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公开(公告)号：US07002162B1
公开(公告)日：2006-02-21
申请号：US10344850
申请日：2000-08-18
IPC分类号： G01N21/64
CPC分类号： G01N21/6408 , G01N21/6445
摘要： A fluorescence component that passes through a region of a detection medium where a change in refractive index has been induced through a nonlinear optical effect produced in the detection medium by a gate pulse is observed as a fluorescence image by utilizing a change in polarization state. By observing the change in position of the fluorescence image while correlating with the change over time in the fluorescence, a fluorescence lifetime measuring apparatus is realized with which the change over time in the fluorescence, in particular the fluorescence lifetime, can be measured efficiently with high temporal resolution.
摘要翻译： 通过利用偏振状态的变化，通过在检测介质中通过栅极脉冲产生的非线性光学效应，通过检测介质的区域的折射率变化的荧光成分被观察为荧光图像。 通过观察荧光图像的位置变化，同时与荧光中随时间的变化相关联，实现了荧光寿命测量装置，其中荧光寿命随时间的变化，特别是荧光寿命可以高效地测量 时间分辨率。
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公开(公告)号：US4994663A
公开(公告)日：1991-02-19
申请号：US355608
申请日：1989-05-23
摘要： An apparatus for measuring an autocorrelation wavaeform of intensity of input light comprises a beam splitting means for dividing the input light into two light beams, a photoelectric converter for converting one of the divided beams into an electrical signal, an optical modulating means for modulating the other light beam in accordance with the electrical signal, a delay means for varying a relative delay time between arrival times to the optical modulating means of the light beam and the electrical signal, and a photodetector having a response speed faster than that of the delay time variation for detecting output light from the optical modulating means.
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3.发明授权Electrical signal observing device for converting an electrical signal to be measured into an optical intensity waveform 失效用于将要测量的电信号转换为光强度波形的电信号观测装置
公开(公告)号：US4967144A
公开(公告)日：1990-10-30
申请号：US357824
申请日：1989-05-26
CPC分类号： G01R15/24 , G01R13/347
摘要： An electrical signal observing device has an optical signal as a probe for converting the voltage or current waveform to be measured into an optical intensity waveform. This optical intensity waveform is converted into a signal which can be used by a signal observation device. A continuous wave light source is used for generating an optical signal which is amplified by an optical amplifier having a gain controlled by the electrical signal to be measured. A photodetector detects light from the optical amplifier and generates an observation signal which is displayed by a display unit.
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4.发明授权Voltage detector having compensation for polarization change caused by spontaneous birefringence 失效电压检测器具有由自发双折射引起的偏振变化的补偿
公开(公告)号：US4866372A
公开(公告)日：1989-09-12
申请号：US200502
申请日：1988-05-31
CPC分类号： G01R1/071 , G01R15/242
摘要： A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of the first electro-optic material which is caused by the voltage in the object, is detected as a change of polarization of a light beam passing through the first electro-optic material. In order to compensating for a polarization change caused by the spontaneous birefringence, the first and second electro-optic materials made of the same material are disposed in such a manner that the first and second electro-optic materials and aligned along a light-traveling direction with their lengths in the light-traveling direction being substantially identical and with their optic axes being perpendicular to each other.
摘要翻译： 电压检测器通过利用配备在光学探针中的电光材料来检测在诸如集成电路的对象的选定区域中显影的电压。 由物体中的电压引起的第一电光材料的折射率的变化被检测为通过第一电光材料的光束的偏振变化。 为了补偿由自发双折射引起的偏振变化，由相同材料制成的第一和第二电光材料以这样的方式设置，使得第一和第二电光材料沿着光行进方向 其长度在光行进方向上基本相同，并且其光轴彼此垂直。
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公开(公告)号：US4864577A
公开(公告)日：1989-09-05
申请号：US203118
申请日：1988-06-07
CPC分类号： H01S3/1115 , H01S3/082 , H01S3/10076 , H01S3/1127 , H01S3/213
摘要： A highly repetitively pulsed laser device is provided including a feedback system simple in construction which returns a light pulse emitted from a laser resonator to the laser resonator so that the light pulse is superposed on a light pulse in the laser resonator.
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6.发明授权
公开(公告)号：US4864220A
公开(公告)日：1989-09-05
申请号：US217793
申请日：1988-07-12
IPC分类号： G01R1/07 , G01R15/24 , G01R19/00 , G01R31/302 , H01L21/66
CPC分类号： G01R1/071 , G01R15/242
摘要： In a voltage detector using an electro-optic material whose refractive index is changed by a voltage developing in a selected area of an object under test, a light beam emitted from a light source is applied to a beam splitter, where it is split into a light beam advancing along a reference optical path and a light beam advancing along an optical path extended to an optical path length changing means made of the electro-optic material, and the light beams are returned from the reference optical path and the optical path length changing means after reflection to the beam splitter, where they are caused to interference with each other to provide an output light beam which is applied to a detector. The efficiency of light beam utilization is improved, and the voltage developing in the selected area of the object can be detected with high accuracy.
