之一波长板，以及一对光束 设置在分束器和物镜之间的偏转构件。 配置在目镜透镜侧面的偏振器可从光路上移除，并且目镜管布置有偏振器，该偏光器设置在目镜之间，夹在目镜管之间并包含一对光束偏转构件的中间管和 设置在目镜透镜侧面的偏振器。 该立体显微镜允许将其眼点定位在靠近显微镜的低位置处，并且将微观模式从一个快速切换到另一个。

公开(公告)号：US07684031B2

公开(公告)日：2010-03-23

申请号：US11977880

申请日：2007-10-26

申请人： Atsutoshi Yokota ,  Hiroyasu Hebiishi ,  Shinichi Dosaka

发明人： Atsutoshi Yokota ,  Hiroyasu Hebiishi ,  Shinichi Dosaka

IPC分类号： G01N21/00

CPC分类号： G01N21/9503

摘要： This visual inspection apparatus has a macro-inspection section and a micro-inspection section. In the micro-inspection section, a inspection stage and a microscope are loaded into a loading plate. The inspection stage can be moved in any directions of the X, Y, and Z directions, and can also be rotated in the θ direction. Moreover, a peripheral edge inspection section that acquires an enlarged image of a peripheral edge of wafer W is fixed to the loading plate. The peripheral edge inspection section is arranged so as to image the peripheral edge of wafer W held by the inspection stage.

摘要翻译： 该目视检查装置具有宏观检查部和微检查部。 在微检查部中，将检查台和显微镜装载到装载板中。 检查台可以在X，Y和Z方向的任何方向上移动，也可以在＆thetas中旋转; 方向。 此外，获取晶片W的周缘的放大图像的周缘检查部固定在装载板上。 周缘检查部被配置成对由检查台保持的晶片W的周缘进行成像。

公开(公告)号：US06956229B2

公开(公告)日：2005-10-18

申请号：US10724242

申请日：2003-11-28

申请人： Shinichi Dosaka ,  Seiji Kondo ,  Sachiko Karaki ,  Yoko Ohashi

发明人： Shinichi Dosaka ,  Seiji Kondo ,  Sachiko Karaki ,  Yoko Ohashi

IPC分类号： G01N21/64 ,  G01N33/53 ,  G01N33/566 ,  G01N37/00 ,  G01N15/06

CPC分类号： G01N21/6452 ,  G01N21/6456 ,  G01N2021/6439 ,  G01N2021/6478

摘要： A fluorescence reader of the present invention detects fluorescence from a sample present on a carrier or in a solution, and the fluorescence reader includes a light source which radiates parallel light, a projection lens which converges the light from the light source, an objective lens which irradiates the sample with the light converged in a rear-side focal position, an image forming lens which forms fluorescence emitted from the sample and passed through the objective lens into an image, a light receiving pinhole disposed in an image forming position of the image forming lens, and detector which detects the fluorescence passed through the light receiving pinhole.

摘要翻译： 本发明的荧光读取器从存在于载体或溶液中的样品检测荧光，并且荧光读取器包括辐射平行光的光源，会聚来自光源的光的投影透镜，物镜 用会聚在后侧聚焦位置的光照射样品，形成从样品发出的荧光并透过物镜的图像形成透镜成为图像，设置在图像形成位置的图像形成位置的受光针孔 透镜和检测器，其检测通过光接收针孔的荧光。

公开(公告)号：US4533220A

公开(公告)日：1985-08-06

申请号：US491326

申请日：1983-04-11

申请人： Hiroyuki Kurita ,  Yuko Kobayashi ,  Shinichi Dosaka ,  Juro Kikuchi ,  Hiroshi Takase ,  Kenichi Harada

发明人： Hiroyuki Kurita ,  Yuko Kobayashi ,  Shinichi Dosaka ,  Juro Kikuchi ,  Hiroshi Takase ,  Kenichi Harada

IPC分类号： G03B17/20 ,  G02B21/00 ,  G02B21/34 ,  G02B21/36 ,  G02B27/34

CPC分类号： G02B21/34 ,  G02B21/00

摘要： There is an indicating device constituted so as to be apt to indicate the data such as the magnification ratio of an objective lens, the value of NA, the data or the like in the visual field of a microscope and at the same time to record these data in photograph. This indicating device is provided with a display means (17) able to indicate various sorts of data informations through the data processor (16) and polarizing prisms (10, 11) arranged between the objective lens (9), display means (17), photographing lens (14) and eyepiece (13) to divide the light bundle from the objective lens (9) and the light bundle from the data display means (17) respectively and to make them advance to the eyepiece (13) and photographing lens (14), and the data informations displayed on the display means (17) are imaged on the image forming face (12) inside the eyepiece (13) and on the dry-plate (15). This indicating device may use, instead of the above mentioned polarizing prism, the optical fiber bundle (19) arranged between the data display means (17) and eyepiece barrel (22) to image the data information displayed on the display means (17) on the image forming face (12) inside the eyepiece (13).

