公开(公告)号：US6150770A

公开(公告)日：2000-11-21

申请号：US251195

申请日：1999-02-16

申请人： Shinji Hirata ,  Hideaki Kondo

发明人： Shinji Hirata ,  Hideaki Kondo

IPC分类号： H05B41/34 ,  H05B37/00

CPC分类号： H05B41/34

摘要： In a flash apparatus capable of making high-speed repeating light emission, a self-maintaining switch element provided for various purposes is prevented from erroneously operating due to the high-speed repeating light emission, by providing a circuit element which reverse-biases a control electrode of the self-maintaining switch element.

摘要翻译： 在能够进行高速重复发光的闪光装置中，为了各种目的而设置的自维持开关元件，由于高速重复发光而被防止误操作，通过提供反向偏置控制的电路元件 自维护开关元件的电极。

公开(公告)号：US09011065B2

公开(公告)日：2015-04-21

申请号：US12871333

申请日：2010-08-30

申请人： Susumu Tauchi ,  Hideaki Kondo ,  Teruo Nakata ,  Keita Nogi ,  Atsushi Shimoda ,  Takafumi Chida

发明人： Susumu Tauchi ,  Hideaki Kondo ,  Teruo Nakata ,  Keita Nogi ,  Atsushi Shimoda ,  Takafumi Chida

IPC分类号： H01L21/677 ,  H01L21/67

CPC分类号： H01L21/67184 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67745 ,  H01L21/67769 ,  Y10S414/139

摘要： A vacuum processing apparatus which includes an atmospheric transfer chamber having a plurality of cassette stands for transferring a wafer, a lock chamber for storing the wafer, a first vacuum transfer chamber to which the wafer from the lock chamber is transferred, a transfer intermediate chamber connected to the first vacuum transfer chamber, and a second vacuum transfer chamber connected to the transfer intermediate chamber. At least one vacuum processing chamber is connected to the first vacuum transfer chamber, and two or more vacuum processing chambers are connected to a rear side of the second vacuum transfer chamber. A plurality of gate valves are disposed between the first vacuum transfer chamber and each of the lock chamber, the transfer intermediate chamber, and the vacuum processing chamber coupled to the first vacuum transfer chamber. A control unit is also provided for controlling operation of the gate valves.

摘要翻译： 一种真空处理装置，包括具有用于传送晶片的多个盒架的大气传送室，用于存储晶片的锁定室，来自锁定室的晶片被转移到的第一真空传送室，连接到传送中间室 到第一真空传送室，以及连接到传送中间室的第二真空传送室。 至少一个真空处理室连接到第一真空传送室，并且两个或更多个真空处理室连接到第二真空传送室的后侧。 多个闸阀设置在第一真空传送室与联接到第一真空传送室的锁定室，传送中间室和真空处理室中的每一个之间。 还设置有用于控制闸阀的操作的控制单元。

公开(公告)号：US08747046B2

公开(公告)日：2014-06-10

申请号：US13022313

申请日：2011-02-07

申请人： Ryoichi Isomura ,  Susumu Tauchi ,  Hideaki Kondo

发明人： Ryoichi Isomura ,  Susumu Tauchi ,  Hideaki Kondo

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67184 ,  H01L21/67742

摘要： The vacuum processing apparatus is comprised of two vacuum transfer vessels in which a wafer is transferred through; two vacuum process vessels connected to these vacuum transfer vessels respectively; an intermediate chamber vessel capable of storing thereinto the wafer connected between the vacuum transfer vessels; a lock chamber connected to one of the vacuum transfer vessels; and a plurality of valves disposed among the vacuum transfer vessels, the vacuum process vessels, the intermediate chamber vessel, and the lock chamber respectively, for airtightly opening/closing communications among these vessels and the chamber; in which any one of the valves disposed on both sides of the intermediate chamber vessel is closed before the valves disposed between processing chambers of the vacuum process vessels and vacuum transfer chambers of the vacuum transfer vessels is opened.

