公开(公告)号：US06479307B2

公开(公告)日：2002-11-12

申请号：US09854007

申请日：2001-05-10

申请人： Shu-Ya Chuang ,  Gow-Wei Sun ,  Ga-Ming Hong ,  Steven Chen ,  Pei-Jen Wang

发明人： Shu-Ya Chuang ,  Gow-Wei Sun ,  Ga-Ming Hong ,  Steven Chen ,  Pei-Jen Wang

IPC分类号： H01L2166

CPC分类号： H01L22/34 ,  H01L21/76802

摘要： A method of monitoring loss of silicon nitride, used to monitor the loss of a first etch stop layer below a first insulating layer in a first contact opening opening after the first contact opening is formed in the first insulating layer over a device region and scribe line of a wafer. A dummy wafer is provided on which stacks in sequence a second etch stop layer and a second insulating layer. The second insulating layer is patterned by removing a portion of the second insulating layer, so that a monitoring opening that exposes the second etch stop layer and a second contact opening are formed in the second insulating layer. A first measuring step is performed to measure a first thickness loss and a second thickness loss from the second etch stop layer exposed respectively by the monitoring opening and the second contact opening on the dummy wafer. And a correlation is established from the first and second thickness losses. A second measuring step is performed to measure a third thickness loss from the first etch stop layer exposed by the monitoring opening on the wafer. The result is then compared with the correlation to deduce a fourth thickness loss from the first contact opening on the wafer.

摘要翻译： 一种监测氮化硅损失的方法，用于监测在第一接触开口之后的第一绝缘层中的第一绝缘层下方的第一蚀刻停止层的损失，该第一绝缘层在第一绝缘层上形成在器件区域和划线 的晶片。 提供了一个虚设晶片，其上依次叠置有第二蚀刻停止层和第二绝缘层。 通过去除第二绝缘层的一部分来图形化第二绝缘层，使得在第二绝缘层中形成暴露第二蚀刻停止层和第二接触开口的监视开口。 执行第一测量步骤以测量分别由伪晶片上的监视开口和第二接触开口暴露的第二蚀刻停止层的第一厚度损失和第二厚度损失。 并且从第一和第二厚度损失建立相关性。 执行第二测量步骤以测量由晶片上的监视开口暴露的第一蚀刻停止层的第三厚度损失。 然后将结果与相关性进行比较以推导出晶片上的第一接触开口的第四厚度损失。

公开(公告)号：US06410422B1

公开(公告)日：2002-06-25

申请号：US09684476

申请日：2000-10-10

申请人： Gow-Wei Sun ,  Pei-Jen Wang

发明人： Gow-Wei Sun ,  Pei-Jen Wang

IPC分类号： H01L214763

CPC分类号： H01L21/76802 ,  H01L21/31116 ,  H01L21/76895

摘要： A method of forming a local interconnect contact opening is described. A liner layer is formed on a substrate having a gate structure, a first source/drain region, and a second source/drain region formed thereon. A planarized dielectric layer is formed over the liner layer. A photoresist layer, which defines the location of the local interconnect contact opening, is formed over the dielectric layer. A one-step etching process is performed using a C5F8/CO/O2/Ar etching gas and the liner layer as an etching stop. The dielectric layer exposed by the opening of the photoresist layer is removed to expose the liner layer. The liner layer and the photoresist layer are removed.

摘要翻译： 描述形成局部互连接触开口的方法。 衬底层形成在其上形成有栅极结构，第一源极/漏极区域和第二源极/漏极区域的衬底上。 平坦化介电层形成在衬层上。 限定局部互连触点开口的位置的光致抗蚀剂层形成在介电层上。 使用C5F8 / CO / O 2 / Ar蚀刻气体和衬垫层作为蚀刻停止件进行一步蚀刻工艺。 去除由光致抗蚀剂层的开口暴露的电介质层以露出衬里层。 去除衬里层和光致抗蚀剂层。

