公开(公告)号：US20170103991A1

公开(公告)日：2017-04-13

申请号：US15264457

申请日：2016-09-13

Applicant: Silicon Storage Technology, Inc.

Inventor： JINHO KIM ,  CHIEN-SHENG SU ,  FENG ZHOU ,  XIAN LIU ,  NHAN DO ,  PRATEEP TUNTASOOD ,  PARVIZ GHAZAVI

IPC: H01L27/115

CPC classification number: H01L27/11531 ,  H01L27/11524 ,  H01L27/11536 ,  H01L27/11539 ,  H01L27/11541 ,  H01L27/11543

Abstract: A method of forming a memory device on a substrate having memory, core and HV device areas. The method includes forming a pair of conductive layers in all three areas, forming an insulation layer over the conductive layers in all three areas (to protect the core and HV device areas), and then etching through the insulation layer and the pair of conductive layers in the memory area to form memory stacks. The method further includes forming an insulation layer over the memory stacks (to protect the memory area), removing the pair of conductive layers in the core and HV device areas, and forming conductive gates disposed over and insulated from the substrate in the core and HV device areas.