公开(公告)号：US20240056054A1

公开(公告)日：2024-02-15

申请号：US18449102

申请日：2023-08-14

申请人： SiTime Corporation

发明人： Charles I. Grosjean ,  Ginel C. Hill ,  Paul M. Hagelin ,  Renata Melamud Berger ,  Aaron Patridge ,  Markus Lutz

IPC分类号： H03H9/24 ,  H03H3/007 ,  H03H9/10 ,  B81C1/00

CPC分类号： H03H9/2457 ,  H03H3/0072 ,  H03H3/0076 ,  H03H9/1057 ,  B81C1/0069

摘要： A microelectromechanical system (MEMS) resonator includes a substrate having a substantially planar surface and a resonant member having sidewalls disposed in a nominally perpendicular orientation with respect to the planar surface. Impurity dopant is introduced via the sidewalls of the resonant member such that a non-uniform dopant concentration profile is established along axis extending between the sidewalls parallel to the substrate surface and exhibits a relative minimum concentration in a middle region of the axis.