摘要翻译： PCT No.PCT / JP82 / 00412 Sec。 371日期：1983年4月11日 102（e）1983年4月11日的PCT日期为1982年10月15日。具有指示装置，以便容易地指示诸如物镜的放大率，NA的值，数据 或类似物体在显微镜的视野中同时在照片中记录这些数据。 该指示装置设置有能够通过数据处理器（16）指示各种数据信息的显示装置（17）和布置在物镜（9），显示装置（17）之间的偏振棱镜（10,11） 拍摄镜头（14）和目镜（13），以分别从数据显示装置（17）将光束与物镜（9）和光束分开，并使其前进到目镜（13）和拍摄镜头 14），显示在显示装置（17）上的数据信息被成像在目镜（13）内部和干板（15）上的图像形成面（12）上。 该指示装置可以代替上述偏振棱镜，使用布置在数据显示装置（17）和目镜筒（22）之间的光纤束（19），以将显示装置（17）上显示的数据信息成像 目镜（13）内的图像形成面（12）。

公开(公告)号：US20080176307A1

公开(公告)日：2008-07-24

申请号：US11834419

申请日：2007-08-06

申请人： Kazuo Washiyama ,  Shinichi Dosaka

发明人： Kazuo Washiyama ,  Shinichi Dosaka

IPC分类号： C12N13/00

CPC分类号： C12N15/1003

摘要： There is disclosed a method of irradiating a specimen which is laid on a substrate and which includes a cell with a laser beam to remove an unnecessary specimen portion other than a cell portion from the substrate, next inserting the cell portion into one opening in a cylindrical member to dispose the cylindrical member onto the substrate, next injecting a stripping agent into a container formed by the substrate and cylindrical member to strip the cell portion from the substrate, and sampling the cell portion which floats in the stripping agent.

摘要翻译： 公开了一种照射放置在基板上并且包括具有激光束的单元的试样的方法，以从基板除去除了单元部分以外的不必要的样品部分，接下来将单元部分插入到圆柱形的一个开口中 构件将圆柱形构件设置在基板上，接着将剥离剂注入由基板和圆柱形构件形成的容器中，以从基板剥离单元部分，并对浮选在剥离剂中的单元部分进行取样。

公开(公告)号：US07264966B2

公开(公告)日：2007-09-04

申请号：US10348198

申请日：2003-01-21

申请人： Kazuo Washiyama ,  Shinichi Dosaka

发明人： Kazuo Washiyama ,  Shinichi Dosaka

IPC分类号： C12N5/00 ,  C12N5/02 ,  C12N5/06

CPC分类号： C12N15/1003

摘要： There is disclosed a method of irradiating a specimen which is laid on a substrate and which includes a cell with a laser beam to remove an unnecessary specimen portion other than a cell portion from the substrate, next inserting the cell portion into one opening in a cylindrical member to dispose the cylindrical member onto the substrate, next injecting a stripping agent into a container formed by the substrate and cylindrical member to strip the cell portion from the substrate, and sampling the cell portion which floats in the stripping agent.

摘要翻译： 公开了一种照射放置在基板上并且包括具有激光束的单元的试样的方法，以从基板除去除了单元部分以外的不必要的样品部分，接下来将单元部分插入到圆柱形的一个开口中 构件将圆柱形构件设置在基板上，接着将剥离剂注入由基板和圆柱形构件形成的容器中，以从基板剥离单元部分，并对浮选在剥离剂中的单元部分进行取样。

公开(公告)号：US5228357A

公开(公告)日：1993-07-20

申请号：US703781

申请日：1991-05-21

申请人： Shinichi Dosaka

发明人： Shinichi Dosaka

IPC分类号： B23Q1/62 ,  B23Q5/38 ,  B23Q5/56 ,  G02B21/26 ,  G12B5/00

CPC分类号： B23Q1/621 ,  B23Q5/385 ,  B23Q5/56 ,  G02B21/26 ,  G12B5/00 ,  Y10T74/2039

摘要： A stage driving device for optical examining apparatus has a pair of moving beds capable of traveling in directions perpendicular to each other, straight guide members mounted on the moving beds, driving knobs coaxially arranged to move the moving beds, and a transmission mechanism converting a rotary motion of each of the driving knobs into a rectilinear motion of each of the moving beds. By the operation of the transmission mechanism, the movements of the moving beds can be made in two directions perpendicular to each other, independently or simultaneously. Additionally, the wear of parts of the straight guide members and the transmission mechanism is minimal and the use of inexpensive parts and the ease of assembly makes it possible to reduce the cost of the entire device.

摘要翻译： 用于光学检查装置的舞台驱动装置具有能够彼此垂直的方向行进的一对移动床，安装在移动床上的直引导构件，同轴地布置成移动移动床的驱动旋钮，以及将旋转 每个驱动旋钮的运动进入每个移动床的直线运动。 通过传动机构的操作，移动床的移动可以独立地或同时地彼此垂直的两个方向进行。 此外，直引导部件和传动机构的部件的磨损最小，并且使用便宜的部件和易于组装使得可以降低整个装置的成本。