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公开(公告)号：US4841234A
公开(公告)日：1989-06-20
申请号：US200563
申请日：1988-05-31
CPC分类号： G01R15/242 , G01R1/071
摘要： A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of the electro-optic material which is caused by the voltage in the object, is detected as a change of polarization of a light beam passing through the electro-optic material. In order to improve the detection sensitivity the voltage detector is equipped with an optical means for making light paths of an input light and an output light different from each other.
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8.发明授权Method of positioning an electrooptic probe of an apparatus for the measurement of voltage 失效定位用于测量电压的装置的电光探针的方法
公开(公告)号：US5552716A
公开(公告)日：1996-09-03
申请号：US213005
申请日：1994-03-14
IPC分类号： G01R19/00 , G01R31/302 , G01R31/308 , G01R29/12
CPC分类号： G01R31/308
摘要： An method of positioning an E-O probe applied to an apparatus for the measurement of voltage. In the first step, the relative position of the E-O probe against the magnifying optical system in the first condition of being focused the magnifying optical system on the base of the E-O probe, and the focal point difference between the focal plane of the magnifying optical system in the second condition that the E-O probe is substantially out of the optical path for observation of the surface of the device and the focal plane in the first condition are stored. The relative position and the focal point difference are fixed in the apparatus for the measurement of voltage regardless of the device to be measured. Next, in the second step, the focus of the magnifying optical system is adjusted to the observation position of the surface of the device in the second condition, and then in the third step, the magnifying optical system, the E-O probe, and the probe stage are separated from the device by the focal point difference stored in the first step by the Z-axis stage, and in the fourth step, the E-O probe is moved to the relative position of the E-O probe stored in the first step relative to the magnifying optical system by the probe stage.
摘要翻译： 将用于测量电压的设备的E-O探头定位的方法。 在第一步骤中，在将放大光学系统聚焦在EO探针的基座上的第一条件下，EO探针对放大光学系统的相对位置以及放大光学系统的焦平面之间的焦点差 在第二条件下，EO探针基本上不在用于观察装置的表面的光路中，并且在第一条件下存储焦平面。 无论要测量的装置如何，相对位置和焦点差都固定在用于测量电压的装置中。 接下来，在第二步骤中，放大光学系统的焦点在第二条件下被调整到装置的表面的观察位置，然后在第三步骤中，放大光学系统，EO探针和探针 通过Z轴级在第一步骤中存储的焦点差与装置分离阶段，并且在第四步骤中，将EO探针移动到相对于第一步骤中存储的EO探针的相对位置 通过探针台放大光学系统。
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公开(公告)号：US5307199A
公开(公告)日：1994-04-26
申请号：US735792
申请日：1991-07-25
CPC分类号： G02F1/293
摘要： The optical apparatus includes first and second deflection members, a mask, a pumping light source, and a controller. The first and second deflection members are formed of nonlinear optical material whose refractive index is changed upon light radiation. The mask is arranged on an optical path extending from a front side of the first deflection member to a rear side of a second deflection member. The mask has a predetermined transmission pattern. The pumping light source radiates first and second beams on predetermined regions of the first and second deflection members. This changes the refractive indices of the predetermined regions to bend the optical path. The controller variably controls the intensity of the first and second beams.
摘要翻译： 光学装置包括第一和第二偏转构件，掩模，泵浦光源和控制器。 第一偏转构件和第二偏转构件由折射率在光辐射下变化的非线性光学材料形成。 掩模布置在从第一偏转构件的前侧延伸到第二偏转构件的后侧的光路上。 掩模具有预定的传输图案。 泵浦光源在第一和第二偏转构件的预定区域上辐射第一和第二光束。 这改变了预定区域的折射率以弯曲光路。 控制器可变地控制第一和第二光束的强度。
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10.发明授权Voltage detection apparatus using short pulse light source with narrow spectral band width 失效电压检测装置采用具有窄光谱带宽的短脉冲光源
公开(公告)号：US5289114A
公开(公告)日：1994-02-22
申请号：US713215
申请日：1991-06-11
IPC分类号： G01R19/00 , G01R15/22 , H01S3/00 , H01S3/131 , H01S5/00 , H01S5/068 , H01S5/0683 , G01R31/00
CPC分类号： H01S3/0057 , G01R15/22 , H01S5/06835
摘要： A light source for emitting a pulsed laser beam having an ultrashort pulse width and a voltage detector including the light source therein. The light source includes a laser driving unit for driving the laser source to output the pulsed laser beam while the intensity of the pulsed laser beam is stabilized. A chirp compensator is also included to compensate for a chirp in the pulsed laser beam. A wavelength selector is used to extract light having a desired wavelength from the pulsed laser beam, thereby obtaining a pulsed laser beam having an ultrashort pulse width and a desired narrow spectral band width.
摘要翻译： 用于发射具有超短脉冲宽度的脉冲激光束的光源和包括其中的光源的电压检测器。 光源包括激光驱动单元，用于驱动激光源以输出脉冲激光束，同时脉冲激光束的强度稳定。 还包括啁啾补偿器以补偿脉冲激光束中的啁啾声。 使用波长选择器从脉冲激光束提取具有期望波长的光，从而获得具有超短脉冲宽度和期望的窄光谱带宽的脉冲激光束。
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