公开(公告)号：US20250027889A1

公开(公告)日：2025-01-23

申请号：US18891371

申请日：2024-09-20

Applicant: Sigray, Inc.

Inventor： David Vine ,  Wenbing Yun ,  Janos Kirz ,  Sheraz Gul ,  Sylvia Jia Yun Lewis ,  Richard Ian Spink

IPC: G01N23/046 ,  G01N23/083

Abstract: A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.

公开(公告)号：US11686692B2

公开(公告)日：2023-06-27

申请号：US17540608

申请日：2021-12-02

Applicant: Sigray, Inc.

Inventor： David Vine ,  Wenbing Yun ,  Janos Kirz ,  Sheraz Gul ,  Sylvia Jia Yun Lewis ,  Richard Ian Spink

IPC: G01N23/046 ,  G01N23/083

CPC classification number: G01N23/046 ,  G01N23/083 ,  G01N2223/204 ,  G01N2223/309

Abstract: A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.

公开(公告)号：US20240393266A1

公开(公告)日：2024-11-28

申请号：US18793678

申请日：2024-08-02

Applicant: Sigray, Inc.

Inventor： David Vine ,  Wenbing Yun ,  Janos Kirz ,  Sheraz Gul ,  Sylvia Jia Yun Lewis ,  Richard Ian Spink

IPC: G01N23/046 ,  G01N23/083

Abstract: An x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one first motion stage configured to rotate the object about a rotation axis. The system further includes at least one second motion stage configured to move the x-ray source and the at least one detector relative to the object to switch between a laminography configuration and a tomography configuration.

公开(公告)号：US10304580B2

公开(公告)日：2019-05-28

申请号：US15954380

申请日：2018-04-16

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  David Vine ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Srivatsan Seshadri

IPC: G01N23/00 ,  G21K1/02 ,  G01N23/083 ,  G21K7/00

Abstract: Systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.

公开(公告)号：US20230384245A1

公开(公告)日：2023-11-30

申请号：US18311558

申请日：2023-05-03

Applicant: Sigray, Inc.

Inventor： David Vine ,  Wenbing Yun ,  Janos Kirz ,  Sheraz Gul ,  Sylvia Jia Yun Lewis ,  Richard Ian Spink

IPC: G01N23/046 ,  G01N23/083

CPC classification number: G01N23/046 ,  G01N2223/204 ,  G01N2223/309 ,  G01N23/083

Abstract: A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.

公开(公告)号：US20180261350A1

公开(公告)日：2018-09-13

申请号：US15954380

申请日：2018-04-16

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  David Vine ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Srivatsan Seshadri

IPC: G21K1/02 ,  G21K7/00 ,  G01N23/083

CPC classification number: G21K1/025 ,  G01N23/083 ,  G01N2223/204 ,  G21K7/00

Abstract: Systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.

公开(公告)号：US20220178851A1

公开(公告)日：2022-06-09

申请号：US17540608

申请日：2021-12-02

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  David Vine

IPC: G01N23/046 ,  G01N23/083

Abstract: A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.

公开(公告)号：US12153001B2

公开(公告)日：2024-11-26

申请号：US18311558

申请日：2023-05-03

Applicant: Sigray, Inc.

Inventor： David Vine ,  Wenbing Yun ,  Janos Kirz ,  Sheraz Gul ,  Sylvia Jia Yun Lewis ,  Richard Ian Spink

IPC: G01N23/046 ,  G01N23/083

Abstract: A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.

公开(公告)号：US10656105B2

公开(公告)日：2020-05-19

申请号：US16525198

申请日：2019-07-29

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  David Vine

IPC: G01N23/20 ,  G01N23/02 ,  A61B6/00 ,  A61B6/03

Abstract: An x-ray source and an x-ray interferometry system utilizing the x-ray source are provided. The x-ray source includes a target that includes a substrate and a plurality of structures. The substrate includes a thermally conductive first material and a first surface. The plurality of structures is on or embedded in at least a portion of the first surface. The structures are separate from one another and are in thermal communication with the substrate. The structures include at least one second material different from the first material, the at least one second material configured to generate x-rays upon irradiation by electrons having energies in an energy range of 0.5 keV to 160 keV. The x-ray source further includes an electron source configured to generate the electrons and to direct the electrons to impinge the target and to irradiate at least some of the structures along a direction that is at a non-zero angle relative to a surface normal of the portion of the first surface. The x-ray source further includes at least one optical element positioned such that at least some of the x-rays are transmitted through the first material and to or through the at least one optical element.

公开(公告)号：US10352880B2

公开(公告)日：2019-07-16

申请号：US15605957

申请日：2017-05-26

Applicant: Sigray, Inc.

Inventor： Wenbing Yun ,  Sylvia Jia Yun Lewis ,  Janos Kirz ,  Srivatsan Seshadri ,  Alan Francis Lyon ,  David Vine

IPC: G21K7/00 ,  G01N23/04 ,  G01N23/20 ,  A61B6/00 ,  G21K1/02 ,  H01J35/08

Abstract: This disclosure presents systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro- or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using an arrayed x-ray source or a set of Talbot interference fringes.