摘要翻译： 真空处理装置由两个真空转移容器组成，其中晶片被转移通过; 两个真空处理容器分别连接到这些真空转移容器上; 能够将连接在真空传送容器之间的晶片存储在其中的中间室容器; 连接到所述真空转移容器之一的锁定室; 以及分别设置在真空转移容器，真空处理容器，中间室容器和锁定室中的多个阀，用于气密地打开/关闭这些容器和腔室之间的通信; 其中在设置在真空处理容器的处理室和真空传送容器的真空传送室之间的阀打开之前，设置在中间室容器的两侧的任何一个阀关闭。

公开(公告)号：US08244188B2

公开(公告)日：2012-08-14

申请号：US12692325

申请日：2010-01-22

申请人： Masaru Sawada ,  Hideaki Kondo ,  Norio Murakami

发明人： Masaru Sawada ,  Hideaki Kondo ,  Norio Murakami

IPC分类号： H04B1/40

CPC分类号： H04B1/48 ,  H04B1/0458

摘要： A transmitting and receiving circuit includes a transmitting side amplifier circuit amplifying a transmission signal transmitted from an antenna, a receiving side amplifier circuit amplifying a reception signal received by the antenna and being electrically connected to the a transmitting side amplifier circuit, a first matching circuit matching the antenna and the transmitting side amplifier circuit, a second matching circuit matching the antenna and the receiving side amplifier circuit, a first current source circuit capable of controlling an operating state and setting a first connection point between the first matching circuit and an output terminal of the transmitting side amplifier circuit to a given voltage, and a second current source circuit capable of controlling an operating state and setting a second connection point between the second matching circuit and an input terminal of the receiving side amplifier circuit to a given voltage.

摘要翻译： 发送和接收电路包括放大从天线发送的发送信号的发送侧放大器电路，放大由天线接收的并与发送侧放大器电路电连接的接收信号的接收侧放大器电路，第一匹配电路匹配 天线和发送侧放大器电路，匹配天线和接收侧放大器电路的第二匹配电路，能够控制操作状态并将第一匹配电路和输出端之间的第一连接点设置为第一电流源电路的第一电流源电路 所述发送侧放大器电路为给定电压;以及第二电流源电路，其能够控制操作状态，并将所述第二匹配电路和所述接收侧放大器电路的输入端之间的第二连接点设定为给定电压。

公开(公告)号：US20120163943A1

公开(公告)日：2012-06-28

申请号：US13022313

申请日：2011-02-07

申请人： Ryoichi ISOMURA ,  Susumu Tauchi ,  Hideaki Kondo

发明人： Ryoichi ISOMURA ,  Susumu Tauchi ,  Hideaki Kondo

IPC分类号： H01L21/677

CPC分类号： H01L21/67184 ,  H01L21/67742

摘要： The vacuum processing apparatus is comprised of two vacuum transfer vessels in which a wafer is transferred through; two vacuum process vessels connected to these vacuum transfer vessels respectively; an intermediate chamber vessel capable of storing thereinto the wafer connected between the vacuum transfer vessels; a lock chamber connected to one of the vacuum transfer vessels; and a plurality of valves disposed among the vacuum transfer vessels, the vacuum process vessels, the intermediate chamber vessel, and the lock chamber respectively, for airtightly opening/closing communications among these vessels and the chamber; in which any one of the valves disposed on both sides of the intermediate chamber vessel is closed before the valves disposed between processing chambers of the vacuum process vessels and vacuum transfer chambers of the vacuum transfer vessels is opened.

