Radio frequency power delivery system
    1.
    发明授权
    Radio frequency power delivery system 有权
    射频发射系统

    公开(公告)号:US07764140B2

    公开(公告)日:2010-07-27

    申请号:US11554979

    申请日:2006-10-31

    IPC分类号: H03H7/38

    CPC分类号: H03F1/56 H03F3/191 H03F3/20

    摘要: A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译: 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源,用于将DC功率转换为RF功率的功率放大器,用于测量与RF功率相关联的电压和电流矢量之间的电压,电流和相位角的传感器 ,电可控阻抗匹配系统,用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块,用于确定输送到动态负载的功率的电子匹配系统校准模块,以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    Radio Frequency Power Delivery System
    2.
    发明申请
    Radio Frequency Power Delivery System 有权
    射频供电系统

    公开(公告)号:US20120262064A1

    公开(公告)日:2012-10-18

    申请号:US13368920

    申请日:2012-02-08

    IPC分类号: G05F3/02 H05H1/46

    摘要: A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译: 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源,用于将DC功率转换为RF功率的功率放大器,用于测量与RF功率相关联的电压和电流矢量之间的电压,电流和相位角的传感器 ,电可控阻抗匹配系统,用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块,用于确定输送到动态负载的功率的电子匹配系统校准模块,以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    RADIO FREQUENCY POWER DELIVERY SYSTEM
    4.
    发明申请
    RADIO FREQUENCY POWER DELIVERY SYSTEM 审中-公开
    无线电频率供电系统

    公开(公告)号:US20080179948A1

    公开(公告)日:2008-07-31

    申请号:US12024734

    申请日:2008-02-01

    IPC分类号: H02J1/10 H03G3/20 H01J15/04

    摘要: A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译: 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源,用于将DC功率转换为RF功率的功率放大器,用于测量与RF功率相关联的电压和电流矢量之间的电压,电流和相位角的传感器 ,电可控阻抗匹配系统,用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块,用于确定输送到动态负载的功率的电子匹配系统校准模块,以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    Method and apparatus for preventing instabilities in radio-frequency plasma processing
    5.
    发明授权
    Method and apparatus for preventing instabilities in radio-frequency plasma processing 有权
    防止射频等离子体处理不稳定的方法和装置

    公开(公告)号:US07755300B2

    公开(公告)日:2010-07-13

    申请号:US11554996

    申请日:2006-10-31

    IPC分类号: G05F1/00

    摘要: A method and apparatus for controlling a power supply to prevent instabilities due to dynamic loads in RF plasma processing systems, operating at frequencies of from 1 MHz and up 1 MHz and above. The apparatus includes a power source, a power converter receiving power from the source, the power converter providing a constant output power controlled by varying at least one of input voltage or switching frequency, and an RF generator receiving constant power from the power converter.

    摘要翻译: 一种用于控制电源以防止由RF等离子体处理系统中的动态负载引起的不稳定的方法和装置,其工作频率为1MHz和1MHz以上。 该装置包括电源,从源极接收功率的功率转换器,功率转换器提供通过改变输入电压或开关频率中的至少一个来控​​制的恒定输出功率,以及从功率转换器接收恒定功率的RF发生器。

    Power holdup circuit
    7.
    发明授权
    Power holdup circuit 有权
    电源保持电路

    公开(公告)号:US06879140B2

    公开(公告)日:2005-04-12

    申请号:US10606206

    申请日:2003-06-25

    IPC分类号: H02J9/06 G05F5/00

    CPC分类号: H02J9/061

    摘要: A power holdup circuit including a monitoring circuit and a power holdup circuit. The monitoring circuit includes an average voltage comparator and an absolute voltage comparator which cooperate to detect a voltage drop in the voltage supplied by the power supply. The monitoring circuit also includes a timer to determine the time period of the voltage dropout. If a predetermined voltage dropout event occurs, the monitoring circuit generates a control signal to a switching component which activates a holdup power source. The holdup power source includes an energy storage device that stores energy to maintain the supply voltage during dropout periods.

    摘要翻译: 一种功率保持电路,包括监视电路和功率保持电路。 监视电路包括一个平均电压比较器和一个绝对电压比较器,它们协调检测由电源提供的电压的电压降。 监控电路还包括一个定时器,用于确定电压降的时间周期。 如果发生预定的电压脱落事件,则监视电路产生一个控制信号给切换组件,该开关组件激活一个保持电源。 保持电源包括能量存储装置,其储存能量以在压差期间维持供电电压。

    ELECTROSURGICAL DEVICE WITH CONTROLLABLE ELECTRIC FIELD PROFILE
    9.
    发明申请
    ELECTROSURGICAL DEVICE WITH CONTROLLABLE ELECTRIC FIELD PROFILE 审中-公开
    具有可控电场剖面的电磁装置

    公开(公告)号:US20130331834A1

    公开(公告)日:2013-12-12

    申请号:US13957032

    申请日:2013-08-01

    IPC分类号: A61B18/18

    摘要: An electrosurgical device includes a plurality of electrodes arranged to form a tissue treatment surface and a power supply. The power supply is configured to deliver a first drive signal with a first phase to at least a first one of the plurality of electrodes and a second drive signal with a second phase to at least a second one of the plurality of electrodes such that an electric field extends from the tissue treatment surface, where the first phase and the second phase are different. The power supply is further configured to receive an input from an operator of the electrosurgical device, and adjust the first phase or the second phase such that an aspect of the electric field extending from the tissue treatment surface changes in response to the input from the operator.

    摘要翻译: 电外科装置包括布置成形成组织处理表面的多个电极和电源。 电源被配置为将具有第一相的第一驱动信号传递到多个电极中的至少第一电极,以及具有第二相位的第二驱动信号到多个电极中的至少第二电极,使得电 场从组织处理表面延伸,其中第一相和第二相不同。 电源还被配置为接收来自电外科设备的操作者的输入,并且调整第一相或第二相,使得从组织处理表面延伸的电场的一个方面响应于来自操作者的输入而改变 。