公开(公告)号：US09406487B2

公开(公告)日：2016-08-02

申请号：US14138833

申请日：2013-12-23

Applicant: Sputtering Components, Inc.

Inventor： Daniel Theodore Crowley ,  Patrick Lawrence Morse ,  William A. Meredith, Jr. ,  John Robert German ,  Michelle Lynn Neal

IPC: H01J7/24 ,  H05B31/26 ,  H01J37/34

CPC classification number: H01J37/3405 ,  H01J37/3417 ,  H01J37/3438 ,  H01J37/3444 ,  H01J37/345

Abstract: One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.

Abstract translation: 一个实施例涉及一种等离子体源，包括其中形成空腔的主体和设置在空腔内的至少两个独立的磁控管组件。 磁控管组件彼此电气隔离并与主体相互隔离。 在这种实施例的一个实现中，独立的磁控管组件包括闭合漂移磁控管组件。 公开了其他实施例。

公开(公告)号：US09362093B2

公开(公告)日：2016-06-07

申请号：US14138833

申请日：2013-12-23

Applicant: Sputtering Components, Inc.

Inventor： Daniel Theodore Crowley ,  Patrick Lawrence Morse ,  William A. Meredith, Jr. ,  John Robert German ,  Michelle Lynn Neal

IPC: H01J7/24 ,  H05B31/26 ,  H01J37/34

Abstract: One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.

公开(公告)号：US20140184073A1

公开(公告)日：2014-07-03

申请号：US14138833

申请日：2013-12-23

Applicant: Sputtering Components, Inc.

Inventor： Daniel Theodore Crowley ,  Patrick Lawrence Morse ,  William A. Meredith, JR. ,  John Robert German ,  Michelle Lynn Neal

IPC: H01J37/32

CPC classification number: H01J37/3405 ,  H01J37/3417 ,  H01J37/3438 ,  H01J37/3444 ,  H01J37/345

Abstract: One embodiment is directed to a plasma source comprising a body in which a cavity is formed and at least two self-contained magnetron assemblies disposed within the cavity. The magnetron assemblies are mutually electrically isolated from each other and from the body. In one implementation of such an embodiment, the self-contained magnetron assemblies comprise closed-drift magnetron assemblies. Other embodiments are disclosed.

Abstract translation: 一个实施例涉及一种等离子体源，包括其中形成空腔的主体和设置在空腔内的至少两个独立的磁控管组件。 磁控管组件彼此电气隔离并与主体相互隔离。 在这种实施例的一个实现中，独立的磁控管组件包括闭合漂移磁控管组件。 公开了其他实施例。