公开(公告)号：US06600961B2

公开(公告)日：2003-07-29

申请号：US09751524

申请日：2000-12-29

申请人： Jui-Ming Liang ,  Pei-Jen Wang

发明人： Jui-Ming Liang ,  Pei-Jen Wang

IPC分类号： G05B1302

CPC分类号： G05B13/027 ,  B29C45/76 ,  B29C45/766 ,  B29C45/7693 ,  B29C2945/76976 ,  B29C2945/76979 ,  Y10S706/904

摘要： An intelligent control method for injection machine is to transplant the intelligent control and prediction techniques of a neural network to an injection machine, which has been exemplified capable of deciding the quasi best machine parameters rapidly in couple processing cycles for increasing yield with least loss, and for detecting and adjusting conditions until a desired operation environment is obtained.

公开(公告)号：US11018362B2

公开(公告)日：2021-05-25

申请号：US16427028

申请日：2019-05-30

申请人： Lih-Ren Shiue ,  Zhen-Hua Fei ,  Pei-Jen Wang

发明人： Lih-Ren Shiue ,  Zhen-Hua Fei ,  Pei-Jen Wang

IPC分类号： H01M8/0656 ,  H01M4/86 ,  H01M16/00

摘要： Oxygen from water can be efficiently and economically achieved via water electrolysis on antimony, nickel doped tin oxide (Sb,Ni—SnO2/Ti) anode using low DC power. As O2 is evolved, it will be quickly reduced by adjacent cobalt oxide doped carbon nanofilm (Co3O4—CNF/Ti) to hydrogen peroxide (H2O2) and electricity. In the said electricity generation, O2 is first formed in O2 evolution reaction (OER), then, electricity is generated in O2 reduction reaction (ORR). Both of anode and cathode are shared by OER and ORR, yet, the former consumes energy and the latter yields electricity. It is the cathode, a load and the anode that form an electricity-forming circuit. The said circuit relies on clean water to supply the fuel, O2, hence, it is designated as all-water fuel cell (AWFC). Supercapacitor is employed as the load for AWFC, and onboard purifiers are providers of clean water for AWFC.

公开(公告)号：US08149513B2

公开(公告)日：2012-04-03

申请号：US12318447

申请日：2008-12-30

申请人： Pei-Jen Wang ,  Jer-Liang Andrew Yeh

发明人： Pei-Jen Wang ,  Jer-Liang Andrew Yeh

IPC分类号： G02B3/14

CPC分类号： G02B3/14

摘要： The invention discloses a package structure of a liquid lens which includes a first substrate and an electrode on the first substrate. The package structure includes a second substrate, a first sleeve, a second sleeve, a first circular member, and a second circular member. The first substrate is fixed at the first sleeve to form a holding chamber for receiving a first dielectric liquid and a second dielectric liquid. The second substrate is disposed on the liquid lens and fixed at the second sleeve. The first sleeve is fixedly connected inside the first sleeve and the second substrate. The second circular member is disposed on the first circular member. The first and second circular member are located and urged between the first sleeve and the second sleeve to form a reserved expansion chamber.

摘要翻译： 本发明公开了一种液晶透镜的封装结构，其包括第一基板和第一基板上的电极。 封装结构包括第二基板，第一套筒，第二套筒，第一圆形部件和第二圆形部件。 第一基板固定在第一套筒上，以形成容纳第一介电液体和第二介电液体的保持室。 第二基板设置在液体透镜上并固定在第二套筒上。 第一套筒固定地连接在第一套筒和第二衬底内。 第二圆形构件设置在第一圆形构件上。 第一和第二圆形构件被定位并且在第一套筒和第二套筒之间被推压以形成预留的膨胀室。

公开(公告)号：US06500575B1

公开(公告)日：2002-12-31

申请号：US09472745

申请日：1999-12-27

申请人： Lih-Ren Shiue ,  Shinn-Horng Yeh ,  Wen-Jin Lee ,  Pei-Jen Wang ,  Chum-Sam Hong ,  Shu-Chin Chou ,  Horng-Jee Wang

