Radio frequency power delivery system
    1.
    发明授权
    Radio frequency power delivery system 有权
    射频发射系统

    公开(公告)号:US07764140B2

    公开(公告)日:2010-07-27

    申请号:US11554979

    申请日:2006-10-31

    IPC分类号: H03H7/38

    CPC分类号: H03F1/56 H03F3/191 H03F3/20

    摘要: A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译: 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源,用于将DC功率转换为RF功率的功率放大器,用于测量与RF功率相关联的电压和电流矢量之间的电压,电流和相位角的传感器 ,电可控阻抗匹配系统,用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块,用于确定输送到动态负载的功率的电子匹配系统校准模块,以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    Radio Frequency Power Delivery System
    2.
    发明申请
    Radio Frequency Power Delivery System 有权
    射频供电系统

    公开(公告)号:US20100231296A1

    公开(公告)日:2010-09-16

    申请号:US12786763

    申请日:2010-05-25

    IPC分类号: H03F1/08

    CPC分类号: H03F1/56 H03F3/191 H03F3/20

    摘要: A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译: 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源,用于将DC功率转换为RF功率的功率放大器,用于测量与RF功率相关联的电压和电流矢量之间的电压,电流和相位角的传感器 ,电可控阻抗匹配系统,用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块,用于确定输送到动态负载的功率的电子匹配系统校准模块,以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    Radio frequency power delivery system
    3.
    发明授权
    Radio frequency power delivery system 有权
    射频发射系统

    公开(公告)号:US08633782B2

    公开(公告)日:2014-01-21

    申请号:US12786763

    申请日:2010-05-25

    IPC分类号: H03H7/38

    CPC分类号: H03F1/56 H03F3/191 H03F3/20

    摘要: A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译: 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源,用于将DC功率转换为RF功率的功率放大器,用于测量与RF功率相关联的电压和电流矢量之间的电压,电流和相位角的传感器 ,电可控阻抗匹配系统,用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块,用于确定输送到动态负载的功率的电子匹配系统校准模块,以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    Chemical ionization reaction or proton transfer reaction mass spectrometry
    4.
    发明授权
    Chemical ionization reaction or proton transfer reaction mass spectrometry 失效
    化学电离反应或质子转移反应质谱

    公开(公告)号:US08334505B2

    公开(公告)日:2012-12-18

    申请号:US12026799

    申请日:2008-02-06

    IPC分类号: H01J49/26

    摘要: A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.

    摘要翻译: 描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。 还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室,由质谱模块检测。 该系统包括用于设置系统参数值和分析模块的各种控制模块,用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。

    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A TIME-OF-FLIGHT MASS SPECTROMETER
    5.
    发明申请
    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A TIME-OF-FLIGHT MASS SPECTROMETER 失效
    化学离子反应或原子转移反应与时间飞行质谱仪的质谱

    公开(公告)号:US20090095902A1

    公开(公告)日:2009-04-16

    申请号:US11869980

    申请日:2007-10-10

    IPC分类号: H01J49/40 H01J49/26 H01J49/36

    CPC分类号: H01J49/145

    摘要: A system, components thereof, and methods are described for time-of-flight mass spectrometry. A microwave or high-frequency RF energy source is used to ionize a reagent vapor to form reagent ions. The reagent ions enter a chamber and interact with a fluid sample to form product ions. The reagent ions and product ions are directed to a time-of-flight mass spectrometer module for detection and determination of a mass value for the ions. The time-of-flight mass spectrometer module can include an optical system and an ion beam adjuster for focusing, interrupting, or altering a flow of reagent and product ions according to a specified pattern. The time-of-flight mass spectrometer module can include signal processing techniques to collect and analyze an acquired signal, for example, using statistical signal processing, such as maximum likelihood signal processing.

    摘要翻译: 描述了用于飞行时间质谱的系统及其组件和方法。 微波或高频RF能量源用于电离试剂蒸气以形成试剂离子。 试剂离子进入室并与流体样品相互作用以形成产物离子。 试剂离子和产物离子被引导到飞行时间质谱仪模块,用于检测和确定离子的质量值。 飞行时间质谱模块可以包括用于根据指定图案聚焦,中断或改变试剂和产物离子流的光学系统和离子束调节器。 飞行时间质谱仪模块可以包括用于收集和分析所获取的信号的信号处理技术,例如使用诸如最大似然信号处理的统计信号处理。

    Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry
    6.
    发明申请
    Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry 失效
    化学电离反应或质子转移反应质谱法

    公开(公告)号:US20120003748A1

    公开(公告)日:2012-01-05

    申请号:US12026799

    申请日:2008-02-06

    IPC分类号: G01N33/00

    摘要: A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.

