-
1.发明授权Polarization purity control device and gas laser apparatus provided with the same 有权极化纯度控制装置和具备该极化纯度的气体激光装置公开(公告)号：US08891574B2
公开(公告)日：2014-11-18
申请号：US13425825
申请日：2012-03-21
CPC分类号： H01S3/10061 , H01S3/005 , H01S3/2251 , H01S3/2316
摘要： A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.
摘要翻译： 一种偏光控制装置包括：用于透射激光束的氟化钙晶体基板; 用于测量透射穿过氟化钙晶体衬底的激光束的偏振度的偏振监视器; 以及控制器，用于根据由偏振监视器测量的偏振度来控制氟化钙晶体基板的旋转角度; 所述氟化钙晶体基板由具有激光入射面的平板和与（111）晶面平行地行进的激光束离开表面形成，所述布鲁斯特角为入射角选择，围绕[ 111]轴作为中心轴由控制器控制。
-
公开(公告)号：US08503499B2
公开(公告)日：2013-08-06
申请号：US12899886
申请日：2010-10-07
CPC分类号： H01S3/034 , G02B1/02 , G02B5/3091 , H01S3/0346 , H01S3/08054 , H01S3/0816 , H01S3/225 , H01S3/2251
摘要： A gas discharge chamber that uses a calcium fluoride crystal which reduces a breakage due to mechanical stress (window holder and laser gas pressure), thermal stress from light absorption, and the like, increases the degree of linear polarization of output laser, and suppresses degradation due to strong ultraviolet (ArF, in particular) laser light irradiation. A first window (2) and a second window (3) of the gas discharge chamber have an incident plane and an emitting plane in parallel with a (111) crystal plane of their calcium fluoride crystal. With respect to an arrangement where laser light entering the calcium fluoride crystal passes through a plane including a axis and a axis of each of the first window (2) and the second window (3) as seen from inside the chamber (1), the first window (2) and the second window (3) are arranged in positions rotated in the same direction by the same angle about their axis.
摘要翻译： 使用减少由于机械应力（窗口保持器和激光气体压力）的破裂的氟化钙晶体，来自光吸收等的热应力的气体放电室增加了输出激光器的线性极化的程度，并抑制了劣化 由于强紫外线（特别是ArF）激光照射。 气体放电室的第一窗口（2）和第二窗口（3）具有与其氟化钙晶体的（111）晶面平行的入射面和发射平面。 关于进入氟化钙晶体的激光通过包括第一窗口（2）和第二窗口（3）中的每一个的<111>轴和<001>轴的平面的布置，从内侧看 室（1），第一窗口（2）和第二窗口（3）被布置在围绕其<111>轴线沿相同方向旋转相同角度的位置。
-
3.发明授权Polarization purity control device and gas laser apparatus provided with the same 有权极化纯度控制装置和具备该极化纯度的气体激光装置公开(公告)号：US08165181B2
公开(公告)日：2012-04-24
申请号：US12545474
申请日：2009-08-21
CPC分类号： H01S3/10061 , H01S3/005 , H01S3/2251 , H01S3/2316
摘要： A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.
摘要翻译： 一种偏光控制装置包括：用于透射激光束的氟化钙晶体基板; 用于测量透射穿过氟化钙晶体衬底的激光束的偏振度的偏振监视器; 以及控制器，用于根据由偏振监视器测量的偏振度来控制氟化钙晶体基板的旋转角度; 所述氟化钙晶体基板由具有激光入射面的平板和与（111）晶面平行地行进的激光束离开表面形成，所述布鲁斯特角为入射角选择，围绕[ 111]轴作为中心轴由控制器控制。
-
4.发明申请POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED WITH THE SAME 有权偏光透明度控制装置和与其同时提供的气体激光装置公开(公告)号：US20100128747A1
公开(公告)日：2010-05-27
申请号：US12545474
申请日：2009-08-21
CPC分类号： H01S3/10061 , H01S3/005 , H01S3/2251 , H01S3/2316
摘要： A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.
摘要翻译： 一种偏光控制装置包括：用于透射激光束的氟化钙晶体基板; 用于测量透射穿过氟化钙晶体衬底的激光束的偏振度的偏振监视器; 以及控制器，用于根据由偏振监视器测量的偏振度来控制氟化钙晶体基板的旋转角度; 所述氟化钙晶体基板由具有激光入射面的平板和与（111）晶面平行地行进的激光束离开表面形成，所述布鲁斯特角为入射角选择，围绕[ 111]轴作为中心轴由控制器控制。
-
5.发明申请POLARIZATION PURITY CONTROL DEVICE AND GAS LASER APPARATUS PROVIDED WITH THE SAME 有权偏光透明度控制装置和与其同时提供的气体激光装置公开(公告)号：US20120177072A1
公开(公告)日：2012-07-12
申请号：US13425825
申请日：2012-03-21
CPC分类号： H01S3/10061 , H01S3/005 , H01S3/2251 , H01S3/2316
摘要： A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted through the calcium fluoride crystal substrate; and a controller for controlling the rotation angle of the calcium fluoride crystal substrate according to the degree of polarization measured by the polarization monitor; the calcium fluoride crystal substrate being formed by a flat plate having a laser beam entering surface and a laser beam exiting surface running in parallel with the (111) crystal face, the Brewster angle being selected for the incident angle, the rotation angle around the [111] axis operating as a central axis being controlled by the controller.