发明人： Lih-Ren Shiue ,  Shinn-Horng Yeh ,  Wen-Jin Lee ,  Pei-Jen Wang ,  Chum-Sam Hong ,  Shu-Chin Chou ,  Horng-Jee Wang

IPC分类号： G01M1206

CPC分类号： H01M12/065 ,  H01M10/48 ,  Y10T29/49108

摘要： A method for fabricating cylindrical and prismatic rechargeable metal-air batteries is devised. The method includes using micro fans to control air flowing through the batteries via air pathways between the packs of electrodes and separator sheet. The air pathways are created by protrusions printed or molded on plastic spacer film. The air is used by the positive electrode for generating electricity when the metal-air battery is discharged. By conjunction of a second positive electrode and an energy storage device, the micro fans can be actuated as soon as the metal-air battery is demanded by a load. The in-cell air management can not only supply air for reactions but also shut the system to preserve materials when they are not in service.

摘要翻译： 设计了一种用于制造圆柱形和棱柱形可再充电金属 - 空气电池的方法。 该方法包括使用微型风扇来控制通过电极组和隔板之间的空气通路流过电池的空气。 空气路径由在塑料间隔膜上印刷或模制的突起产生。 当金属 - 空气电池放电时，正极用空气进行发电。 通过结合第二正电极和能量存储装置，一旦金属空气电池被负载要求，微风扇就可以被致动。 电池内空气管理不仅可以为反应提供空气，还可以关闭系统以在不使用时保存材料。

公开(公告)号：US6083825A

公开(公告)日：2000-07-04

申请号：US329113

申请日：1999-06-09

申请人： Jy-Hwang Lin ,  Yueh-Feng Ho ,  Pei-Jen Wang

发明人： Jy-Hwang Lin ,  Yueh-Feng Ho ,  Pei-Jen Wang

IPC分类号： H01L21/3213 ,  H01L21/768 ,  H01L21/4763

CPC分类号： H01L21/76802 ,  H01L21/32139

摘要： An improved method of fabricating an unlanded via hole on a semiconductor substrate is provided. A conductive line and a patterned anti-reflection coating layer are sequentially formed on the substrate wherein the patterned anti-reflection coating layer has a smaller width than the conductive line and a portion of the conductive layer is exposed by the patterned anti-reflection coating layer. A planarized dielectric layer is formed over the substrate to cover the patterned anti-reflection coating layer and the conductive line. A via hole is formed in the planarized dielectric layer to expose portions of surface and sidewalls of the patterned anti-reflection coating layer as well as the conductive line.

摘要翻译： 提供了一种在半导体衬底上制造无衬底通孔的改进方法。 在基板上依次形成导电线和图案化的抗反射涂层，其中图案化的抗反射涂层具有比导电线更小的宽度，并且导电层的一部分被图案化的抗反射涂层 。 平面化介电层形成在衬底上以覆盖图案化的抗反射涂层和导线。 在平坦化的电介质层中形成通孔以暴露图案化的抗反射涂层以及导电线的表面和侧壁的部分。

公开(公告)号：US20100079873A1

公开(公告)日：2010-04-01

申请号：US12318447

申请日：2008-12-30

申请人： Pei-Jen Wang ,  Jer-Liang Andrew Yeh

发明人： Pei-Jen Wang ,  Jer-Liang Andrew Yeh

IPC分类号： G02B3/14

CPC分类号： G02B3/14

摘要： The invention discloses a package structure of a liquid lens which includes a first substrate and an electrode on the first substrate. The package structure includes a second substrate, a first sleeve, a second sleeve, a first circular member, and a second circular member. The first substrate is fixed at the first sleeve to form a holding chamber for receiving a first dielectric liquid and a second dielectric liquid. The second substrate is disposed on the liquid lens and fixed at the second sleeve. The first sleeve is fixedly connected inside the first sleeve and the second substrate. The second circular member is disposed on the first circular member. The first and second circular member are located and urged between the first sleeve and the second sleeve to form a reserved expansion chamber.