摘要翻译： 真空处理装置由两个真空转移容器组成，其中晶片被转移通过; 两个真空处理容器分别连接到这些真空转移容器上; 能够将连接在真空传送容器之间的晶片存储在其中的中间室容器; 连接到所述真空转移容器之一的锁定室; 以及分别设置在真空传送容器，真空处理容器，中间室容器和锁定室之间的多个阀，用于气密地打开/关闭这些容器和腔室之间的通信; 其中在设置在真空处理容器的处理室和真空传送容器的真空传送室之间的阀打开之前，设置在中间室容器的两侧的任何一个阀关闭。

公开(公告)号：US20110218662A1

公开(公告)日：2011-09-08

申请号：US13021888

申请日：2011-02-07

申请人： Teruo Nakata ,  Hideaki Kondo ,  Susumu Tauchi ,  Keita Nogi

发明人： Teruo Nakata ,  Hideaki Kondo ,  Susumu Tauchi ,  Keita Nogi

IPC分类号： G06F19/00

CPC分类号： G06F19/00

摘要： Provided is a method for controlling efficient transferring operations in a vacuum processing apparatus with a linear tool. In the apparatus, plural transferring robots are arranged in transferring mechanism units in which plural process chambers are connected with each other, and to-be-processed wafers are received and passed between plural transferring robots. As the transferring robots is far from the load lock, the number of transferring operations to the process chambers is set larger, the number of times of continuous transferring operations to the process chambers is set as small as possible, and an odd number of times of continuous transferring operations to buffer rooms is set, by a destination determination unit and operation control rules. Further, transferring operations are performed based on the destination determination unit and the operation control rules.

摘要翻译： 提供了一种用于在具有线性工具的真空处理设备中控制有效传送操作的方法。 在该装置中，在多个处理室相互连接的传送机构单元中配置有多个传送机器人，在多个传送机器人之间接收并通过待处理的晶片。 由于传送机器人远离装载锁定，所以将处理室的传送操作的次数设定得较大，对处理室的连续传送操作的次数被设定得尽可能小，并且奇数次 通过目的地确定单元和操作控制规则设置对缓冲室的连续传送操作。 此外，基于目的地确定单元和操作控制规则执行传送操作。

公开(公告)号：US20050108577A1

公开(公告)日：2005-05-19

申请号：US11003472

申请日：2004-12-06

申请人： Kouji Nishihata ,  Kenji Nakata ,  Shoji Ikuhara ,  Hideyuki Yamamoto ,  Hideaki Kondo

发明人： Kouji Nishihata ,  Kenji Nakata ,  Shoji Ikuhara ,  Hideyuki Yamamoto ,  Hideaki Kondo

IPC分类号： G06F13/00 ,  G06F21/00 ,  H01L21/00 ,  H01L21/02 ,  H04M11/00 ,  H04Q9/00 ,  H04L9/00

CPC分类号： G06F21/6218 ,  G06F2221/2113

摘要： A remote diagnostic system and method for facilities which carry out a diagnosis on a facilities placed under management of a first company using the diagnostic system of a second company, which is connected to the facilities through a communications network and which is not placed under management of the first company. The facilities include, a storage unit which stores information classified into multiple security levels having different access rights in order to determine the scope of reply in response to an inquiry regarding information on diagnosis of the facilities, and a security level evaluation control unit to assign a new access right in response to the inquiry devoid of access right regarding the diagnosis from the second company in conformance to the degree of the event related to the inquiry.

摘要翻译： 一种远程诊断系统和方法，用于对使用第二公司的诊断系统的第一公司管理的设施进行诊断的设施，所述诊断系统通过通信网络连接到所述设施，并且不被管理 第一家公司。 这些设施包括：存储单元，其存储分类为具有不同访问权限的多个安全级别的信息，以便响应于关于设施的诊断的信息的查询来确定回复的范围;以及安全级别评估控制单元， 针对与第二家公司的诊断有关的访问权限的查询符合与查询相关的事件程度的新访问权限。

公开(公告)号：US09385016B2

公开(公告)日：2016-07-05

申请号：US12966429

申请日：2010-12-13

申请人： Teruo Nakata ,  Hideaki Kondo ,  Keita Nogi

发明人： Teruo Nakata ,  Hideaki Kondo ,  Keita Nogi

IPC分类号： H01L21/67 ,  H01L21/677

CPC分类号： H01L21/67276 ,  H01L21/67184 ,  H01L21/67748

摘要： In a processing system of a linear tool in which plural carrying robots are arranged in carrying mechanical units to which processing modules are coupled and a processing target is delivered and received between the plural carrying robots, in the case where there are plural carrying routes on which the processing target is carried, the present invention provides a technique for determining the carrying route on which the highest throughput can be obtained.In the processing system of a linear tool, in the case where there are plural carrying routes on which the processing target is carried, the throughputs of the respective carrying routes are compared to each other, and the carrying route is determined by a unit for selecting the carrying route with the highest throughput.

