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公开(公告)号：US06576578B1
公开(公告)日：2003-06-10
申请号：US09762679
申请日：2001-03-01
IPC分类号： C03C306
CPC分类号： C03B19/1415 , C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2207/30 , C03B2207/32 , C03B2207/36 , C03C3/06 , C03C2201/12 , C03C2201/21 , C03C2201/23 , C03C2203/40 , C03C2203/54 , Y02P40/57
摘要： A synthetic quartz glass to be used for light with a wavelength of from 150 to 200 nm, wherein the OH group concentration is at most 100 ppm, the hydrogen molecule concentration is at most 1×1017 molecules/cm3, reduction type defects are at most 1×1015 defects/cm3, and the relation between &Dgr;k163 and &Dgr;k190, as between before and after irradiation of ultraviolet rays, satisfies 0
摘要翻译： 用于波长为150〜200nm的光的合成石英玻璃，OH基浓度为100ppm以下，氢分子浓度为1×10 17分子/ cm 3以下，还原型缺陷为1×1015以下的缺陷 / cm3，紫外线照射前后的DELTAk163与DELTAk190之间的关系满足0
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公开(公告)号：US06611317B1
公开(公告)日：2003-08-26
申请号：US09701180
申请日：2001-02-16
申请人： Tohru Ogawa , Hideo Hosono , Shinya Kikugawa , Yoshiaki Ikuta , Akio Masui , Noriaki Shimodaira , Shuhei Yoshizawa
发明人： Tohru Ogawa , Hideo Hosono , Shinya Kikugawa , Yoshiaki Ikuta , Akio Masui , Noriaki Shimodaira , Shuhei Yoshizawa
IPC分类号： G03B2772
CPC分类号： G03F7/70058 , G03F7/70241 , G03F7/70958
摘要： An exposure apparatus, wherein at least one of optical members constituting an exposure light source system, an illuminating optical system, a photomask and a projection optical system, is made of a synthetic quartz glass for an optical member, which has an absorption coefficient of 0.70 cm−1 or less at a wavelength of 157 nm and an infrared absorption peak attributable to SiOH stretching vibration at about 3640 cm−1.
摘要翻译： 一种曝光装置，其中构成曝光光源系统的光学部件，照明光学系统，光掩模和投影光学系统中的至少一个由用于光学部件的合成石英玻璃制成，其吸收系数为0.70 cm-1或更小，以及归因于约3640cm -1处的SiOH伸缩振动的红外吸收峰。
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公开(公告)号：US08402786B2
公开(公告)日：2013-03-26
申请号：US10283055
申请日：2002-10-30
IPC分类号： C03B25/00
CPC分类号： G03F7/70958 , C03B19/1453 , C03B32/00 , C03B2201/21 , C03B2201/23 , C03C3/06 , C03C23/00 , C03C2201/21 , C03C2201/23 , C03C2203/54 , Y02P40/57
摘要： A process for producing a synthetic silica glass optical component which contains at least 1×1017 molecules/cm3 and has an OH concentration of at most 200 ppm and substantially no reduction type defects, by treating a synthetic silica glass having a hydrogen molecule content of less than 1×1017 molecules/cm3 at a temperature of from 300 to 600° C. in a hydrogen gas-containing atmosphere at a pressure of from 2 to 30 atms.
摘要翻译： 一种合成石英玻璃光学部件的制造方法，其通过处理氢分子含量少的合成二氧化硅玻璃，其含有至少1×10 17分子/ cm 3，OH浓度为200ppm以下，基本上无还原型缺陷 在含有氢气的气氛中，在2-30atms的压力下，在300-600℃的温度下，比1×1017分子/ cm 3。
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公开(公告)号：US07022633B2
公开(公告)日：2006-04-04
申请号：US10317068
申请日：2002-12-12
CPC分类号： C03C3/06 , C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2201/23 , C03C23/002 , C03C2201/11 , C03C2201/12 , C03C2201/23 , C03C2203/44 , C03C2203/54 , Y02P40/57 , Y10S65/16 , Y10S501/90 , Y10S501/905
摘要： A synthetic quartz glass for optical use, to be used by irradiation with light within a range of from the ultraviolet region to the vacuum ultraviolet region, which contains fluorine, which has a ratio of the scattering peak intensity of 2250 cm−1 (I2250) to the scattering peak intensity of 800 cm−1 (I800), i.e. I2250/I800, of at most 1×10−4 in the laser Raman spectrum, and which has an absorption coefficient of light of 245 nm of at most 2×10−3 cm−1.