摘要翻译： 本发明公开了一种液晶透镜的封装结构，其包括第一基板和第一基板上的电极。 封装结构包括第二基板，第一套筒，第二套筒，第一圆形部件和第二圆形部件。 第一基板固定在第一套筒上，以形成容纳第一介电液体和第二介电液体的保持室。 第二基板设置在液体透镜上并固定在第二套筒上。 第一套筒固定地连接在第一套筒和第二衬底内。 第二圆形构件设置在第一圆形构件上。 第一和第二圆形构件被定位并且在第一套筒和第二套筒之间被推压以形成预留的膨胀室。

公开(公告)号：US06780761B1

公开(公告)日：2004-08-24

申请号：US10604771

申请日：2003-08-15

申请人： Chih-Ning Wu ,  Ming-Hsing Liu ,  Hsiao-Pang Chou ,  Ching-Piao Lin ,  Pei-Jen Wang

发明人： Chih-Ning Wu ,  Ming-Hsing Liu ,  Hsiao-Pang Chou ,  Ching-Piao Lin ,  Pei-Jen Wang

IPC分类号： H01L214763

CPC分类号： H01L21/76831 ,  H01L21/76808 ,  H01L21/76826 ,  H01L2221/1031

摘要： The present invention pertains to a via-first dual damascene process. A semiconductor substrate having a conductive structure and a dielectric layer on the semiconductor substrate is provided. The dielectric layer has a via opening exposing the conductive structure. The via opening is filled with a gap-filling polymer to form a gap-filling polymer (GFP) layer on the dielectric layer. The GFP layer is etched back to a predetermined depth such that an exposed surface of the GFP layer is lower than surface of the dielectric layer to form a recess, thereby exposing portions of sidewalls of the via opening. A surface treatment for altering surface property of the sidewalls and the exposed surface of the GFP layer is then carried out, thereby preventing a subsequent deep UV photoresist from interacting with the sidewalls or the exposed surface of the GFP layer either in a chemical or physical way.

摘要翻译： 本发明涉及一种通孔 - 第一双镶嵌工艺。 提供了在半导体衬底上具有导电结构和电介质层的半导体衬底。 电介质层具有暴露导电结构的通路孔。 通孔开口填充间隙填充聚合物，以在介电层上形成间隙填充聚合物（GFP）层。 将GFP层回蚀刻到预定深度，使得GFP层的暴露表面低于介电层的表面以形成凹陷，从而暴露通孔开口的侧壁部分。 然后进行用于改变侧壁和GFP层的暴露表面的表面性质的表面处理，从而防止随后的深UV光致抗蚀剂以化学或物理方式与GFP层的侧壁或暴露表面相互作用 。

公开(公告)号：US06373152B1

公开(公告)日：2002-04-16

申请号：US09501508

申请日：2000-02-09

申请人： Pei-Jen Wang ,  Shun-Ming Huang ,  Wei-Chen Wu

发明人： Pei-Jen Wang ,  Shun-Ming Huang ,  Wei-Chen Wu

IPC分类号： H02J900

CPC分类号： H02J7/345 ,  H02J2007/0037 ,  H02J2007/004

摘要： An electricity storage device and a portable electric-powered tool. The device comprises at least a battery; at least a super capacitor, which has lower internal impedance, when fully charged, than that of the battery and connects the battery in parallel; and an output end for supplying the electricity. The super capacitor is the major power supply for the pulse current output; the battery is used for generating electricity to the super capacitor and is the secondary power supply for the pulse current output. The connection of the battery and the super capacitor does not need any converters or current-limiting resistors.

摘要翻译： 蓄电装置和便携式电动工具。 该装置至少包括一个电池; 至少一个超级电容器，当完全充电时具有比电池更低的内部阻抗并且并联连接电池; 以及用于供电的输出端。 超级电容器是脉冲电流输出的主要电源; 电池用于向超级电容器发电，是用于脉冲电流输出的二次电源。 电池和超级电容器的连接不需要任何转换器或限流电阻。