摘要翻译： 一种偏光控制装置包括：用于透射激光束的氟化钙晶体基板; 用于测量透射穿过氟化钙晶体衬底的激光束的偏振度的偏振监视器; 以及控制器，用于根据由偏振监视器测量的偏振度来控制氟化钙晶体基板的旋转角度; 所述氟化钙晶体基板由具有激光入射面的平板和与（111）晶面平行地行进的激光束离开表面形成，所述布鲁斯特角为入射角选择，围绕[ 111]轴作为中心轴由控制器控制。
-
公开(公告)号：US06627843B2
公开(公告)日：2003-09-30
申请号：US09969782
申请日：2001-10-04
申请人： Yasuo Itakura , Fumika Yoshida , Osamu Wakabayashi
发明人： Yasuo Itakura , Fumika Yoshida , Osamu Wakabayashi
IPC分类号： B23K2636
CPC分类号： H01S3/225 , H01S3/03 , H01S3/0346 , H01S3/036
摘要： A casing for a laser device in which contaminants do not generate even if it is radiated with laser light, a production method and a cleaning method of the same are provided. For this purpose, the cleaning method is a method of cleaning a casing (19) for an ultraviolet laser device, an inside of which laser light (11) passes through, comprises the steps of purging the inside of the casing (19) with an inert gas, and radiating F2 cleaning laser light (16) oscillated from an F2 molecular laser light radiating device (15) to the inside of the casing (19) to thereby remove contaminants adhering to the inside of the casing (19).
-
公开(公告)号：US08610095B2
公开(公告)日：2013-12-17
申请号：US12695630
申请日：2010-01-28
摘要： An extreme ultraviolet light source device in accordance with the present invention suppresses a surface that comes into contact with a target material in a molten state from being eroded by the target material, being reacted with the target material, and being cut by the target material.A target generating unit 120 injects molten tin in a droplet shape as a target 201 into a chamber 101. A protective coating provided with an erosion resistance property to tin is configured on a section that comes into contact with tin in a molten state for each face of a nozzle part 121 and a tank part 122. Alternatively, a part that comes into contact with tin in a molten state is made of a material provided with an erosion resistance property and a heat resistance property.
摘要翻译： 根据本发明的极紫外光源装置抑制与熔融状态的目标材料接触的表面被目标材料侵蚀，与目标材料反应并被目标材料切割。 目标产生单元120将作为目标201的液滴形状的熔融锡注入到室101中。对于每个面，在与熔融状态的锡接触的部分上配置具有对锡的耐侵蚀性的保护涂层 喷嘴部分121和罐部分122.或者，与熔融状态的锡接触的部分由具有耐腐蚀性和耐热性的材料制成。
-
公开(公告)号：US20100200776A1
公开(公告)日：2010-08-12
申请号：US12695630
申请日：2010-01-28
IPC分类号： G01J3/10
摘要： [Problem] An extreme ultraviolet light source device in accordance with the present invention suppresses a surface that comes into contact with a target material in a molten state from being eroded by the target material, being reacted with the target material, and being cut by the target material.[Means for Resolution] A target generating unit 120 injects molten tin in a droplet shape as a target 201 into a chamber 101. A protective coating provided with an erosion resistance property to tin is configured on a section that comes into contact with tin in a molten state for each face of a nozzle part 121 and a tank part 122. Alternatively, a part that comes into contact with tin in a molten state is made of a material provided with an erosion resistance property and a heat resistance property.
摘要翻译： 本发明的极紫外光源装置抑制与熔融状态的目标材料接触的表面被目标材料侵蚀，与目标材料反应，并被 目标材料 [解决方法]目标产生单元120将作为目标201的液滴形状的熔融锡注入到室101中。对锡进行耐蚀性的保护涂层被配置在与锡接触的部分上 喷嘴部分121和罐部分122的每个面的熔融状态。或者，与熔融状态的锡接触的部分由具有耐腐蚀性和耐热性的材料制成。
-
-
-
-
-
-
-
搜索结果
8 条记录 (耗时 0.027 秒)