摘要翻译： 一种用于光学用途的合成石英玻璃，其通过在含有氟的紫外区域至真空紫外区域的范围内的光照射而使用，所述氟化物具有2250cm -1的散射峰强度 （I 2250）相对于800cm -1（I 800）的散射峰强度，即I 2250 在激光拉曼光谱中，其最大吸收系数为245nm，最多为2×10 3，最大为1×10 -4， SUP> -3cm -1 -1。
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5.发明授权Synthetic quartz glass for optical member, process for producing the same, and method of using the same 失效用于光学构件的合成石英玻璃及其制造方法及其使用方法公开(公告)号：US06544914B1
公开(公告)日：2003-04-08
申请号：US09701191
申请日：2000-12-28
IPC分类号： C03C306
CPC分类号： C03C23/002 , B08B7/0057 , C03B19/1453 , C03B19/1469 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03C3/06 , C03C2201/23 , C03C2203/50 , Y02P40/57
摘要： A process for producing a synthetic quartz glass for an optical member, which comprises a step of irradiating a synthetic quartz glass having an OH group content of 50 ppm or lower with vacuum ultraviolet light having a wavelength of 180 nm or shorter to improve the transmittance in a region of wavelengths of not longer than 165 nm.
摘要翻译： 一种用于制造用于光学构件的合成石英玻璃的方法，其包括用波长为180nm或更短的真空紫外光照射具有50ppm或更低的OH基含量的合成石英玻璃以提高透射率的步骤 波长不超过165nm的区域。
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公开(公告)号：US06499317B1
公开(公告)日：2002-12-31
申请号：US09581263
申请日：2000-10-17
IPC分类号： G01N2300
CPC分类号： C03C3/06 , C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2201/23 , C03C23/002 , C03C2201/11 , C03C2201/12 , C03C2201/23 , C03C2203/44 , C03C2203/54 , Y02P40/57 , Y10S65/16 , Y10S501/90 , Y10S501/905
摘要： A synthetic quartz glass for optical use, to be used by irradiation with light within a range of from the ultraviolet region to the vacuum ultraviolet region, which contains fluorine, which has a ratio of the scattering peak intensity of 2250 cm−1 (I2250) to the scattering peak intensity of 800 cm−1 (I800), i.e. I2250/I800, of at most 1×10−4 in the laser Raman spectrum, and which has an absorption coefficient of light of 245 nm of at most 2×10−3 cm−1.
摘要翻译： 一种用于光学用的合成石英玻璃，其用于通过在从含有氟的紫外线区域到真空紫外线区域的光的照射下使用，其具有2250cm -1（I2250）的散射峰强度比， 对于激光拉曼光谱中至多为1×10 -4的800cm -1（I800）的散射峰强度（I800），即I2250 / I800，其吸光系数为245nm，最多为2×10 -3 cm -3， 1。
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7.发明授权Fiber array for optical communication and method of manufacturing the fiber array 有权用于光通信的光纤阵列和制造光纤阵列的方法公开(公告)号：US07266282B2
公开(公告)日：2007-09-04
申请号：US10521952
申请日：2003-05-08
IPC分类号： G02B6/00
CPC分类号： G02B6/3834 , B23K26/364 , G02B6/3636 , G02B6/3652 , G02B6/3688 , G02B6/3692 , G02B6/3837 , G02B6/3839
摘要： There is provided a multi-cored fiber array for optical communication which has high dimensional accuracy, can easily be prepared by machining, and is low in cost. There is also provided a fiber array for optical communication which can reduce the necessary amount of an adhesive used for fixing optical fibers to a substrate. The fiber array for optical communication comprises: a substrate for inserting optical fibers therein; and a press plate for pressing and fixing the inserted optical fibers. The substrate has a plurality of grooves into which the optical fibers are to be inserted. The accuracy of the center-to-center dimension between the grooves adjacent to each other is within ±0.5 μm, and the degree of parallelization in the groove length direction between the grooves adjacent to each other is within ±0.1 degree.
摘要翻译： 提供了具有高尺寸精度的光纤通信用多芯光纤阵列，可以容易地通过机械加工而成本低廉。 还提供了一种用于光通信的光纤阵列，其可以减少用于将光纤固定到基板的粘合剂所需的量。 用于光通信的光纤阵列包括：用于在其中插入光纤的基板; 以及用于按压和固定插入的光纤的压板。 基板具有多个槽，光纤将被插入其中。 彼此相邻的槽之间的中心至中心尺寸的精度在±0.5μm之间，并且彼此相邻的槽之间的槽长度方向上的平行度在±0.1度以内。
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8.发明授权Connector component for optical fiber, manufacturing method thereof and optical member 有权用于光纤的连接器部件，其制造方法和光学部件公开(公告)号：US08202010B2
公开(公告)日：2012-06-19
申请号：US13087861
申请日：2011-04-15
IPC分类号： G02B6/26
CPC分类号： C03C3/06 , G02B6/3807 , G02B6/3812 , G02B6/3834 , G02B6/3839 , G02B6/3854 , G02B6/3861 , Y10T428/24273
摘要： A connector component for optical fibers has good dimensional accuracy and parallelism. The connector component includes a base material. The base material is provided with at least two holes for inserting and fixing optical fibers therein. The base material is made of quartz glass. Inner components are arranged for forming holes for inserting optical fibers in a die for forming an outer form of the connector component with a dimensional accuracy equal to or less than 2 μm. Slurry is poured into the die, the slurry including quartz powder, a resin binder, a dispersant, water and a curing agent. The poured slurry is cured and heated under vacuum so as to vitrify the cured slurry to obtain the quartz glass.