摘要翻译： 在一种线性工具的处理系统中，其中多个运送机器人被布置成承载处理模块耦合的机械单元并且在多个运送机器人之间传送和接收处理目标，在其上有多个运送路线的情况下， 本发明提供了一种用于确定能够获得最高吞吐量的携带路由的技术。 在线性工具的处理系统中，在携带有处理对象的多个承载路径的情况下，将各个携带路线的吞吐量相互比较，并且携带路线由用于选择的单位确定 运输路线最高。

公开(公告)号：US08849446B2

公开(公告)日：2014-09-30

申请号：US13021898

申请日：2011-02-07

申请人： Teruo Nakata ,  Hideaki Kondo ,  Susumu Tauchi ,  Keita Nogi

发明人： Teruo Nakata ,  Hideaki Kondo ,  Susumu Tauchi ,  Keita Nogi

IPC分类号： G06F7/00 ,  H01L21/677

CPC分类号： H01L21/677 ,  Y02P90/02 ,  Y10T29/41

摘要： The present invention provides an efficient transferring control method in a vacuum processing apparatus of a linear tool in which plural vacuum robots are arranged in transferring mechanical units to which process chambers are connected and processing-target members are passed and received among the plural vacuum robots. In addition, the present invention provides a vacuum processing apparatus in which there are provided plural controlling methods, and a unit which determines whether rates of the transferring robots are to be controlled or rates of the process chambers are to be controlled on the basis of processing time of each processing-target member and switches the controlling method in accordance with a site whose rate is controlled.

摘要翻译： 本发明提供了一种线性工具的真空处理装置中的有效的传送控制方法，其中多个真空机器人被布置成传送处理室连接的机械单元，并且处理对象构件在多个真空机器人之间通过和接收。 此外，本发明提供一种真空处理装置，其中提供多种控制方法，以及一个单元，其确定是否要控制转移机器人的速率或者基于处理来控制处理室的速率 每个处理目标成员的时间，并根据控制率的位置切换控制方法。

公开(公告)号：US20110217148A1

公开(公告)日：2011-09-08

申请号：US13021898

申请日：2011-02-07

申请人： Teruo NAKATA ,  Hideaki Kondo ,  Susumu Tauchi ,  Keita Nogi

发明人： Teruo NAKATA ,  Hideaki Kondo ,  Susumu Tauchi ,  Keita Nogi

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  Y02P90/02 ,  Y10T29/41

摘要： The present invention provides an efficient transferring control method in a vacuum processing apparatus of a linear tool in which plural vacuum robots are arranged in transferring mechanical units to which process chambers are connected and processing-target members are passed and received among the plural vacuum robots. In addition, the present invention provides a vacuum processing apparatus in which there are provided plural controlling methods, and a unit which determines whether rates of the transferring robots are to be controlled or rates of the process chambers are to be controlled on the basis of processing time of each processing-target member and switches the controlling method in accordance with a site whose rate is controlled.

摘要翻译： 本发明提供了一种线性工具的真空处理装置中的有效的传送控制方法，其中多个真空机器人被布置成传送处理室连接的机械单元，并且处理对象构件在多个真空机器人之间通过和接收。 此外，本发明提供一种真空处理装置，其中提供多种控制方法，以及一个单元，其确定是否要控制转移机器人的速率或者基于处理来控制处理室的速率 每个处理目标成员的时间，并且根据控制速率的站点来切换控制方法。