    摘要翻译: 描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。 还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室,由质谱模块检测。 该系统包括用于设置系统参数值和分析模块的各种控制模块,用于在光谱测定和系统内的故障期间检测离子种类的质量和峰值强度值。

    Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer
    7.
    发明授权
    Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer 失效
    化学电离反应或质子转移反应质谱联用飞行时间质谱仪

    公开(公告)号:US08003936B2

    公开(公告)日:2011-08-23

    申请号:US11869980

    申请日:2007-10-10

    IPC分类号: H01J49/26

    CPC分类号: H01J49/145

    摘要: A system, components thereof, and methods are described for time-of-flight mass spectrometry. A microwave or high-frequency RF energy source is used to ionize a reagent vapor to form reagent ions. The reagent ions enter a chamber and interact with a fluid sample to form product ions. The reagent ions and product ions are directed to a time-of-flight mass spectrometer module for detection and determination of a mass value for the ions. The time-of-flight mass spectrometer module can include an optical system and an ion beam adjuster for focusing, interrupting, or altering a flow of reagent and product ions according to a specified pattern. The time-of-flight mass spectrometer module can include signal processing techniques to collect and analyze an acquired signal, for example, using statistical signal processing, such as maximum likelihood signal processing.

    摘要翻译: 描述了用于飞行时间质谱的系统及其组件和方法。 微波或高频RF能量源用于电离试剂蒸气以形成试剂离子。 试剂离子进入室并与流体样品相互作用以形成产物离子。 试剂离子和产物离子被引导到飞行时间质谱仪模块,用于检测和确定离子的质量值。 飞行时间质谱模块可以包括用于根据指定图案聚焦,中断或改变试剂和产物离子流的光学系统和离子束调节器。 飞行时间质谱仪模块可以包括用于收集和分析所获取的信号的信号处理技术,例如使用诸如最大似然信号处理的统计信号处理。

    Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer
    8.
    发明授权
    Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer 失效
    用四极质谱仪进行化学电离反应或质子转移反应质谱

    公开(公告)号:US08003935B2

    公开(公告)日:2011-08-23

    申请号:US11869978

    申请日:2007-10-10

    IPC分类号: H01J49/26

    CPC分类号: H01J49/145

    摘要: A system and methods are described for generating reagent ions and product ions for use in a quadruple mass spectrometry system. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a quadruple mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass values for ion species during spectrometry and faults within the system.

    摘要翻译: 描述了用于产生用于四重质谱系统的试剂离子和产物离子的系统和方法。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室,由四重质谱仪模块进行检测。 该系统包括各种控制模块,用于设置系统参数值和分析模块,用于在光谱测定和系统内故障时检测离子物质的质量值。

    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE MASS SPECTROMETER
    9.
    发明申请
    CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A QUADRUPOLE MASS SPECTROMETER 失效
    化学离子反应或原子转移反应用四倍子质谱仪的质谱

    公开(公告)号:US20090095901A1

    公开(公告)日:2009-04-16

    申请号:US11869978

    申请日:2007-10-10

    IPC分类号: H01J49/26

    CPC分类号: H01J49/145

    摘要: A system and methods are described for generating reagent ions and product ions for use in a quadrupole mass spectrometry system. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a quadrupole mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass values for ion species during spectrometry and faults within the system.

    摘要翻译: 描述了用于产生用于四极质谱系统的试剂离子和产物离子的系统和方法。 微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。 试剂离子进入诸如漂移室的室以与流体样品相互作用。 电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。 然后试剂离子和产物离子在电场的影响下离开室,由四极质谱仪模块进行检测。 该系统包括各种控制模块,用于设置系统参数值和分析模块,用于在光谱测定和系统内故障时检测离子物质的质量值。

    RF power supply with integrated matching network
    10.
    发明授权
    RF power supply with integrated matching network 有权
    射频电源具有集成匹配网络

    公开(公告)号:US06887339B1

    公开(公告)日:2005-05-03

    申请号:US09960227

    申请日:2001-09-20

    IPC分类号: C23C16/00 H05H1/00

    摘要: The invention features an RF plasma generator. The RF plasma generator includes a variable frequency RF generator, comprising an H-bridge and an RF output. The RF generator generates electromagnetic radiation having a power. The RF plasma generator further includes a matching network that includes at least one variable impedance component. The matching network also includes a first port that is electromagnetically coupled to the output of the RF generator and a second port. The RF plasma generator also includes a load that is electromagnetically coupled to the second port of the matching network, and a plasma chamber for containing a plasma having a power. The plasma chamber is electromagnetically coupled to the load and receives electromagnetic radiation having a power from the load. Adjusting at least one of the frequency of the RF generator and the variable impedance component in the matching network changes the power in the plasma.

    摘要翻译: 本发明的特征在于RF等离子体发生器。 RF等离子体发生器包括可变频率RF发生器,其包括H桥和RF输出。 RF发生器产生具有电力的电磁辐射。 RF等离子体发生器还包括包括至少一个可变阻抗分量的匹配网络。 匹配网络还包括电磁耦合到RF发生器的输出端和第二端口的第一端口。 RF等离子体发生器还包括电磁耦合到匹配网络的第二端口的负载和用于容纳具有电力的等离子体的等离子体室。 等离子体室电磁耦合到负载并接收具有来自负载的电力的电磁辐射。 调整射频发生器的频率和匹配网络中的可变阻抗分量中的至少一个会改变等离子体的功率。