摘要翻译： 用于光纤的连接器部件具有良好的尺寸精度和平行度。 连接器部件包括基材。 基材具有至少两个用于在其中插入和固定光纤的孔。 基材由石英玻璃制成。 内部部件布置成用于形成用于将光纤插入到用于形成等于或小于2μm的尺寸精度的连接器部件的外部形状的模具中的孔。 将浆料倒入模具中，浆料包括石英粉，树脂粘合剂，分散剂，水和固化剂。 将倾倒的浆料固化并在真空下加热，以使固化的浆料玻璃化以获得石英玻璃。
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9.发明申请Connector component for optical fiber, manufacturing method thereof and optical member 审中-公开用于光纤的连接器部件，其制造方法和光学部件公开(公告)号：US20070065073A1
公开(公告)日：2007-03-22
申请号：US11602754
申请日：2006-11-21
CPC分类号： C03C3/06 , G02B6/3807 , G02B6/3812 , G02B6/3834 , G02B6/3839 , G02B6/3854 , G02B6/3861 , Y10T428/24273
摘要： A connector component for optical fibers has good dimensional accuracy and parallelism. The connector component includes a base material. The base material is provided with at least two holes for inserting and fixing optical fibers therein. The base material is made of quartz glass. Inner components are arranged for forming holes for inserting optical fibers in a die for forming an outer form of the connector component with a dimensional accuracy equal to or less than 2 μm. Slurry is poured into the die, the slurry including quartz powder, a resin binder, a dispersant, water and a curing agent. The poured slurry is cured and heated under vacuum so as to vitrify the cured slurry to obtain the quartz glass.
摘要翻译： 用于光纤的连接器部件具有良好的尺寸精度和平行度。 连接器部件包括基材。 基材具有至少两个用于在其中插入和固定光纤的孔。 基材由石英玻璃制成。 内部部件被布置成用于形成用于将光纤插入到用于形成等于或小于2μm的尺寸精度的连接器部件的外部形状的模具中的孔。 将浆料倒入模具中，浆料包括石英粉，树脂粘合剂，分散剂，水和固化剂。 将倾倒的浆料固化并在真空下加热，以使固化的浆料玻璃化以获得石英玻璃。
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10.发明申请Fiber array for optical communication and method of manufacturing the fiber array 有权用于光通信的光纤阵列和制造光纤阵列的方法公开(公告)号：US20060051045A1
公开(公告)日：2006-03-09
申请号：US10521952
申请日：2003-05-08
IPC分类号： G02B6/00
CPC分类号： G02B6/3834 , B23K26/364 , G02B6/3636 , G02B6/3652 , G02B6/3688 , G02B6/3692 , G02B6/3837 , G02B6/3839
摘要： There is provided a multi-cored fiber array for optical communication which has high dimensional accuracy, can easily be prepared by machining, and is low in cost. There is also provided a fiber array for optical communication which can reduce the necessary amount of an adhesive used for fixing optical fibers to a substrate. The fiber array for optical communication comprises: a substrate for inserting optical fibers therein; and a press plate for pressing and fixing the inserted optical fibers. The substrate has a plurality of grooves into which the optical fibers are to be inserted. The accuracy of the center-to-center dimension between the grooves adjacent to each other is within ±0.5 μm, and the degree of parallelization in the groove length direction between the grooves adjacent to each other is within ±0.1 degree.
摘要翻译： 提供了具有高尺寸精度的光纤通信用多芯光纤阵列，可以容易地通过机械加工而成本低廉。 还提供了一种用于光通信的光纤阵列，其可以减少用于将光纤固定到基板的粘合剂所需的量。 用于光通信的光纤阵列包括：用于在其中插入光纤的基板; 以及用于按压和固定插入的光纤的压板。 基板具有多个槽，光纤将被插入其中。 彼此相邻的槽之间的中心至中心尺寸的精度在±0.5μm之间，并且彼此相邻的槽之间的槽长度方向上的平行度在±0.1度以内。
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